16
5. RUNNING PROCEDURE
Touch Panel Operation
(6) Parameter setting screen
Set the maximum flow rates of the mass flow controller, ultimate vacuum when filling gas, time to
add N2 gas after operation of the pressure switch for purge (an operation to ensure that the
chamber is returned to atmospheric pressure which may be under negative pressure when the
pressure switch operates) and processing gas stability time. Once they have been set, they need
not be set again for normal run.
(7) Status screen
This screen shows the time that has elapsed after the start of processing, gas flow rates, RF
power, degree of vacuum, etc. Use this screen to check these conditions during processing.
①
Using the numeric keys, enter a
value to a place where the cursor
is blinking.
②
After entering a value, press the
ENT key. If the ENT key is not
pressed, the previous value re-
mains unchanged. When the
ENT key is pressed, the cursor
moves to the next item. Enter a
value similarly. If a wrong value
has been entered, press the CLR
key to clear it.
③
After the entry, press the
PROCESS key to return to the
process screen.
④
The default values are as follows.
Parameter
Ar Gas
O2 Gas
Ultimate
Vacuum
N2 Add
Stability
Time
Default value
100
200
10
5
30
①
Returns to the process screen.
②
Starts processing.
③
Stops processing.
④
According to the current status,
standby, processing or end of
process is displayed.
Note 1: Only the blue keys may be
operated.
Note 2: After the process has been
ended, the START key will
not be accepted before the
door is opened.
Note 3: The process cannot be
started if the door is open.
①
②
③
④
Summary of Contents for PDC510
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