Ulvac C30VR Series, Installation, Operation, Maintenance And Troubleshooting Instructions

Page: 73 / 110

Section 5 Operation
ULVAC CRYOGENICS INCORPORATED 5-5
5.4 Precautions for when compressor is not in operation
If the temperature of cooling water supplied to the compressor is less than 10 ℃ , stop the
water supply after the compressor has been stopped. If cooling water of temperature
below 10
℃
is supplied continuously it may increase viscosity of lubricant oil and cause
start up failure of the compressor when the operation command is sent.
ant oil and cause
start up failure of the compressor when the operation command is sent.
Also, if the compressor will be stopped for long period, it is recommended to stop
supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor
and the heat exchanger. In addition remove the water from the compressor when needed
(Refer to “Section 6.1.1 Removal of cooling water piping” to remove the water from the
compressor).
Also, if the compressor will be stopped for long period, it is recommended to stop
supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor
and the heat exchanger. In addition remove the water from the compressor when needed
(Refer to “Section 6.1.1 Removal of cooling water piping” to remove the water from the
compressor).
5.5 Maintenance operation for a compressor suspended for a long period 5.5 Maintenance operation for a compressor suspended for a long period
NOTE: Circulate cooling water as well during the maintenance operation of the compressor. NOTE: Circulate cooling water as well during the maintenance operation of the compressor.
When the cryopump system is suspended for a long period, operate the compressor for an
hour every three months. This will supply lubricant oil to all the components inside the
compressor. Also, operate the refrigerator for ten minutes at a time every six months.
CAUTION
Failure to observe this precaution may result in damage to the compressor when restarting
operation.