Ulvac PVD-180, Instruction Manual

Page: 5 / 37

SK00-4167-DI-002-07
1
Types and Descriptions of Warning Labels Displayed on The Pump and
Displayed Positions
Warning labels are attached on the warning locations in this system.
Be sure to check them before starting operation of the Pump.
1
Before use, read through the instruction manual and fully
understand its contents.
2
・
You may get an electric shock in the area around a portion with
this warning label. Before maintenance or wiring, be sure to turn
off the primary power supply.
・
Be sure to close the lid of the terminal box before operating this
unit. Never open it during operation.
3
During operation or for a while after operation stops, do not touch
the unit as each portion is at a very high temperature. - If a human
body touches the unit, it may get burned.
4
・
This product is not made as the withstand pressure structure.
Ensured pressure value of the Pump shall be 0.03MPaG
(0.3kg/cm2G) (Gauge pressure).
・
Do not run the Pump on blocking the Exhaust outlet or putting
any device that might hamper gas passage onto the outlet. There
is a risk that the pressure inside the vacuum pump rises up to
cause break the casing or Oil level gauge resulting in overload of
the motor.
・
Following gases cannot be evacuated because these gases may
cause the
pump inner pressure to increase due to internal combustion.
1) explosive gas
2) flammable gas
3) gas which increases the susceptibility of substances to burn.
Long term storage of the Vacuum pump without operation might
possibly cause trouble in operation caused by rust if you kept the
Pump long time without operating it, ask a closest Service Center
for the check.
Indoor Use Only
Mount at least 100mm from side walls.