Ulvac C30VR Series, Installation, Operation, Maintenance And Troubleshooting Instructions

Page: 79 / 110

Section
７
Maintenance
ULVAC CRYOGENICS INCORPORATED 7-1
Section 7 Maintenance
7.1 Scheduled maintenance ....................................................................... 7-1
7.2 Replacement of adsorber ..................................................................... 7-1
7.3 Adjusting system helium pressure ........................................................ 7-5
7.4 Regular maintenance of helium lines, cooling water piping
and electrical wiring ............................................................................ 7-10
7.5 Maintenance parts .............................................................................. 7-10
7.1 Scheduled maintenance
The table below shows the required maintenance on the cryopump system. Refer to the
following paragraph for details of adsorber replacement.
For maintenance of refrigerator or other components of the cryopump, see cryopump
instruction manual.
Table 7-1 Scheduled maintenance
Item Maintenance Cycle (h)
Adsorber replacement Max. 24000h (30000h for C30MVE
_
R)
Refrigerator maintenance
When needed
（
See cryopump instruction manual.
）
Inspection for plumbing and
wirings
12000h
NOTE: If a special maintenance plan for your specific application is needed please consult
with our Service Engineering Division or the nearest customer support center.
NOTE: Refer to “Disposal Considerations” when disposing used components or parts.
7.2 Replacement of adsorber
Neglecting the scheduled maintenance may shorten the product life, cause damage, and/or
destruction of the cryopump system.
CAUTION
The following replacing procedure must be undertaken by authorized personnel familiar with
the structure and risk of the product. Failure to observe this warning may result in severe
CAUTION
bodily injury or fatal accident.