Yamato PDC510, Instruction Manual

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12
5. RUNNING PROCEDURE
Running Procedure
3) Machine stopping procedure
Stop the machine by the following procedure:
①
Set the machine in the standby state.
②
Turn off the operation power.
③
Turn off the circuit breaker.
The power may be turned off in any state. The purpose of turning off the power in the
standby state is to open the chamber to the atmospheric pressure to enable the door to be
opened closed any time. To keep the chamber in the vacuum state, stop the machine in the
order of PROCESS
→
START
→
vacuum reaches about 20 Pa
→
operation power off
→
circuit breaker off.
4) Motion when a power failure occurs
If the power fails, all motion stops and the status of motion is not stored. When the power is re-
covered, the controller will display the initial screen for several seconds and the machine will enter
the standby status. The following procedure is the same as the normal running procedure.
5) Motion when an alarm occurs
(The causes of alarms and corrective actions are listed on page 22.)
①
If an abnormal situation occurs, the buzzer sounds and the alarm state is shown on the touch
panel.
②
Check the problem and take corrective actions. (The buzzer can be stopped with the
BUZZER OFF key.)
③
After the corrective actions, press the RESET key. The vacuum pump will run and the pro-
cess screen will appear.
⑥
Follow the normal procedure.
6) Emergency stop
Use the emergency stop switch to stop the machine immediately when an emergency situation
occurs.
When the “emergency stop switch” installed on the operation panel is pressed, the power to the
touch panel, RF and vacuum pump is turned off.
To return the machine to the running status, use the following procedure:
①
Remove the cause of the emergency stop.
②
Turn the emergency stop switch about 1/4 turn in the arrow direction (clockwise) to reset it.
③
The controller will display the initial screen for several seconds and the machine will enter the
standby status. The following procedure is the same as the normal running procedure.
：
When the left side face plate is removed, the power to the touch panel, RF and vacuum
pump is turned off as when the emergency stop switch is pressed.
To return the machine to the original status, replace the side face plate to original position.