28
1. Standard Optional Parts List
Name of optional parts
Applications
Installation
conditions
Sample holder (Ø 260)
Fixing material.
Installable by
user
Plate preventing adhesion
Preventing evaporated material from
adhering to glass bell jar.
Installable by
user
Electrode separation plate
(2-point type)
Plate for separating evaporation source
Contamination prevention.
Installable by
user
Electrode separation plate
(3-point type)
Plate for separating evaporation source
Contamination prevention.
Installable by
user
Electrode separation plate
(4-point type)
Plate for separating evaporation source
Contamination prevention.
Installable by
user
Substrate heating device
For sample heating (Max.350°C).
Installable by
user
Carbon electrode set
For carbon film formation.
Installable by
user
Oil mist trap
To prevent the oil and smoke flow from the
exhaust opening of the oil sealed rotary
vacuum pump.
Installable by
user
Oil mist Trap (Inline type)
To prevent oil and smoke flow from the
exhaust opening of the oil sealed rotary
vacuum pump. Can be connected to
exhaust duct.
Installable by
user
Side panel
For safety regulation.
Installable by
user
Rear panel
For safety regulation.
Installable by
user
Control operational panel
For storing the control devices.
Factory
assembled
Side panel
(for control operational panel)
For safety regulation.
Installable by
user
Rear panel
(for control operational panel)
For safety regulation.
Installable by
user
Automatic leakage valve
For main pump protection upon power
outage.
Installable by
user
Film formation controller
For measurement and control of film
thickness and film formation speed.
Installable by
user
Film thickness sensor
Sensor for film controller measurement.
Installable by
user
Cooling water piping for film
thickness sensor
Introduction piping for cooling water for film
thickness sensor.
Factory
assembled
