Ulvac RFS-13100F, Instruction Manual, Page: 55 / 74

RF Power Supply and Matching Box 5. Operation
47
4) Load external preset value (recall operation)
After selecting the preset number with the SELECT(1 to 4) signal, move to the saved MBX TUNE and
MATCH positions by closing PRESET connector pins 2-10.
AUTO/MANUAL switch
（AMC.EXT[1-9]）
Open
Close
Open
Close
SELECT1
（SELECT[3-11]）
SELECT2
（SELECT[4-12]）
SELECT3
（SELECT[5-13]）
SELECT4
（SELECT[6-14]）
RECALL
（SELECT[2-10]）
Close
Open
100 ms or more
50 ms or more
BUSY
（AMC.EXT[2-10]）
Variable capacitor operating
Figure 5-4 Timing chart during external recall operation (loading)