Ulvac C30VR Series, Installation, Operation, Maintenance And Troubleshooting Instructions

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C30VR Compressor Installation, Operation, Maintenance and Troubleshooting
Wa
te
r p
ress
ur
e loss
[MPa
Figure 2-4
Cooling water flow rate, water supply temperature,
and water pressure loss
(For C30PVRT)
2.4.3 Directions for using cooling water
Rc 3/8 female pipe thread is used for both “Cooling water inlet” and “Cooling water outlet”.
It is recommended to install a filter in the “Cooling water inlet” line in order to remove
contaminant in the cooling water.
Installing a water flow meter in the cooling water line of the compressor is also
recommended.
Temperature upper limit
Temperature Lower Limit
Water flow rate [L/min.]
Water flow rate [L/min.]
(3) 0.06MPa
(2) > 9L/min
]
Flow
rate
upper
limit
Flow rate lower limit
Operating water
temperature
range
Allowable temperature
(See CAUTION above)
(1) When water temperature is
at 30 ℃
W
ate
r su
ppl
y temperature [
℃
]
Upper limit
Lower limit
2-6 ULVAC CRYOGENICS INCORPORATED