Ulvac RFS-13100F, Instruction Manual, Page: 37 / 74

RF Power Supply and Matching Box 4. Functions
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4-2-2. Control panel functions and explanations
1) LCD screen
Displays the operation mode, control mode and function selection mode menus.
Shows the setting values for each mode's functions.
Shows measurement values.
Shows the operating status.
2) Operation keys
AUTO: Selects automatic control mode. When selected, green LED on
MANUAL: Selects manual control mode. When selected, green LED off
MATCH CCW: Decreases the capacity of the MATCH variable capacitor (select menu, change set
value digits)
MATCH CW: Increases the capacity of the MATCH variable capacitor (select menu, change set
value digits)
TUNE CCW: Decreases the capacity of the TUNE variable capacitor (select menu, increase set
value)
TUNE CW: Increases the capacity of the TUNE variable capacitor (select menu, decrease set value)
ESC key: Can return to the previous menu.
ENT key: Can select, confirm settings, and send you to the next screen.
POWER: Control power supply on/off switch
3) Buzzer
Short sound (approx. 100 ms): When selecting the menu, entering setting values
Long sound (approx. 1 s): When outside the setting's range, ALARM output
ESC
ENT
OUTPUT
MATCHING CONTROLLER
ALARM
MATCH
CW
MATCH
CCW
TUNE
CCW
TUNE
CW
AUTO
MANUAL
RESET
Figure 4-6 Automatic matching controller panel