25
7. Consumable List
Location of Use
Parts
Specifications
Material
Quantity
Replacemen
t by user
Main valve
O-ring for suction
flange
V120 (Attached
component)
FPM
1
OK
O-ring for valve body
(Attached component)
FPM
1
OK
O-ring for valve pole
P10 (Attached
component)
FPM
2
NG
Oil diffusion pump
Gasket for suction
flange
V100
NBR
1
OK
Oil for use
Lion-S
――
0.1L
OK
Sheathed Heater
Single-phase 100 V,
0.6 kW
――
1
OK
Oil sealed rotary
vacuum pump
Oil
SMR-100
――
1
OK
Vibration-control
rubber
ME-20
――
4
OK
Three-way valve
O-ring
S 42 (Attached
component )
FPM
3
NG
O-ring
P-25 (Attached
component )
FPM
2
NG
O-ring
P-10A (Attached
component )
FPM
3
NG
O-ring for center
healing
NW25
FPM
2
OK
Roughing piping
O-ring for VENT.
Valve.
N8
NBR
1
OK
O-ring for gauge port
N16
NBR
1
OK
Pirani vacuum meter
probe
WP-01
――
1
OK
Operational panel
Indicator lamp
LMS-4BH
――
1
NG
Illuminated Button
Switch
AR22F5L
――
2
NG
Liquid nitrogen trap
O-ring for suction
flange
V120
NBR
1
OK
Specifications and quantity is different for special models.
