Ulvac C30VR Series Installation, Operation, Maintenance And Troubleshooting Instructions Download

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C30VR Installation, Operation, Maintenance, and Troubleshooting

C-6

ULVAC CRYOGENICS INCORPORATED

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Summary of Contents for C30VR Series

Page 1: ...at pump nitrogen gas at pumping speed of 15000L S or more fall under row 2 35 of appended table 1 of Japan s Export Trade Control Order which is based on international export control regimes Customers...

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Page 3: ...where our product is used The personnel are also required to have specialized knowledge skills and qualification on the electricity the machinery the cargo handling and the vacuum Especially the perso...

Page 4: ...wns resulting from using the product outside the specified specifications of the product Breakdowns due to contamination or corrosion caused by user s use conditions Breakdowns due to natural disaster...

Page 5: ...splay Serial No Option Part Model Optional Part Serial No 4 Notes for repair and maintenance requests We may decline your request for the repair or the maintenance of our products if you refuse to giv...

Page 6: ...fer this instruction manual or any of its parts to a third person without written permission from ULVAC CRYOGENICS 2 Information in this document might be revised without a previous notice for the spe...

Page 7: ...ould result in severe injury or loss of life A caution describes safety hazards or unsafe practices which could result in personal injury or equipment damage Toxic gas or chemicals used There is a ris...

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Page 9: ...nd flexible hoses 2 7 2 6 Remote functions 2 7 Section 3 Unpacking and Inspection 3 1 3 1 Compressor carton 3 1 3 2 Shipping carton inspection 3 1 3 3 Unpacking 3 2 3 4 Carton contents 3 3 3 5 Inspect...

Page 10: ...re 1 4 C30MVR Front panel Part 1 4 Figure 1 5 C30VR Compressor dimensions 1 5 Figure 1 6 Compressor front view 1 7 Figure 1 7 Compressor rear view 1 8 Figure 1 8 Anchor bolts mounting positions exampl...

Page 11: ...iptions 4 12 Figure 4 13 Cut length of insulation coating 4 12 Figure 4 14 Fix with set screw 4 12 Figure 5 1 Helium static pressure and ambient temperature 5 2 Figure 5 2 Ready for operation 5 3 Figu...

Page 12: ...2 4 Table 2 4 Standard cables and flexible hoses 2 7 Table 2 5 Remote interface specifications 2 7 Table 2 6 Remote interface signals 2 9 Table 3 1 Carton contents 3 3 Table 3 2 Optional parts 3 3 Tab...

Page 13: ...ing helium gas or performing helium line decontamination please read the Maintenance section carefully and follow the instruction Please supply the equipments regulators charging hoses adopters etc th...

Page 14: ...We collect used adsorbers If there is any used absorber please contact a person in your local dealership or Ulvac Techno Ltd to have it picked up or send it directory to our Service Engineering Divis...

Page 15: ...g water for compressor The upper limit of the compressor operating ambient temperature is 35 38 except for C30VR Do not use the compressor in unsuitable environments such as dusty highly humid environ...

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Page 17: ...g to directions of the safety supervisor Do not disassemble pressurize heat and or throw into fire The adsorber may explode For safe disposal of an adsorber follow the procedures below 1 Depressurize...

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Page 19: ...the contents of both the C30VR compressor and related components To ensure safe reliable system performance read this manual as well as other relevant manuals completely to gain a thorough understand...

Page 20: ...is the CRYO U series cryopump which can pump almost any gas and the other is CRYO T super trap series which is specialized for pumping water Unless otherwise indicated the term cryopump refers to both...

Page 21: ...re refilling helium gas is not necessary for long time Helium gas is compressed in a highly reliable oil injection type helium compressor Helium gas recovers its purity as it flows through an oil sepa...

Page 22: ...otor drive Single refrigerator 2 phase motor drive Figure 1 3 C30VR Front panel Part Multiple refrigerators 3 phase motor drive Multiple refrigerators 2 phase motor drive Figure 1 4 C30MVR Front panel...

Page 23: ...ent types of compressor Table 1 2 Compressor weight Table 1 2 Compressor weight Model Model Weight kg Weight kg C30MVR C30MVER 131 C30VR 127 C30VRT C30PVRT C30MVRT C30MVERT 121 The weights in this tab...

Page 24: ...y 5 compared to the nominal value 2 Circuit Breaker Current Rating Interrupt Rating Table 1 4 Cooling water requirements Item Requirements Water temperature Cooling water inlet 5 32 Flow rate 5 15 L m...

Page 25: ...er line 1 1500V Noise immunity Input output line 1 500V 1 By fast transient burst method Test duration 1 min 1 7 Component descriptions This section describes components which need adjustments and or...

Page 26: ...ge the helium It displays the elapsed tim can not be changed GAUGE The high p indicates the static helium filling pressure when the compressor is not in operation and the supply line helium pressure w...

Page 27: ...sting system helium pressure for det Use them to move th compressor Figure 1 8 Anchor bolts mounting positions example 8 M10 anchor volt Front All casters of the compressor unit must be locked after t...

Page 28: ...n operation NOTE CH2 and CH3 indicators are effective only for the C30MVR which can be connected to multiple refrigerators One or more STS LED indicators for alarm indication will light up when malfun...

Page 29: ...n 1 5 Roles of compressor in cryopump system to understand the operation of helium closed loop cryopump system Also refer to Section 4 3 connecting and disconnecting helium flexible hoses for connecti...

Page 30: ...on C30MVR can operate up to three cryopumps at a time See Table 1 1 Figure 1 9 depicts a typical multi cryopump installation with single compressor For detailed instructions on cryopump installation w...

Page 31: ...regeneration time by changing operation frequency Figure 1 10 shows the appearance of the C30VR with an inverter Wire connections and the settings such as inverter frequency depend on your application...

Page 32: ...C30VR Compressor Instruction Manual 1 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 33: ...Refer to the table in Appendix B Combination of C30VR Compressor and Cryopump Super trap for typical combinations of cryopumps super traps and compressor units 2 2 Installation environment requirement...

Page 34: ...m2 5 5mm2 8 mm2 2 1 The color of the ground wire is green 2 Unless otherwise specified 5 5 mm 2 cables are attached to the compressor Supply AC power for compressor from the equipment side distributio...

Page 35: ...ctor 20 AWG Option 2 Remote cable REMOTE RESPONSE Connector 22 AWG Customer supply 1 It is a specialized cable compatible with conventional general purpose compressors such as C30V and C30MV Current r...

Page 36: ...nt where the compressor is installed outside Japan It is necessary to check chemicals and water quality to avoid corrosion clogging and other faults caused by low quality of water and or chemicals Not...

Page 37: ...flow rate water supply temperature and water pressure loss Except for C30PVRT 0 2 0 17 0 1 0 3 0 04M Pa 0 02 0 15 0 05 0 5 10 15 32 30 20 15 10 5 2 7 L min 0 25 Temperature upper limit Temperature lo...

Page 38: ...install a filter in the Cooling water inlet line in order to remove contaminant in the cooling water Installing a water flow meter in the cooling water line of the compressor is also recommended Temp...

Page 39: ...for different length of cables and or flexible hoses 2 6 Remote functions Compressors can be remote controlled from customer s equipment side The following provides information on features and functio...

Page 40: ...hows the remote output interface circuit Each output is an isolated output contact At the equipment side different power supply can be used for each signal However considering that the wiring is seque...

Page 41: ...operating modes Momentary operating mode and Alternate operating mode You can neither use both operating modes at the same time nor switch one operating mode to the other depending on the situations E...

Page 42: ...o turn ON COMP START signal Signal functions only for Alternate operating mode COMP ON OFF Compressor start Stop With Alternate operating mode turning this signal ON starts operation of the compressor...

Page 43: ...and When the compressor starts operation the answer back signal is sent to the equipment Note Refer to Section 2 6 6 Signal timing charts Answer back signal delay as well ALARM Alarm When this signal...

Page 44: ...CH2 REF COMP RUN CH1 ACK CH2 ACK 1 The holding time is 0 3 seconds or more Figure 2 8 Timing chart for Momentary operating mode with two refrigerators Delay and recovery of Answer back signal Please...

Page 45: ...shows the signal delay occurred in Alternate operating mode when the time period from a stop to a reboot is short and Figure 2 11 shows the timing chart of C30VR when a short power interruption has o...

Page 46: ...10 Signal delay when the time period from a stop to a restart is short In Alternate operating mode 1 t 2seconds INPUT POWER SUPPLY COMP START COMP STOP CH1 REF COMP RUN CH1 ACK COMP OPERATION CH1 OPE...

Page 47: ...C30VR refrigerator operation is synchronized with the compressor operation as shown in Figure 2 11 On the other hand for C30MVR refrigerators operation depends on the command from the equipment side a...

Page 48: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 2 16 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 49: ...cations 3 4 3 1 Compressor carton Compressors are shipped in a carton with wooden frame at the bottom 3 2 Shipping carton inspection Inspect the carton before unpacking for evidence of damage such as...

Page 50: ...operate the handling equipment Personnel except for the operator of the handling equipment st keep away from the handling equipment and the compressor during the handling There are risks of dropping...

Page 51: ...able 3 1 Carton contents Item Quantity Compressor 1 Manual 1 Connector for remote operation 1 Table 3 2 Optional parts Item Quantity Input power cable 3m or customized length 1 Refrigerator cable 3m o...

Page 52: ...if the helium static pressure is significantly low Accessories Accessories Inspect and visually confirm the accessories that there is no evidence of damage Inspect and visually confirm the accessorie...

Page 53: ...ng and Inspection ULVAC CRYOGENICS INCORPORATED 3 5 When carry oses keep appropriate bend radius When storing them avoid corrosion a manner to handle other equipments ing flexible h nd condensation in...

Page 54: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 3 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 55: ...es appropriate procedure for installing C30VR and connecting the compressor to a CRYO U cryopump The procedure of connecting the compressor to a CRYO T super trap is the same as connecting to a cryopu...

Page 56: ...leakage To connect cooling water piping in any other way follow the manual of the component 4 3 Connecting and disconnecting helium flexible hoses Cooling water for this compressor must meet the requ...

Page 57: ...the braid support straight so that the connection parts fit properly and tighten by hands as tight as possible Then tighten the coupling with two spanners as shown in Figure 4 3 See Figure 4 4 for us...

Page 58: ...e compressor rear panel and the refrigerator The procedures are shown below Connect the smaller refrigerator cable plug to the refrigerator receptacle For a 2 phase motor refrigerator the plug is self...

Page 59: ...ryopump 4 5 Multiple cryopump installation Figure 4 6 shows the connection of the compressor and multiple cryopumps 1 First install helium manifolds to the compressor connectors to connect multiple fl...

Page 60: ...frigerator cable connecting method described in Section 4 4 Single cryopump installation Figure 4 6 Connections of the compressor and multiple cryopumps example with three cryopumps HELIUM MANIFOLD CO...

Page 61: ...cable first to the compressor and then to the circuit breaker of input power supply source Wiring connection at power supply side must be done properly in accordance with the specifications of custome...

Page 62: ...cifications and remote functions respectively Figure 4 8 Remote connector pin assignments for C30VR View of from the plug soldering side PIN No PIN No Input Signal Output Signal C30V_R REMOTE RESPONSE...

Page 63: ...rating mode wiring example for Single yopump operation cr SRCN6A25 24P 6 PIN No PIN No Input Signal Output Signal C30MV_R REMOTE RESPONSE 2 3 4 1 11 3 14 21 22 16 2 Wire gauge AWG22 20 CH1REF CH2REF C...

Page 64: ...uct command signals but not 6 7 8 and 9 Conversely in Momentary operating mode the pins number 6 7 8 and 9 should be wired as operation command signals but not 15 and 16 Therefore choose appropriate w...

Page 65: ...be wired as operation command signals but not 6 7 8 and 9 Therefore choose appropriate wiring depending on the operating mode 3 Wire GND pin number 20 only when it is needed GND has the same electric...

Page 66: ...g cables Peel off the insulating coating to exp proper length of the condu Pass the cables through the end bell and then solder the cables to the connector pins Cover the so If the bundle of the cable...

Page 67: ...during the operation In addition analog wire is sensitive to and susceptible to noise it must be separated from other wirings in the method above If it is impossible to wire in separated conduits kee...

Page 68: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 4 14 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 69: ...hat the flexible hoses between the compressor and the refrigerator are connected properly 3 See Figure 5 1 and check the proper helium filling pressure value at the actual room temperature 4 Make sure...

Page 70: ...mpressor chassis is normally turned on therefore the compressor will be powered on immediately by switching a power supply on the equipment side Inspection of phase and voltage of an input power suppl...

Page 71: ...STS indicators lights up and or the buzzer sound does not stop refer to Section 8 Troubleshooting to solve the problem WARNING There is a danger of hazardous voltage Only qualified electrical personn...

Page 72: ...ent of the product explained in the following For reference the helium pressure during operation of C30MVR refrigerator R10 series andC30PVRT refrigerator R80 series with 3m flexible hoses are shown i...

Page 73: ...from the compressor Also if the compressor will be stopped for long period it is recommended to stop supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor and the...

Page 74: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 5 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 75: ...er out from the compressor under the conditions listed below Cooling water freezing When there is a danger of bursting cooling water piping due to freezing of the cooling water in the compressor Long...

Page 76: ...WATER OUT fitting as well 6 1 2 Disconnecting flexible hoses To disconnect flexible hoses from the compressor refer to Section 4 3 Connecting and disconnecting helium flexible hoses Put the dust caps...

Page 77: ...oses and cables with covers or boxes Store them with the compressor Ensure that cooling water has been completely drained out from the compressor To store the compressor cover it with a plastic sheet...

Page 78: ...C30VR Compressor Installation Operation Maintenance and Troubleshooting 6 4 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 79: ...nance Cycle h Adsorber replacement Max 24000h 30000h for C30MVE_R Refrigerator maintenance When needed See cryopump instruction manual Inspection for plumbing and wirings 12000h NOTE If a special main...

Page 80: ...screw driver and remove the rear panel Figure 7 2 and 7 3 6 Disconnect the self sealing coupling from the adsorber with two spanners The coupling is connected to the flexible hose above the bottom pla...

Page 81: ...he mounting tab on the base of the compressor And then remove the adsorber from the compressor Figure 7 7 Hold Remove Figure 7 1 Remove two nuts from the helium gas connectors Figure 7 2 Remove all se...

Page 82: ...10 Connect self sealing coupling to the adsorber with the two spanners Tighten the coupling referring to Figure 7 5 Recommended tightening torque is 20N m Connect the coupling quickly to minimize hel...

Page 83: ...a note of the value that the current accumulated operation time added to the adsorber replacement cycle hours in Table 7 1 Refer to Section 9 Disposal of equipment and component parts for disposing of...

Page 84: ...ium gas 3 Wait until the helium pressure gauge reads the prescribed standard value described above When the pressure reaches the standard value close the valve by turning its knob clockwise 4 Replace...

Page 85: ...ng helium gas is required When charging helium or performing helium circuit decontamination equipments regulators charging hoses adopters etc that can be used at 2 0MPaG or above are required Table 7...

Page 86: ...le flared end connect this side to the compressor Pressure regulator handle Bottle valve Pressure regulator Helium bottle Helium charging hose The purity of helium gas to be charged must be above 99 9...

Page 87: ...pen the helium filling valve slightly turn it counter clockwise Allow a small amount helium gas to flow through the helium filling valve and the helium filling fitting to purge the air between them 4...

Page 88: ...ck the breaker at OFF status for safety reason Disconnect the input power cable from the compressor Fol wing procedure must be undertaken by authorized electrician and mechanical personnel familiar wi...

Page 89: ...state There are eight indicators called STS at the front panel of the compressor Please refer to Figure 8 1 for the alarm types of warnings and faults The alarm status code table shown in Figure 8 2 i...

Page 90: ...ailure of power supply DC24V inside controller Blown fuse or power supply failure Call for servicing RDY indicator is OFF STS indicators indicate ALARM status and buzzer activated Does not meet requir...

Page 91: ...Set power supply voltage within the available range Relay fault inside Controller or fault such as refrigerator cable disconnection Call for servicing Replace the refrigerator cable RDY indicator lig...

Page 92: ...he compressor status and main power phase sequence If the input power supply voltage is low check the input power line and the user s power supply that has distributed electric power to the compressor...

Page 93: ...he alarm is not cleared by the procedures above please contact our Service Engineering Division or the nearest customer support center immediately CP2 Cold Head Trip Qvercurrent of refrigerator When t...

Page 94: ...Please contact our Service Engineering Division or the nearest customer support center for replacement and adjustment of the controller Other Status whereby both RDY and STS indicators are OFF In nor...

Page 95: ...OR S N CRYO U OPERATING LOG POWER Cryopump Measuring condition Compressor unit Temperature Pressure Remarks 1st stage 2nd stage Date Time Measurer Room temp Humidity ETM High pressure helium gas MPaG...

Page 96: ...C30V_R Compressor Installation Operation maintenance and troubleshooting A 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 97: ...3 R10 R10R RM10 1 1 3 2 3 R10T R10RT RM10T 1 2 3 R20 R20R RM20 1 1 2 R20T R20RT RM20T 1 1 2 U16L 16 R20 R20R RM20 1 1 R50 R50R RM50 1 1 R50T R50RT RM50T 1 1 U20P 20 R50 R50R RM50 1 1 U20H U20HSP U20H...

Page 98: ...C30V_R Compressor Installation Operation Maintenance and Troubleshooting B 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 99: ...s of setting and connections are shown in Table C 1 Table C 1 Differences on devices between compressor unit models Refrigerator Figure Model OL1 setpoint Cable Connector Max quantity Scott Transforme...

Page 100: ...RESSOR MOTER TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015...

Page 101: ...YW YW BE YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 24 UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10 UL1015 10 UL1015 10 Cold Head No3 Cold Head No 2 Cold Head...

Page 102: ...5 FG YW GN UL1007 16 GN YW GN UL1007 18 BK RD BE YW YW YW BE BE BE YW E4 BK RD E T S R TB2 UL1015 14 YW BE BE YW BE YW BE YW YW BE UL1007 18 UL1007 18 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007...

Page 103: ...BK RD E T S R YW BE YW BE YW BE TB2 COLD HEAD UL1015 14 YW BE BE YW BE YW BE YW YW BE YW BE UL1007 18 UL1007 24 UL1007 24 UL1007 24 UL1007 24 BK BK RD RD UL1007 18 UL1007 18 YW GN BK WT RD UL1015 10...

Page 104: ...C30VR Installation Operation Maintenance and Troubleshooting C 6 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

Page 105: ...oval of compression caused heat It is cooled to an ambient temperature and then enters an oil separator In here the oil is separated and the droplets of separated oil pass thorough an oil return filte...

Page 106: ...separator Adsorber Oil return filter Oil return orifice S Solenoid valve for pressure equalization Oil injection filter LPS TS2 Differential pressure regulating valve Compressor pump OUT TS3 Oil heat...

Page 107: ...397 0112 Fax 81 6 6397 0126 Inquiries about cryostats or LN2 generators Kyoto Factory 140 1 Megawa Makishima cho Uji kyoto 611 0041 Japan Tel 81 774 28 5595 Fax 81 774 20 2201 ULVAC CRYOGENICS KOREA I...

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Page 109: ...ht has been corrected Introduction has been revised SERVICE NETWORK has been revised RM refrigerator has been added Full fledged revision Carton contents have been changed Cover Export control policy...

Page 110: ...Revision History R 2 ULVAC CRYOGENICS INCORPORATED This page intentionally left blank...

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