Ulvac RFS-13100F, Instruction Manual, Page: 32 / 74

RF Power Supply and Matching Box 4. Functions
24
* Please prepare contacts with a capacity of 12 VDC and 12 mA or higher.
* If using semiconductor devices, please prepare devices with a leakage current 0.1 mA or lower.
* Caution when using the external control terminal. If connecting an inductive load (relay or coil) to the output of the
external control terminal, insert a diode or use a relay with a surge absorbing element so that counter-electromotive force
is not generated.
Figure 4-3 RF power supply INTERFACE connector pin assignments
3
16
RF ON command*
10V
8
7
+ -
Pf monitor
Ext. Control Device
20
1
14
Ext. Interlock Input*
2
15
RESET*
5
18
ALARM
4
17
RF ON
answer
6
19
ＡＲＣ
POWER SET
21
9
Pr monitor
22
10
VDC monitor
23
11
VPP monitor
24
Inside Power Supply
25V 100mA max
25V 100mA max
25V 100mA max
(NO)
(NO)
(NO)
+
-
+
-
+
-
6
19
Interlock response
25V 100mA max
(NO)