Ulvac RFS-13100F, Instruction Manual, Page: 6 / 74

RF Power Supply and Matching Box
Introduction
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4. If you notice a problem with the product
If you notice a problem with the product, see "Chapter 7. Troubleshooting" and verify the symptoms
and malfunction. In order to avoid losses on both sides due to misunderstandings or misjudgments
and to quickly perform repairs, please work to ensure the accuracy of the information.
If you have determined there is a malfunction or if you have any questions, contact one of the
locations listed below. When contacting ULVAC, please inform us of the product name, model
number, serial number, and about the symptoms of the problem in as much detail as possible.
5. Disposal
When disposing of the product, please follow all national and local regulations.
Customers are responsible for expenses related to disposal.