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3. Vapor deposition operation
3-1 Opening the vacuum chamber
1) Close the main valve.
2) Verify that the three-way valve is set to Fore.
3) If necessary, open the vent valve slowly.
Reference:
Filling the vacuum chamber with dry air or nitrogen gas when opening will help
prevent contamination.
Opening the vacuum chamber to the atmosphere could cause contamination by
allowing moisture to enter.
Vent V coupler
Synflex coupler: C1N1/4 × PT1/8 (appurtenant part)
3-2 Vacuum chamber evacuation
1) Close Vent V.
2) Attach the bell jar.
3) Set the three-way valve to Rough.
Obtain rough vacuum inside vacuum chamber.
4) Verify that the vacuum gauge reads 13Pa or less.
5) Set the three-way valve to Fore.
6) Open the main valve.
