Ulvac C30VR Series, Installation, Operation, Maintenance And Troubleshooting Instructions

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MDIW001E,2010.06 ULVAC CRYOGENICS INCORPORATED IW-1
Disposal Consideration
Regulations and the ordinance concerning industrial waste treatment are provided in the
country and region to discard. When disposing our products, please process abandonment
according to relevant regulations and ordinance, etc.
When it seems that the cryopump and the refrigerator have been used to evacuate a toxic or
dangerous material, you must contact a safety supervisor before discarding, and discard it
after removing the poisonous material according to directions of the safety supervisor.
Do not disassemble, pressurize, heat, and/or throw into fire. The adsorber may explode.
For safe disposal of an adsorber, follow the procedures below.
(1) Depressurize the high pressure helium gas in the adsorber to an ambient atmospheric
pressure. To do so safely, connect the proper tools such as our charging adaptor (for
refrigerator maintenance).
(2) Before proceeding with disposal work, remove the couplings of the adsorber to visually
confirm that it has been depressurized.
We will offer you Material Safety Data Sheet (called MSDS) of our products upon your request.
If you have any questions, please contact our Service Engineering Division or the nearest
customer support center.
WARNING
WARNING