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8. ALARMS AND CORRECTIVE ACTIONS
Alarms and Corrective Actions
Alarm
Probable Cause
Corrective Action
RF error
The alarm condition, RF PERMIS-
SIBLE LEVEL, is too low.
Increase the level.
(Set this based on the default value 10%)
The electrode and the chamber
are shorted by the work, etc. to
disable the set power due to a
matching error.
Place the work above the chamber so
that it does not contact the chamber.
Plasma is not produced because
the vacuum is too high or low.
Supply the process gas to ensure the
vacuum in the chamber is in the range of
100 Pa to 1 Pa.
Ar gas flow rate
error
O
2
gas flow rate
error
The alarm condition, O2, Ar PER-
MISSIBLE LEVEL, is too low or
PERMISSIBLE TIME is too short.
Increase the level or time.
(Set this based on the default values 20%
and 30 seconds)
The source valve of the gas is
closed or the gas cylinder is empty.
Open the source valve of the gas.
Replace the gas cylinder.
Reflected wave
large
The alarm condition, REFLEX
WAVE, is too small.
Increase the value.
(Set this based on the default value 20W)
The electrode and the chamber
are shorted by the work, etc. to
disable matching.
Place the work above the chamber so
that it does not contact the chamber.
Plasma is not produced because
the vacuum is too high or low.
Supply the process gas to ensure the
vacuum in the chamber is in the range of
100 Pa to 1 Pa.
Evacuating time
over
The alarm condition, VACUUM
TIME, is too short.
Increase the value.
(Set this based on the default value 2 min.)
The evacuating time becomes
longer because of wet work.
Dry the work before plasma-cleaning.
Vacuum is leaking because of
such problems as foreign matter
caught by the door, damaged
O-ring and loose piping joint.
Conduct the leak test. If leak is detect-
ed, take necessary actions such as re-
placing the defective O-ring and retight-
ening the loose piping joint.
Purge time over
The alarm condition, SUBSTITU-
TION TIME, is too short.
Increase the time.
(Set this based on the default value 2 min.)
The source valve of the gas is
closed or the gas cylinder is empty.
Open the source valve of the gas.
Replace the gas cylinder.
Vacuum pump
failure
The oil in the vacuum pump has
deteriorated to overload the motor.
Replace the oil.
Chamber tem-
perature high
The chamber temperature has
risen above 80
℃
because of a
long time of plasma radiation.
Stop using the machine until the chamber
cools down. (Even if one process is fin-
ished within the limit time, if operation
intervals are short, the limit value may be
exceeded.)
Door open
The door is open.
Close the door firmly.
If any problem not listed above has occurred, please contact the dealer or Yamato Scientific.
Summary of Contents for PDC510
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