Ulvac RFS-13100F, Instruction Manual, Page: 35 / 74

RF Power Supply and Matching Box 4. Functions
27
RECOGNIZE CONT
(FAST-ARC)
0 CNT
※
High-speed arcing signal count when the high-speed
arcing signal makes the transition to internal arcing
shut off
If 0 CNT, does not transition to internal arcing
SIGNAL MASK TIME
SET 0.0 (s) The ARC external signal is not sent during the period
of set time from RF ON.
SIGNAL MASK TIME
SET (DELAY) 0.0 (s) During RF ON, the ARC signal is not sent within the
set time.
SIGNAL OUTPUT
TIME (DELAY) 0.0 (s) The set time delay when sending the ARC signal.
If RF OFF when time to send the signal, the signal is
not sent.
EXTERNAL ARCING SINGLE Cannot change setting
OVER VPP
PROTECTION SHUT DOWN TIME
SET 0.0 (s) Shut off when excessive VPP droop control continues
for the set time.
LIMIT MASKTIME
SET 0.0 (s) Do not droop during the set time even for excessive
VPP.
OVER REF
PROTECTION SHUT DOWN TIME
SET 0.0 (s) Shut off when excessive reflected wave droop control
continues for the set time.
SIGNAL MASKTIME
SET 0.0 (s) The REF signal is not sent during the period of set
time from RF ON.
SIGNAL MASKTIME
SET (DELAY) 0.0 (s) During RF ON, the REF signal is not sent within the
set time.
TARGET LIFE INITIAL Do not
execute RF output cumulative power initialization
Select 0 [kW/h] to initialize.
ANALOG
MODE SELECT PORT SELECT
EXT(1,2,3)
○○○
NORMAL
FWD[1] Operation mode during analog control. Do not select a
parameter other than NORMAL FWD [1].
●○○
NO
OPERATI
ON Not changeable
○●○
NO
OPERATI
ON Not changeable
●●○
NO
OPERATI
ON Not changeable
... ... ...
●●●
NO
OPERATI
ON Not changeable
ANALOG CONT ADJUST Do not
execute Calibration menu for the external command signal.
MONITOR ADJUST Do not
execute Calibration menu for the external monitor signal.
COMMUNICATION ID 0 Not used
PATTERN SET Do not
execute Not used
OSC SETTING OSC SOURCE
SELECT INTERNAL External oscillator usage setting.
INTERNAL or EXTERNAL.

Internal arcing shut off Operates when the reflected wave feedback A/D value recognized
by the CPU is the set value or higher. (Sampling frequency 200
μs.)

High-speed arcing shut off Hardware detection. When the reflected wave feedback's voltage
becomes higher than the set value, it is shut off by the logic. (Operates within 10 µs.)
*The initial value of RFS-13100F/13150F is set to 1CNT, but you can change the setting and use it.