Ulvac PVD-180, Instruction Manual

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SK00-4167-DI-002-07
Contents-1
Table of Contents
Types and Descriptions of Warning Labels Displayed on The Pump and Displayed Positions ................ 1
Ⅰ
Pump Outline ........................................................................................................................................ 3
Ⅱ
Preparation............................................................................................................................................ 6
1. Inspection ........................................................................................................................................ 10
2. Mounting .......................................................................................................................................... 10
3. Lubrication ....................................................................................................................................... 10
4. Electrical Connection ....................................................................................................................... 11
5. Connection with Vacuum System ................................................................................................... 13
Ⅲ Operation ........................................................................................................................................... 15
1. Pump Start ...................................................................................................................................... 15
2. Pump Stop ....................................................................................................................................... 15
3. Gas-ballast Valve ............................................................................................................................ 16
4. Vacuum Pump Oil ULVOIL R-42 for Winter Use ............................................................................. 16
5. Oil mist trap (Option) ....................................................................................................................... 17
Ⅳ
Pump Performance ........................................................................................................................... 17
1. Ultimate Pressure ............................................................................................................................ 17
2. Pumping Speed ............................................................................................................................... 18
3. Power Requirements ....................................................................................................................... 19
Ⅴ
Maintenance and Check ................................................................................................................... 20
1. Maintenance .................................................................................................................................... 20
2. Regular Check ................................................................................................................................. 20
2-1 Check and Replace Vacuum Pump Oil .................................................................................... 20
2-2 Check and Replace V-belt ........................................................................................................ 21
2-3 Oil Leak Check ......................................................................................................................... 23
2-4 Checking Gas Ballast Function ................................................................................................ 23
2-5 Checking Metal Mesh at the Suction Inlet ................................................................................ 23
2-6 Checking Noise and Abnormal Vibration .................................................................................. 23
2-7 Checking Oil Mist Trap (option) ................................................................................................ 23
3. Main replacement parts ................................................................................................................... 24
4. Trouble Shooting ............................................................................................................................. 25
5. Warranty Clauses ............................................................................................................................ 29
5-1 Warrantable Items .................................................................................................................... 29
5-2 Duration of guarantee ............................................................................................................... 29
5-3 Warrantee scope ...................................................................................................................... 29