Ulvac PVD-180, Instruction Manual, Page: 28 / 37

SK00-4167-DI-002-07
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3. Main replacement parts
Table 6 PVD-180, PVD-180B, PVD-360, PVD-360B Main replacement parts list
Description Model Quantity
Oil Seal SC204011 2
Bearing
No.6204ZZ 1
No.6205CM 1
Oil Level Gauge φ35 1
O-ring (Material : NBR)
PVD-180(B) JIS B 2401 P-22A 1
PVD-360(B) JIS B 2401 P-30 . 1
Solenoid Valve (Only PVD-180B, -360B)
CKD AB3X
（
Custom-made
）
1
AL Gasket (Only PVD-180B, -360B) φ10×φ13× t1.5 1
Table 7 PVD-180-H, PVD-360-H Main replacement parts list
Description Model Quantity
Oil Seal
TC204011 1
SC204011 1
Bearing
No.6204ZZ 1
No.6205CM 1
Oil Level Gauge Φ49 1
O-ring (Material : NBR)
PVD-180-H
JIS B 2401 P-22A 1
JIS B 2401 V-34 2
PVD-360-H
JIS B 2401 P-30 1
JIS B 2401 V-40 2