4
4. Individual Unit Specifications
Unit
Model and Specifications
Quantity
1) Glass bell jar
- Dimensions: Internal diameter 300 mm × Height 300 mm
- Material: Hard glass
1 pc.
2) Feed-through Collar
- Number of port: 12 ports (Side: 8 pcs., Bottom: 4 pcs.)
- Dimensions: Internal diameter 305 mm × Height 100 mm
- Material: Iron and nickel coating
- Accessories: 1-point electrode
KF port
Shutter
Sealing flange for service port
Flange for base plate
1 set
2 pc.
1 set
1 set
5 set
3 set
3) Evaporation power
supply
- Model: PSE-150C
- Dimensions: W480 mm × D435.3 mm × H149 mm
- Input: Single phase 200 V
- Output: 150 A max.
- Rating: 30 minutes
- Control method
Thyristor AC phase control method
- Output control
Constant power operation
Constant current operation
Constant voltage operation
(Setting when shipped out: constant current)
- Appurtenant devices:
- Output cable (38 mm2 × 2 m)
1 set
4) Oil diffusion pump (D.P) - Model: OFK-3US
- Evacuation speed: 400 L/sec
- Ultimate pressure: 5.3 x 10
– 5
Pa
- Evacuation or suction opening: VG 100 or equivalent, NW 25
- Required power: 0.6kW
- Oil for use: Lion-S 0.1 L
- Cooling water: 2 L/min
1 set