16
4. Creating a film
4-1 Preparation
1) Open the vacuum chamber, as described in section 3-1.
2) Attach the evaporation element (boat, filament, etc.) to the electrode.
3) Supply a vapor source to the evaporation element.
4) Close the shutter.
5) Attach the material to be coated (substrate)
6) Evacuate the vacuum chamber, as described in section 3-2.
Evacuate to the desired pressure level.
4-2 Creating a film
1) Turn on the evaporator main power.
2) Turn on the evaporator select switch.
3) HIGH (lamp lighting)
Confirmation
4) MANUAL (lamp lights out)
Confirmation
5) Turn on the evaporator power switch.
6) The current is gradually thrown to the evaporation source pushing the
UP
▲
key.
7) Once the evaporation element is red hot and the vapor source has started to
melt, use the shutter to remove impurities from the evaporation element.
8) Open the shutter to apply film to the material to be coated (substrate).
9) Once vapor deposition is completed, close the shutter.
10) Turn off the evaporator power switch.
11) Turn off the evaporator main power.
12) Open the vacuum chamber, as described in section 3-1, and remove the
coated material (substrate).
Repeat as necessary from step 4-1.
Reference:
- Film thickness: Adjusted by the time of formation
- Rate: Adjusted by the current flown through the evaporation source
