Ulvac RFS-13100F, Instruction Manual, Page: 43 / 74

RF Power Supply and Matching Box 4. Functions
35
Item Default
value Meaning
AUTO RECALL DISABLE Select to implement auto recall operation (automatic
recall operation when RF OFF). It competes with the
ANALOG preset function so normally select DISABLE.
RECALL ACTION Do not
execute Implement recall operation. Select recall number.
PRESET Do not
execute Execute preset. Select the preset number to save the
current positions of the variable capacitors.
MATCHINGBOX STATUS The number of turns currently used on the matching box's
variable capacitors
RECALL COUNT INIT Do not
execute Displays and resets number of recalls. Initialize with 0
CNT
SYSYEM
CONSTANT MATCHING
COMPLETE REF
LEVEL 12 (LSB) The reflected wave feedback level to judge matching
complete. When lowered, residual reflections decreases
but hunting happens easily.
SPEED TEBLE
PROCEED REF
LEVEL 40 (LSB) The reflected wave feedback level to start decelerating
the motor's operation speed. Higher is more stable but
matching convergence will take time.
MATCHING
DELAY TIME (RF
ON) 0.0 (s) The matching operation is not performed from RF ON for
the period of set time. Enter a numerical value when
sudden load changes frequently occur from arcing and
electrical discharge is unstable.
MATCHING
DELAY TIME
(REF) 0.0 (s) The matching operation is not performed from reflected
wave generation
for the period of set time. Enter a
numerical value when sudden load changes frequently
occur from arcing and electrical discharge is unstable.
OPERATION TIME Displays cumulative operating time.
VARICON MAINTENANCE Do not
execute A function to periodically (temporarily) operate a full
stroke of the variable capacitors
SOFTWEAR VERSION Displays the software version
COMMUNICATION ID Not used
MONITOR ADJUST Do not
execute Calibration menu for the external monitor signal.
Table 4-11 Automatic matching controller parameters