SK00-4167-DI-002-07
14
Fig. 14
Connection 1 with Vacuum System for PVD-180B, PVD-360B
Fig. 15
Connection 2 with Vacuum System for PVD-180B, PVD-360B
6)
Installation of a vacuum valve, a leak valve and a vacuum gauge between the equipment and the
vacuum pump is required for PVD-180-H and PVD-360-H as shown in Fig.16. When the pump
stops, shut the vacuum valve [A] to keep the equipment in vacuum, then open the leak-valve [B]
and let air into the pump to prevent from counter-flow of the rotary vacuum pump oil in the pump.
Fig. 16
Connection with Vacuum System for PVD-180-H, PVD-360-H
7)
Use the flexible hose for connection between the pump outlet and the duct.
Summary of Contents for PVD-180
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