24
10. SPECIFICATIONS
Specifications
Model
PDC510
M
a
in
u
n
it
Power supply
220 VAC
16A
50/60 Hz
Internal dimensions of
chamber
(Width) 500
×
(depth) 300
×
(height) 200 mm
Electrode structure
Parallel flat type
Electrode dimensions
(Width) 410
×
(depth) 210 mm
Plasma method
RIE
/
DP
Vacuum meter
Capacitance manometer
Controller
Programmable controller
Operation/display unit
5.7-inch STN color LCD touch panel
H
ig
h-
fre
qu
en
cy
po
w
er
s
up
pl
y
High-frequency output
power
50– 500W
Reference oscillator
Quartz oscillator
Oscillation frequency
13.56 MHz
Output setting method
Manual setting on the touch panel
Matching method
Auto tuning
V
a
c
u
u
m
p
u
m
p
Model
Alcatel T2033SD
Effective exhaust speed
450/533 L/min
(
50/60 Hz
)
Suction port shape
NW25
Exhaust port shape
NW40
Motor rated output
1.1
k
W
G
a
s
s
y
s
te
m
Purge gas
N
2
1/4-inch flare-less joint
Reaction gas
Ar gas Mass flow controller 100 SCCM
1/4-inch flare-less joint
O
2
gas Mass flow controller 200 SCCM
1/4-inch flare-less joint
Summary of Contents for PDC510
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