Ulvac PVD-180, Instruction Manual

Page: 32 / 37

SK00-4167-DI-002-07
28
Trouble Causes Processing Method
Oil leaks to
the outside
of the
Pump.
1
Deterioration of the O-ring and/or oil
seal of the Case and Cover.
Conduct the overhaul.
2 Oil inlet is loose. Tighten again the oil inlet.
3 The drain port is loosening. Re-tighten the drain port.
Lot of oil
mist blowing
out of the
Exhaust
outlet.
1
Pump is filled over the specified
volume. Drain the oil until it gets the specified
volume.
2
Keeping continuous operation under
high suction pressure
Put the oil mist trap on the Exhaust side.
3 Oil mist trap is clogged. Replace the oil mist trap.
4 Exhaust valve vane is broken. Replace the Exhaust valve vane.
The motor
current
value is
abnormal.
1
Foreign substance entered inside
the Pump impaired the Motor
rotation. Conduct the overhaul.
Removal of foreign substance inside the
Pump.
2
There is a leak in the pipe
connecting with the Pump. Use a Leak detector or the like to find out
the leak position and stop it.
3
Abnormal sliding of the rotor and/or
vane.
Conduct the overhaul.
4
Keeping continuous operation under
high suction pressure.
Adjust the pressure.
Initially,
performance
was being
satisfied, but
the vacuum
degree
became
decreased.
1
Oil is dirty.
a. Water is being suctioned.
b. Dust is being suctioned.
c. Solvent vapor is being suctioned
d. Foreign substance enters in.
Replace with new oil. Conduct the
overhaul.(Inside cleaning)
a. Put the trap into the front stage of
the Pump.
b. Put filters/traps into the front stage of
the Pump.
c. Put the trap by use application into
the front stage of the Pump.
d. Put filters into the front stage of the
Pump.