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2. Evacuation device operation
2-1 Preparation
1) Attach the BACK.P VENT(or RP VENT) cap (appurtenant part) to close off
the vent.
2) Attach the pirani gauge to the gauge port of the vacuum chamber bottom.
3) Attach the ionization vacuum gauge head to the vacuum chamber KF port.
4) Close the three-way valve and the main valve.
5) Turn off all switches on the operation panel.
6) Turn on the customer-side power breaker
・
Unit power supply lamp: ON
2-2 Operation
Starting up the device
1) Turn on the main switch.
2) Cooling water:
FLOW
3) Turn on the BACK.P(or RP).
Set the DP cooling fan to Rotation.
4) Set the three-way valve to Fore
5) After 1 minute exhaust, Turn on the MAIN.P (or DP)
6) Allow the DP to warm up for 15 minutes.
7) Fill with liquid nitrogen (as necessary)
Reference:
Liquid nitrogen quantities: (Liquid nitrogen trap is optional)
Fill to a maximum of 1.4 L (including vaporization)
1.4 L should last five to six hours.
Once the liquid nitrogen has evaporated completely, the condensable gas that was
trapped will separate and pressure will worsen for approximately 30 minutes.
This is not a malfunction.
Close the main valve completely to prevent contamination of the vacuum chamber.
2-3 Shut down
Shutting down the device
1) Evacuation for maintaining vacuum in the vacuum chamber.
2) Close the main valve.
3) Turn off the MAIN.P(or DP).
4) Allow the DP to cool for 30 minutes.
5) Close the three-way valve
6) Open the BACK.P VENT(or RP VENT).
7) Turn off the BACK.P(or RP).
8) Stop the DP cooling water.
9) Turn off the main switch.
10) Turn off the customer-side power breaker. (as necessary)
Unit power supply lamp:
OFF
10) Allow any residual liquid nitrogen to evaporate naturally.
