Ulvac RFS-13100F, Instruction Manual, Page: 50 / 74

RF Power Supply and Matching Box 5. Operation
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MATCH [50%]
TUNE [50%] [ 1]
5-2. Automatic matching controller operation
This section explains the local operation (panel operation) method, remote operation (external
control), and the external preset (external control) method.
5-2-1. Local operation method (panel operation)
1) Operation mode menu
To change the operation mode, press the "ESC" key several times to display the configuration screen,
then select <PANEL> with the left and right keys and press the "ENT" key.
(Operation mode selection screen)
When the setting is complete, the position display screen is displayed.
(Position display screen)
2) Automatic matching operation
Press the "AUTO" button. (The green LED turns on.)
The variable capacitor position operation buttons are now disabled.
The matching operation automatically starts in conjunction with the RF power supply's RF ON
command.
3) Manual matching operation
Press the "MANUAL" button. (The green LED turns off.)
Operate the positions of the variable capacitors with the buttons listed below.
With RF ON, change the positions of the variable capacitors to minimize the reflected wave power
(Pr).
During manual matching mode, you can set a preset or perform a recall operation (operation to move
to the positions of the variable capacitors set by a preset) by pressing the "ENT" key.
MATCH CCW : Decrease MATCH VC capacity
MATCH CW : Increase MATCH VC capacity
TUNE CCW : Decrease MATCH VC capacity
TUNE CW : Increase MATCH VC capacity
AMC CONTROL SELECT
<PANEL> PR・RC ANALOG