3
3. Product Specifications
Ultimate pressure
4.0 x 10
-4
Pa (Upon no-load cleaning in vacuum chamber)
3.0 x 10
-4
Pa
(Using liquid nitrogen, upon no-load cleaning in vacuum chamber)
Evacuation time
10 minutes or less up to 4.0 x 10
-3
Pa
(Upon no-load cleaning in vacuum chamber)
10 minutes or less up to 3.0 x 10
-3
Pa
(Using liquid nitrogen, upon no-load cleaning in vacuum chamber)
Necessary power
100 V single-phase
1.6 kVA
200 V single-phase
1.5 kVA
Necessary water
2 L/min
Water temperature: 20°C to 25°C
Water pressure: 200 kPa to 300 kPa (gage pressure)
External dimensions
(Main unit)
(Power)
Weight
(Main unit)
(Power)
Width:730 mm × Depth: 731 mm × Height: 1,161 mm
Width:480 mm × Depth: 435.3 mm × Height: 149 mm
(except the protruding part)
Approx. 145 kg
Approx. 40 kg
Paint (Main unit)
JIS S5-462 baking finish (Munsell 5GY8/0.5)
Refer to the specification sheet for special models.
