Ulvac RFS-13100F, Instruction Manual, Page: 54 / 74

RF Power Supply and Matching Box 5. Operation
46
5-2-3. Remote operation method (external preset operation)
1) Operation mode menu
To change the operation mode, press the "ESC" key several times to display the configuration screen,
then select operation mode <PR
·
RC> with the left and right keys and press the "ENT" key.
(Operation mode selection screen)
2) Automatic matching operation
Switch between automatic and manual with the automatic matching controller's AMC.EXT
connector.
Select automatic mode by opening AMC.EXT pins 1-9 on the automatic matching controller.
Automatic matching starts with RF ON.
For the AMC.EXT and PRESET connectors' pin assignments, see Figure 4-7 and Figure 4-8.
The positions of the variable capacitors cannot be changed by external command voltage in
PR
· RC mode.
3) Save external preset
The current MBX TUNE and MATCH positions are saved to the specified PRESET number by
closing PRESET connector pins 1-9.
AMC CONTROL SELECT
PANEL <PR・RC> ANALOG
AUTO/MANUAL switch
（AMC.EXT[1-9]）
Open
Close
Open
Close
SELECT1
（SELECT[3-11]）
SELECT2
（SELECT[4-12]）
SELECT3
（SELECT[5-13]）
SELECT4
（SELECT[6-14]）
PRESET
（SELECT[1-9]）
Close
Open
100 ms or more
50 ms or more
Figure 5-3 Timing chart during external preset (saving)