Ulvac PVD-180, Instruction Manual

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SK00-4167-DI-002-07
Contents-2
5-4 Response procedure ................................................................................................................ 29
5-5 Disclaimer ................................................................................................................................. 30
5-6 Others ....................................................................................................................................... 30
Request Form for Repair/Inspection of ULVAC Components /Certificate of Contamination
SERVICE CENTER
Tables and Illustrations
Fig. 1 Display positions of Labels ............................................................................................................ 2
Fig. 2 Dimensional drawing PVD-180 ...................................................................................................... 6
Fig. 3 Dimensional drawing PVD-360 ...................................................................................................... 6
Fig. 4 Dimensional drawing PVD-180B ................................................................................................... 7
Fig. 5 Dimensional drawing PVD-360B ................................................................................................... 7
Fig. 6 Dimensional drawing PVD-180-H
＋
RF-1
＋
RF-7 ........................................................................... 8
Fig. 7 Dimensional drawing PVD-360-H ＋ RF-3 ＋ RF-8 ........................................................................... 8
Fig. 8 Dimensional drawing PVD-180-H ＋ RF-2 ...................................................................................... 9
Fig. 9 Dimensional drawing PVD-360-H
＋
RF-5 ...................................................................................... 9
Fig. 10 Oil filling ..................................................................................................................................... 10
Fig. 11 Electrical wiring diagram for Vac. Lock Valve ............................................................................ 12
Fig. 12 Connection with Vacuum System for PVD-180, PVD-360 ........................................................ 13
Fig. 13 Connection 1 with Vacuum System for PVD-180B, PVD-360B ................................................. 14
Fig. 14 Connection 2 with Vacuum System for PVD-180B, PVD-360B ................................................. 14
Fig. 15 Connection with Vacuum System for PVD-180-H, PVD-360-H ................................................. 14
Fig. 16 Mount the oil mist trap to the pump ........................................................................................... 17
Fig. 17 Pumping speed curves .............................................................................................................. 18
Table 1 Details model list ......................................................................................................................... 3
Table 2 Optional specifications and gasket material/oil type comparison table ...................................... 4
Table 3 Performance specifications ......................................................................................................... 5
Table 4 Rated current for the standard motor ......................................................................................... 11
Table 5 Standard motor terminal size and protection circuit selection criteria....................................... 12
Table 6 PVD-180, PVD-180B, PVD-360, PVD-360B Main replacement parts list .............................. 24
Table 7 PVD-180-H, PVD-360-H Main replacement parts list ............................................................ 24
Table 8 Performance specifications ....................................................................................................... 25
Table 9 Making format for names and contents of hazardous substances or elements ......................... A