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Varian, Inc.

declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,

Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità

to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.

Frederick C. Campbell
Operations Manager
Vacuum Technologies

We
Wir
Nous
Nosotros
Wij
Noi

Lexington, MA, 02421-3133 USA

121 Hartwell Avenue

Vacuum Technologies

Lexington, Massachusetts, USA

Varian, Inc.

990 CLD Autoline™ Leak Detector

89/336/EEC. . . . . . . . . . . . . . . . . Electromagnetic Compatibility Directive
EN55011:1991 Class B . . . . . . . . EMC/Limits for Radiated Emissions
EN55022:1995 Class A. . . . . . . . EMC/Limits for Conducted Emissions

IEC 1000-4-2/IEC 1000-4-3. . . . . EMC/Limits for Electrostatic Emissions
IEC 1000-4-4/IEC 1000-4-6

IEC 801-2 Crit B . . . . . . . . . . . . . EMC/Immunity to Electromagnetic Fields
IEC 801-3 Crit A

and Transient Burst

IEC 801-4 Crit B

March 2001

Declaration of Conformity

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

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Summary of Contents for 990 CLD Autoline

Page 1: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

Page 2: ...uum technologies 990 CLD Autoline Leak Detector Manual N0 6999 09 690 Revision L February 2004 INSTRUCTION MANUAL Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 3: ...Copyright 2004 Vacuum Technologies 990 CLD Autoline Leak Detector Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 4: ...r in conflict with the terms of this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of Seller Warranty Replacement and Adjustment All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto and must be received within the applicable warranty period by Seller or its authorized representative Such claims should...

Page 5: ...990 CLD Autoline Leak Detector This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 6: ...eak Detector Location and Required Services 2 2 Installation 2 2 Electrical Connections 2 3 Leak Rate Output Voltage Selection 2 5 Sensitivity 2 6 Dismounting the Leak Detector 2 8 Section 3 Operations 3 1 Required Daily Procedures 3 2 Installation and Initial Setup Procedure 3 2 Tuning Adjustments and Calibration Check 3 4 As Required Procedures 3 8 Set Point Operation 3 9 Leak Rate Display RANGE...

Page 7: ... List 5 1 How to Order Parts 5 1 Major Components 5 2 Independent Electrical Components Kits 5 3 Electrical Components Kit 5 4 Independent Mechanical Items 5 4 Mechanical Components Kit 5 5 Spectrometer Tube Components Kit 5 5 Section 6 Fundamentals of Leak Detection 6 1 Leak Testing Why is it Needed 6 1 Terminology 6 2 Facts about Leak Rates 6 3 Methods of Testing for Leaks 6 4 Water Immersion Ai...

Page 8: ...1 Linear Analog Voltage Output A 1 Why Use a Linear Analog Output A 2 Logarithmic Analog Output Voltage A 3 Why Use Logarithmic Analog Output Voltage A 4 Appendix B Specifications B 1 Specifications B 1 Request for Return Health and Safety Certification Sales and Service Offices Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 9: ...990 CLD Autoline Leak Detector This page intentionally left blank D R A F T 2 2 0 4 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 10: ... Main Electronics Console Top View 1 13 1 7 Spectrometer Tube Ion Flow 1 15 2 1 Leak Rate Output Voltage Selection 2 5 3 1 Setting the Gain via Shorting Plugs 3 14 4 1 Scheduled Maintenance 4 2 A 1 990 CLD Leak Detector Linear Output Voltage Leak Output Voltage V A 5 A 2 990 CLD Leak Detector Linear Output Voltage Leak Rate Conversion Chart 2 V decade A 6 A 3 990 CLD Leak Detector Linear Output Vo...

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Page 12: ... List 2 7 3 1 Suggested Setting of SENSITIVITY Switch for Tuning 3 5 3 2 Exponent Selection Local Mode 3 11 3 3 Remote Exponent Control Truth Table 3 12 3 4 Shorting Plug and Leak Rate Outputs 3 14 4 5 As Required Maintenance 4 2 5 1 Major Components 5 2 5 2 Independent Electrical Items Part Number L9022 5 3 5 3 Electrical Components Kit Part No L9086301 5 4 5 4 Independent Mechanical Items 5 4 5 ...

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Page 14: ...t s normatif s al que se refiere esta declaración es conforme a la s norma s u otro s documento s normativo s waamaar deze verklaring verwijst aan de volende norm en of richtlijn en beantwoodt a cui se rifersce questa dichiarazione è conforme alla e sequente I norma o documento I normativo i Frederick C Campbell Operations Manager Vacuum Technologies We Wir Nous Nosotros Wij Noi Lexington MA 02421...

Page 15: ...s or precautions could result in injury or death CAUTION Cautions are used when failure to observe instructions could result in damage to equipment whether Vacuum Technologies supplied or other associated equipment NOTE Notes contain information to aid the operator in obtaining the best performance from the equipment Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www art...

Page 16: ... When heated sprayed or exposed to high temperature equipment these solvents become flammable and explosive causing serious injury or death Do not use these solvents near a high temperature source Ventilate the working area with a blower and use in a large well ventilated room Alcohol methanol or other solvents are irritants narcotics depressants and or carcinogens Their inhalation and or ingestio...

Page 17: ...lint free cloth or paper If vacuum grease is required apply Apiezon L lightly remove excess grease until only a shiny thin film remains CAUTION Do not use grease or other substance on O rings that will come in contact with the spectrometer tube WARNING Store the Ion Source in a cool dry area in a tightly sealed container Wash hands thoroughly after handling the Ion Source and especially before smo...

Page 18: ...rence purposes if tuning adjustments are altered Slight changes may occur when using Filament No 2 or after an ion source is replaced Dial and switch settings and voltage measurements made prior to shipment are also indicated Filament Selection FILAMENT switch set to No 1 lon Voltage ION ___________ VDC between TP1 and TP4 lon Dial Setting ___________ Numbers at 12 o clock position Emission Voltag...

Page 19: ...990 CLD Autoline Leak Detector This page intentionally left blank D R A F T 2 2 0 4 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 20: ... as optional equipment to suit individual requirements The 990 CLD leak detector uses a Vacuum Technologies fast start turbo or MacroTorr turbo drag pump with ceramic bearings as its vacuum source The high vacuum pump is ready for leak detector operation in less than two minutes An external mechanical pump purchasable from Vacuum Technologies is required for use with the vacuum system Maintenance ...

Page 21: ...ed for light gases low vibration level and superior reliability compared to conventional turbo pumps due to the use of ceramic ball bearings and a reduced number of components Table 1 1 990 CLD Leak Detector Component Parts Description Part Number Main Electronics Console L9022301 302 or 303 120 V Control Input L9022301 302 or 303 Spectrometer Tube Cable L9023301 Spectrometer Tube Adapter with bra...

Page 22: ...n the test object helium entering through the leak spreads to all parts of the evacuated system Some of this helium is exhausted through the mechanical pump to atmosphere the rest of the helium is diffused through the high vacuum pump against or contra the normal flow and reaches the spectrometer tube The rate at which helium enters the spectrometer tube appears on the associated horizontal bar gr...

Page 23: ...The set point circuitry uses voltage comparators hysteresis circuitry and mechanical output relays to indicate when the signal has exceeded any one of four preset thresholds The leak rate output circuitry produces a linear or logarithmic voltage proportional to the signal see Appendix A Understanding the 990 CLD Analog Leak Rate Output 5 The leak rate output signal is buffered and clipped so as no...

Page 24: ...990 CLD Autoline Leak Detector D R A F T 2 2 0 4 1 5 Figure 1 2 Signal Flow Diagram Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 25: ...an then be connected via vacuum tubing to a mechanical pump of the customer s choice For convenience the primary and secondary operating controls and indicators are mounted on the console front panel The secondary controls are part of the main electronics assembly and are located behind a lockable front panel door There are two sections to the front panel and one on the back panel Primary Controls...

Page 26: ...vacuum pump is operational and running at its correct speed 5 Set Point DISPLAY Momentary pushbutton which causes the selected set point to be displayed on the LEAK RATE bar graph 6 Set Point SET Screwdriver potentiometer used to set the selected set point 7 Set Point ON Red LED which indicates that the leak rate has exceeded the set point 8 MAIN POWER ON OFF Toggle switch which provides power to ...

Page 27: ...trols and Indicators 990 CLD Leak Detector Table 1 5 describes the Secondary Operating Controls and Indicators which are used mainly for tuning and calibration purposes Refer to Figure 1 4 and Figure 1 5 on page 1 10 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 28: ... potentiometers The outer knob varies the tone s volume heard at the speaker The inner knob varies the audible threshold of a given leak rate 5 FILAMENT OFF ON AUTO Toggle switch to either manually turn off the filament or place it in the ON AUTO mode 6 FILAMENT 1 FILAMENT 2 Toggle switch which selects the active filament in the spectrometer tube ion source 7 COARSE ZERO Potentiometer used to zero...

Page 29: ...back panel it automatically disconnects the internal loudspeaker 2 HIGH VAC pump fuse Electronics fuse N A Main power protection devices 3 POWER Input Connector I IEC 320 4 COLD CATHODE Connector O High Voltage SHV connector for connection to the cold cathode gauge in the spectrometer tube See Wire Run Lists on page 2 4 5 PRE AMP Connector I O Pluggable terminal block for connections to the detect...

Page 30: ...mode See 9 5 9 6 PRESSURE O Spectrometer tube pressure monitor output 0 to 10 V 4 V filament protection threshold 9 7 9 8 LEAK RATE O Leak rate monitor output 2 or 3 V decade logarithmic or 0 to 10 V linear 9 9 9 10 9 11 PRESSURE THRESHOLD O Relay energizes when spectrometer tube pressure is too high for operation 9 13 9 14 FILAMENT STATUS O Relay contact closes when the active filament in the spe...

Page 31: ...hes state when the leak rate meets or exceeds the third set point 10 10 10 11 10 12 Set Point 4 O Relay contact switches state when the leak rate meets or exceeds the fourth set point 10 15 10 16 R L exponent control I Voltage applied to pin 15 with respect to pin 16 enables remote control of the leak rate display s exponent 10 13 10 14 LSB exponent I When the leak rate exponent is set to remote 7...

Page 32: ...ceable The subassemblies include The display board which contains the bar graph display set point display and adjustment and associated drivers The power supply board which contains circuits for the audio leak rate indicator and for spectrometer tube control A cold cathode gauge control assembly A rear panel I O PCB A controller for the turbo or MacroTorr turbo drag pump NOTE The mechanical pump i...

Page 33: ...ned in air the ratios are normally far in excess of one million This principle is implemented in the leak detector by introducing helium into the high vacuum pump outlet foreline rather than into the normal pump inlet as in conventional leak detectors Helium having a much lower maximum compression ratio than other gases contained in air diffuses backwards through the high vacuum pump to reach the ...

Page 34: ...n in Figure 1 7 provide a visual representation of the helium concentration in the vacuum system The spectrometer tube consists of the following components Figure 1 7 Spectrometer Tube Ion Flow Ion Source Preamplifier Assembly Analyzing Magnet Assembly Enhancement Magnets Cold Cathode Gauge Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 35: ...he analyzing magnetic field This mag netic field separates and allows only the helium ions to reach the preamplifier The variable focus and ion chamber voltages require adjustment when ion sources are changed This fine tuning proce dure produces an efficient helium sensing spectrometer tube Preamplifier Assembly The preamplifier assembly consists of an ion collector assembly and a sensitive electr...

Page 36: ...ometer tube already mounted to the high vacuum pump the second contains the console assembly and cables instruction manual and accessories Separate the cushions and save them with the carton if it is likely that the leak detector will be transported Various articles of the vacuum system are shipped with protective covers of various types that must be removed prior to installation Inspection Factor...

Page 37: ...e its pumping speed is inversely proportional to the minimum detectable leak of the subsystem The discharge port foreline of the high vacuum pump requires a 16 mm KF type fitting to connect it to the mechanical pump Installation The spectrometer tube high vacuum pump assembly can be mounted horizontally or vertically with the spectrometer tube on the top of the assembly Support rails must be added...

Page 38: ...d on a pluggable terminal block labeled SET POINTS on the rear panel of the console These contacts either make or break an externally connected circuit once the leak rate equals or surpasses the pre programmed set points A pluggable terminal block provides the main control and I O functions of the controller Five pairs of isolated connections are provided one to turn on the filament in the ion sou...

Page 39: ...ning at the selected speed This relay changes state after the SENSITIVITY switch is changed while the pump shifts to its new operating speed Wire Run Lists Table 2 1 Ion Source Cable Wire Run List Octal Receptacle Pin No 15 pin Connector rear panel of Console Function Pin No Color 1 and 4 1 WHT and BLK two wires FILAMENT 1 FILAMENT2 2 3 RED Variable Focus 3 5 ORG Ion Chamber N C 7 Shield Ground 5 ...

Page 40: ... rate output format for a specific application The accompanying graphs may aid in the conversion from output voltage to leak rate and vice versa The factory set linear output voltage ranges from 0 V for a zero leak rate on the most sensitive scale to 10 V at full scale on the least sensitive scale When the UNDER LED is lit on the Least Sensitive scale the output voltage maximum is 10 7 V Figure 2 ...

Page 41: ...em also play an important role in the determination of system sensitivity A calibrated helium leak on the as configured system must be used to characterize the leak rate measurements Set the leak detector to display the desired for decades of leak rate measurement using the following parameters SENSITIVITY Using the SENSITIVITY SWITCH set the speed of the high vacuum pump to high or low depending ...

Page 42: ...ield Ground 5 10 BLK 15V 6 12 GRN Offset 2 7 14 RG 174 Center Signal 8 15 RG 174 Shield Signal Return Table 2 4 Turbo Cable Wire Run List Pin No 15 pin Connector rear panel of Console Function Pin No Color Bayonet Connector A 1 RED Pump Temperature Sensor B 2 BLU C 3 GRN 3 Phase Power 54 V D 4 BLK E 5 Shield Ground F 6 VEL Pump Temperature Sensor Molex Mini Fit Connector 1 14 BLK or RED Cooling Fa...

Page 43: ...ssemble the 990 CLD leak detector from the rack 1 Shut down the leak detector 2 Label and disconnect controller electrical connections 3 Remove the leak detector carefully from the rack on the slides Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 44: ...ptimize the performance of the instrument NOTE Shut off the power vent the high vacuum pump and allow it to stop before moving it WARNING Switch off the cold cathode high voltage lead before making a connection The cold cathode high voltage lead has a potential of 2000 V when the MAlN POWER switch is on There are two types of procedures Required Daily Procedures on page 3 2 which are done each tim...

Page 45: ...e Factory Calibration Data Sheet 990 CLD Leak Detector Factory Calibration Data on page 2 xvii 4 Move the MAIN POWER switch to the ON position The spectrometer tube pressure gauge must measure upscale If the meter does not measure upscale a Turn off the MAIN POWER switch b Check the connections to the COLD CATHODE high voltage SHV connector on the rear panel c Check the connections on the cold cat...

Page 46: ...mp lighting then it is possible that Filament number 1 is burned out Replace the ion source during the next scheduled maintenance period 7 Ensure that the LEAK RATE display reads upscale It the display does not read upscale Use the RANGE pushbuttons to select an appropriate scale or Use the ZERO potentiometers on the front panel and on the secondary control panel might require adjustment to obtain...

Page 47: ...s in the ranges of 10 7 and 10 8 std cc sec Calibrated leaks operating on the capillary principle have constant leak rates of 10 3 10 4 10 5 and 10 6 std cc sec Tuning leaks are generally have an approximate leak rate signal of 10 6 std cc sec at 100 milliTorr test port pressure Sensitivity The range of the exponent display is preset at the factory to agree with the sensitivity of the system when ...

Page 48: ...mple If the anticipated test object leak rate specification is in the 10 4 cc sec range then a calibrated leak in the 10 4 10 5 or 10 6 range or a tuning leak is appropriate 10 8 range then a calibrated leak with a range of 10 8 or 10 9 is appropriate NOTE If a direct reading measured leak value is required changing the position of the SENSITIVITY switch requires re calibration Normally adjusting ...

Page 49: ... secondary controls panel to obtain a zero reading on the LEAK RATE display 7 Re open the valve on the calibrated leak and observe the LEAK RATE display 8 Use the RANGE pushbuttons to position the reading between 1 and 9 on the display 9 Gently adjust the FOCUS control for a maximum reading on the LEAK RATE display then adjust the ION control for a maximum peak on the LEAK RATE display NOTE The IO...

Page 50: ...ed to helium as described in Tuning the Spectrometer Tube Using a Helium Reservoir Leak on page 3 6 2 Place the calibrated leak in the vacuum system as close as possible to the test chamber 3 Open the valve on the calibrated leak 4 Start and run the leak detector 5 Set the front panel RANGE pushbutton so that the exponent in the LEAK RATE display matches the exponent of the calibrated leak 6 Close...

Page 51: ...his range then the scaling of the leak detector must be changed by the a Position of the SENSITIVITY switch located behind the door of the leak detector b Setting of the red RANGE SELECT switch which is accessible through the top cover of the leak detector The calibration procedure but not necessarily the peaking procedure must be performed after changing either of these parameters This completes ...

Page 52: ...leak rate 2 Press and hold the front panel DISPLAY pushbutton 3 Turn the SET potentiometer using an alignment tool or a small bladed screwdriver until the LEAK RATE displays the desired threshold point 4 Release the DISPLAY pushbutton NOTE The LEAK RATE display shows the set point threshold while the corresponding DISPLAY pushbutton is pressed and the measured leak rate reappears when all DISPLAY ...

Page 53: ...on Some hysteresis is included in the filament control circuit The filament control circuit lights the filament when the needle of the cold cathode gauge meter is two thirds of the way down the green band from right to left The filament extinguishes when the needle rises to the upper edge of the green band This hysteretic pressure margin eliminates oscillations in spectrometer tube pressure due to...

Page 54: ... a 0 This number added to the number indicated on the RANGE SELECT switch is the digit that appears as the exponent on the bar graph Table 3 3 is a truth table for this function For example if the RANGE SELECT switch is set to 3 and a voltage is applied to R L and MSB and no voltage is applied to LSB The console is in remote mode as R L has voltage The binary number from MSB and LSB is 2 because M...

Page 55: ...1 1 1 x 0 0 1 1 x 0 1 0 1 Local Control 0 1 2 3 1 1 1 1 1 1 1 1 0 0 1 1 0 1 0 1 1 2 3 4 2 2 2 2 1 1 1 1 0 0 1 1 0 1 0 1 2 3 4 5 3 3 3 3 1 1 1 1 0 0 1 1 0 1 0 1 3 4 5 6 4 4 4 4 1 1 1 1 0 0 1 1 0 1 0 1 4 5 6 7 5 5 5 5 1 1 1 1 0 0 1 1 0 1 0 1 5 6 7 8 6 6 6 6 1 1 1 1 0 0 1 1 0 1 0 1 6 7 8 9 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 56: ... 1 0 0 1 1 0 1 0 1 8 9 Blank Blank 9 9 9 9 1 1 1 1 0 0 1 1 0 1 0 1 8 Blank Blank Blank 1 Energized 2 De energized Table 3 3 Remote Exponent Control Truth Table Continued Range Select Switch R L MSB LSB Displayed Exponent Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 57: ...ak rate being measured and will not exceed 200 mV and 10 7 VDC The new I O board includes a jumper strip J1 with two interchangeable shorting plugs To set the gain Use tweezers or needle nosed pliers to configure the shorting plugs as per Table 3 4 and Figure 3 1 Figure 3 1 Setting the Gain via Shorting Plugs Table 3 4 Shorting Plug and Leak Rate Outputs Leak Rate Decade Shorting Plug Shorting Plu...

Page 58: ... main power to the leak detector causes the filament to turn off and the high vacuum pump to shut down When main power is restored the high vacuum pump recovers to its correct speed The filament however must then be re lighted The four set points are non volatile thus they are not affected by interruptions of main power NOTE The high vacuum pump controller in the leak detector protects the high va...

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Page 60: ...n toxic chemicals or CFCs Do not use silicone oil or silicone grease Although these products are generally excellent for vacuum systems they cause loss of sensitivity in mass spectrometer leak detectors through build up of invisible insulating layers in the spectrometer tube CAUTION Do not use Freon TF or other solvents on O rings Doing so causes deterioration and reduces their ability to hold a v...

Page 61: ...re 4 1 Scheduled Maintenance Description Daily Annually Calibration check and tuning adjustments See Tuning the Spectrometer Tube Using a Helium Reservoir Leak on page 3 6 and Calibrating the Leak Detector on page 3 7 x Complete overhaul including spectrometer tube See Annual Maintenance Complete Overhaul on page 4 3 x Table 4 5 As Required Maintenance Function Most Common Symptom Spectrometer tub...

Page 62: ...ree procedures given in As Required Maintenance if done annually for a leak detector in daily use prevent deterioration and sustain a high level of performance For heavy production use more frequent overhauls may be needed In most cases this work is done by user maintenance personnel but it can also be done by Vacuum Technologies under the terms of a service contract The following tools and parts ...

Page 63: ... out of zero Deposits on the ion source cause the ion beam exiting from the ion source to widen de focus and vary in exit velocity and a loss of sensitivity in the leak detector This shows up as requiring an increased amount of CAL gain to calibrate the leak detector Maintenance is required when the CAL pot cannot be increased clockwise far enough to allow the machine to read the calibrated leak c...

Page 64: ...er tubes are also available from Vacuum Technologies Products on an exchange basis Contact the Vacuum Technologies Service Center 1 800 8VARIAN for details 1 Turn off the MAIN POWER switch on the front panel 2 Remove the three electrical plugs at the top of the spectrometer tube and the bonding wire at the bottom of the spectrometer tube 3 Remove the KF clamp on the spectrometer tube and break the...

Page 65: ...de gauge liner and anode loop until bare metal surfaces are exposed CAUTION Under no circumstances use a chemical cleaner especially strong detergents or alkaline cleaners Do not use Alconox or a similar type of detergent Do not use crocus cloth as it leaves a residue 13 Rinse the spectrometer tube body pole pieces baffle ground slit plate and cold cathode gauge parts in a Freon type solvent DuPon...

Page 66: ...g and check it for proper orientation The anode should be visible when viewed through the KF port of the spectrometer tube 27 Install the spectrometer tube in vacuum system 28 Re attach the magnet assembly and before tightening the set screws ensure that the cylindrical pole pieces make metal to metal contact with the spectrometer tube body 29 Attach the spectrometer tube to the vacuum system 30 S...

Page 67: ... MAIN POWER switch on 2 Vent the vacuum system to atmosphere by first loosening the spectrometer tube KF clamp then carefully tipping the spectrometer tube from the turbo pump This causes an inrush of air that floods both the spectrometer tube and turbo pump The spectrometer tube can now easily be removed 3 Remove the ion source connector at the spectrometer tube 4 Remove the four screws that secu...

Page 68: ...the anode clockwise to loosen it while at the same time pulling it Doing so appears to screw the loop onto the pin but in fact it loosens the grip of the anode onto the feedthrough 5 Remove dirty deposits from all parts with Scotchbrite pad 6 Rinse all parts except the O ring with Freon and methanol 7 Re assemble the parts in reverse order except the anode loop This must be turned in the same dire...

Page 69: ...leak or tuning leak attached to the vacuum system and that the leak detector is displaying the leak rate Emission Control Adjustment Make a front panel screwdriver adjustment after an ion source replacement when there is not enough sensitivity to calibrate to the value of the standard leak in use or to significantly lower the sensitivity for locating large leaks It may also be necessary if the SEN...

Page 70: ...nt to know if the ion source tuning voltages have sufficient span or are in the correct range This is especially true after ion source replacement or when it is not possible to tune the spectrometer tube so that it is sensitive to helium Comparison with the following steps indicates if the voltages are in the correct range To check the ion source voltages 1 Set the ION and FOCUS controls fully cou...

Page 71: ...nd the main electronics safety shield removed To adjust the overpressure protection 1 Set the MAIN POWER switch to the OFF position WARNING The high voltage lead has a potential of 2000 V when the MAIN POWER switch is ON Be sure the switch is off before making the following connection 2 Remove the plug from the cold cathode gauge SHV connector on the rear panel and connect a 50 MOhm 2 W minimum re...

Page 72: ...re zero amplifier offset 1 Make certain that connectors JMP 1 and JMP 2 on the upper right hand corner of the I O Control Board the smaller of the two boards at the back of the Controller have jumpers across their upper two pins Make certain that connector J1 on the I O Control Board on the left side in the center of the board has jumpers across pins A and 1 2 With the power shut off remove the pr...

Page 73: ...HECK position to make the leak detector almost completely insensitive to all gases including helium 5 Select the most sensitive RANGE 6 Adjust the fine and course ZERO controls until the leak rate display indicates zero then set the RESIDUAL BACKGROUND switch to the RUN position The resulting reading is background 7 Re zero the leak rate display before using the leak detector If the background rea...

Page 74: ...tions that apply to all of the symptoms The power cord is connected All cables between the 990 Controller and the turbo pump and spectrometer tube are properly installed and that the cable clamps at the spectrometer tube are in place All connections between the 990 Controller and the testing station are properly installed If applicable that the oil level and color in all mechanical pumps has been ...

Page 75: ...helium sparingly starting at the highest points first since helium rises If drafts such as from a cooling blower exist in the area apply helium downstream from the source first or deflect the draft until leak checks are completed If vent grooves exist at flanges or other assembled seals apply helium sparingly to these points rather than broadly spraying the area with helium Minimizing the use of h...

Page 76: ...rr while the leak detector is operating in the low sensitivity mode maximum is 200 milliTorr when in the high sensitivity mode If it is greater than either value the turbo pump or controller may trip off on an overload To resume operation determine and correct the cause of high forepressure then turn the controller off then back on to reset the circuit 2 With the power on Foreline pressure should ...

Page 77: ...crease the EMISSION adjustment by turning it approximately five turns clockwise If the filaments check OK using a continuity check manually turn on the filament using the leak detector front panel switch If it fails to stay on check the back of the leak detector to ensure that the PLC is turning on Check the FILAMENT ON OPTO 22 module to see if it is lit or Check if the FILAMENT OFF OPTO 22 is hel...

Page 78: ...ove voltages are 10 If all voltages are more than 10 percent low or two of them are equal disconnect the ion source cable while measuring the ION voltage TP1 If the voltage changes more than 1 0 V replace the ion source or the entire spectrometer tube the ion source may be shorted If no change occurs and the voltage remains more than 10 percent low replace the 990 Controller to determine if the co...

Page 79: ...s a partially open fixture or a disconnected or broken valve There is an unusually High Number of Rejects These types of problems are the most typical found in any helium leak detection system While high levels of rejects can be traced to problems in the test equipment they are also often real leaks in the product Before tearing down the test station take steps to ensure that the problem is not a ...

Page 80: ...wever there may be a significant up scale reading and this is normal If the bar graph acts normally then the problem is a blown preamplifier Follow the procedures in the instruction manual for removal and replacement of the preamplifier assembly If the problem persists then the controller may be the wrong revision for the cable in the system or the controller may be defective Perform 990 Controlle...

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Page 82: ...it on page 5 5 Spectrometer Tube Components Kit on page 5 5 How to Order Parts 1 Determine the complete part numbers descriptions and quantities of parts required 2 Call the Vacuum Technologies Sales and Service Office closest to you The offices are listed on the rear cover of this document 3 Place the order with the operator describing the item name model number and serial number of the equipment...

Page 83: ... Cleaning Kit 670029096 Spectrometer Tube Cable L9023305 5 L9023310 10 L9023315 15 OPTO 22 Input Module 120 VAC 949150005 OPTO 22 Input Module 35 60 VDC 949150010 OPTO 22 Input Module 2 50 28 VDC 949150015 OPTO 22 Input Module 220 VAC 949150020 Ion Source Thoriated Iridium 82850302 Preamplifier L9030301 Cold Cathode Gauge 82849301 Main Electronics Board K9506301 I O Control Board L9057301 Display ...

Page 84: ... L9028301 6 Set Point Cable L9082301 7 Cable Assembly L9077301 8 DC Harness Assembly L9024301 9 HV Power Supply PCB Assembly K5053301 10 Power Transformer L6071301 11 Control Transformer L6072301 12 High Voltage Transformer 00244 13 Spectrometer Tube Meter 08060 14 Potentiometer Tandem to DWG 09135 15 Electronics Board Harness K9864301 16 Turbo Cable Assembly L9080301 17A Cable Beldon 59166 17 Wir...

Page 85: ...meter Bournes 82 654532084 1 48 Potentiometer Bournes 3540s 654532072 1 50 Switch 642105025 1 51 Switch 642105028 1 52 Switch 642105118 1 Fuse Littlefuse 645300002 2 Table 5 4 Independent Mechanical Items Item Part No Spectrometer Tube L9070301 Pre Amplifier L9030301 Ion Source Thoriated 82850302 Cold Cathode Gauge 82849301 Adapter Bracket L9027301 Knob Set Modified L6503301 Speaker 30C25Z8 670009...

Page 86: ...uard 670009136 1 27 Knob 660251625 1 38 Handle 660237049 2 39 Lock 660356137 1 40 Catch 641323110 1 41 Bracket 641309111 1 42 Strike 641323114 1 Table 5 6 Spectrometer Tube Components Kit Part No L9186301 Item Description Part No Quantity O ring Viton Parker No 2 025 660892025 10 O ring Viton Parker No 2 320 660892320 2 Screw Truss hd 614820314 22 Washer Neoprene 618971030 4 Ground Plate K3088001 ...

Page 87: ...20 2 23 Screw Pan hd 614420035 8 24 Washer Ansi Type A 618120018 8 25 Washer Lock No 6 618320018 8 Table 5 6 Spectrometer Tube Components Kit Part No L9186301 Continued Item Description Part No Quantity Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 88: ...r parts thereof These are tested to prevent entrance of contaminants or loss of fluid that would affect performance of the enclosed unit Examples electronic devices integrated circuits sealed relays motors ring pull tab can ends and multi pin feedthroughs Hermetic Systems These are tested to prevent loss of fluid or gas within Examples hydraulic systems and refrigeration systems Evacuated Enclosur...

Page 89: ...ture Used interchangeably with std cc sec because the difference is insignificant for leak testing purposes Conversions 1 std cc sec 0 76 Torr liter sec for practical purposes equal 1 torr liter sec 1 3 std cc sec 1 std cc sec 9 7x104 micron cubic feet per hour or practically 105 micron CFH υCFH 1 CFH practically 10 5 std cc sec 1 std cc sec 0 1 Pascal cubic meters sec Numerical Notation Exponenti...

Page 90: ... at joints during manufacture may vary from hour to hour and day to day Breathing on a 10 6 std cc sec leak provides enough moisture to close it temporarily perhaps for several days Atmospheric particles can close a leak of this size Never depend on an accidentally made leak to remain constant Manufacturing standard leaks for calibration purposes requires special techniques Visualizing Leaks in Ev...

Page 91: ... is used for testing of high pressure lines Halogen sensitive to halogen elements or compounds especially refrigerant gases This method is good to approximately 10 5 std cc sec in most current applications but extendable to 10 9 std cc sec under some limited situations It is critically dependent on operator judgement if leaks are below 10 5 std cc sec and requires constant flow of fresh air in the...

Page 92: ... cc sec signal If your reject set point is at 1 E 5 this high background would lead to a false rejection of parts if the process was not designed to tolerate the background If you are experiencing false helium rejections look to the helium background as a possible cause While there are methods for tolerating such high levels of helium such as prolonged pumpdown cycle it is probably more economical...

Page 93: ...eflected 90 Only helium ions reach the collector Heavier ions mass 6 and up are deflected too little to be collected Lighter ions masses 3 and 2 are deflected too much to be collected An extremely stable spectrometer provides an electron current to the collector which measures the current produced by the collection of helium ions This current is presented on the leak rate meter Since this current ...

Page 94: ...emoved by pumping A virtual leak of the tracer gas Background Signal The steady or fluctuating output signal of the leak detector caused by the presence or residual tracer gas or other substance to which the detecting element responds Bake Out The degassing of a vacuum system by heating during the pumping process Bomb Test A form of leak test in which enclosures are pressurized with tracer gas for...

Page 95: ...h hermetically sealed units containing an internal volume are subjected to a helium pressure If leaks are present in the sealed unit the helium pressure drives some helium into the internal volume and this may be subsequently detected during bell jar testing or immersion in a hot fluid to detect bubbles See Bomb Test above Ion A molecule whose net charge has been altered from neutral for the purpo...

Page 96: ...the roughing pump Sensitivity In the case of a leak detector the response of the detector to tracer gas leakage that is scale division per unit leak rate Spectrometer Tube The sensing element of a helium leak detector Standard Leak 1 A capillary or porous wall leak usually in a glass or metal tube whose dimensions have been adjusted to give a specified leak rate of a gas at a standard temperature ...

Page 97: ...detector A valve block might include one or more roughing valves fine test valves calibrated leak valves vent valves or split flow valves Virtual Leak The semblance of a leak m a vacuum system caused by slow release of trapped gas Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 98: ...ix lines labeled 0 to 6 along the right hand margin represent the six settings of the RANGE SELECT switch Note that the output voltage scale along the bottom has been expanded to aid in reading the lower decades This output is derived directly from the leak rate signal The voltage output is in direct proportion to the leak rate Correlated with the front panel display is the setting of the RANGE SE...

Page 99: ... of 10 V This means that over this 10 V range the converter resolves 1 part in 4096 or about 2 4 mV If you want to test for leaks of 1 x 10 1 std cc sec with the RANGE SELECT switch set at 2 then you are operating in the least sensitive decade of the leak detector The resolution in that decade with a 12 bit A to D converter is 0 0024 V I 10 V for the least sensitive decade x 100 0 024 percent Now ...

Page 100: ...3 The logarithm base 10 of this result is then taken and multiplied by 2 for 2 V decade or 3 for 3 V decade Using the same setup as in the first linear output example the analog output voltage corresponding to a leak of 1 x 10 3 std cc sec with the RANGE SELECT switch set to 2 would be 2 x Log 1 x 10 3 x 10 2 3 4 00 VDC If you needed to read leaks at 1 x 10 5 and 1 x 10 1 std cc sec as in the seco...

Page 101: ...t five times lower resolution than the corresponding example for the linear output the resolution remains the same for each decade This is in contrast to the linear output example where the resolution fails by a factor of 10 for each decade of increasing sensitivity For example the resolution of a leak of 1x10 5 std cc sec with a RANGE SELECT switch setting of 2 is 24 for the linear output and is ...

Page 102: ...toline Leak Detector D R A F T 2 2 0 4 A 5 Figure A 1 990 CLD Leak Detector Linear Output Voltage Leak Output Voltage V Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 103: ...eak Detector A 6 D R A F T 2 2 0 4 Figure A 2 990 CLD Leak Detector Linear Output Voltage Leak Rate Conversion Chart 2 V decade Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 104: ...eak Detector D R A F T 2 2 0 4 A 7 Figure A 3 990 CLD Leak Detector Linear Output Voltage Leak Rate Conversion Chart 3 V decade Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 105: ...990 CLD Autoline Leak Detector This page intentionally left blank D R A F T 2 2 0 4 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 106: ...nd outputs See Table 1 5 on page 1 9 for Inputs Outputs Spectrometer tube Preamplifier is a temperature compensated solid state device located in the vacuum enclosure The entire tube can be quickly removed for maintenance Dual filament disposable all welded ion source High Vacuum Optional turbo or macroTorr turbo pump Operating position any Noise level 45 dB at 1 meter Operating ambient temperatur...

Page 107: ...y Table B 2 High Vacuum Pump Detailed Specifications V70 Turbo V70D MacroTorr Turbo Drag High vacuum flange ISO 63 ISO 63 Foreline flange NW 16 KF NW 16 KF Pumping Speed at max rpm N2 65 liters sec 60 liters sec He 55 liters sec 25 liters sec H2 45 liters sec 15 liters sec Compression ratio at max rpm N2 5 x 107 5 x 107 He 4 x 103 6 x 103 H2 4 x 102 1 x 103 Startup time 120 sec 120 sec Operating P...

Page 108: ...1 997 9350 Varian Vacuum Technologies Local Office For a complete list of phone fax numbers see www varianinc com vacuum Do not write below this line Notification RA Customer ID Equipment CUSTOMER INFORMATION Company name Contact person Name Tel Fax E mail Ship method Shipping Collect P O Europe only VAT Reg Number USA only Taxable Non taxable Customer ship to Customer bill to PRODUCT IDENTIFICATI...

Page 109: ...leak Bellows leak Vacuum leak High voltage problem Solenoid failure Damaged flange Error code on display Other Damaged sealing area Other Describe failure Describe failure Customer application Customer application Cannot calibrate No zero high background Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Othe...

Page 110: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Page 111: ...50 Japan Varian Vacuum Technologies Sumitomo Shibaura Building 8th Floor 4 16 36 Shibaura Minato ku Tokyo 108 Japan Tel 81 3 5232 1253 Fax 81 3 5232 1263 Korea Varian Technologies Korea Ltd Shinsa 2nd Building 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Mexico Varian S A Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 F...

Page 112: ...l service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE INSPECTION Remotely inspect equipment before purchasing with our interactive website at www instraview com LOOKING FOR MORE INFORMATION Visit us on the web at www artisantg com for more information on ...

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