TELEVAC MM200 Manual Download Page 148

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INSTRUMENT MANUAL

VACUUM GAUGE MODEL MM200

160Phone:(215) 947-2500 fax:(215) 947-7464 e-mail:[email protected] web site:www.televac.com

MM-200_im REV M

Page 147 of 160

TELEVAC

Fig. 9.4b – 7F Cold Cathode Gauge Module

Additional jumpers are required as shown below. Finally, there is a switch, S1, which must be placed in the MP

position.

Board #

Type

Jumpers (Factory set)

2-6200-227*

7B2

J1 in 7B MP, J3 in MP

2-6200-223*

J1 in 7E, J3 in MP

2-6200-245 or –285

7F UHV J5 in MP, J8, J9 as noted

J11 Select for type cable

* Combined 2-6200-223/227 board

Summary of Contents for MM200

Page 1: ...TELEVAC A DIVISION OF THE FREDERICKS COMPANY 2400 PHILMONT AVE HUNTINGDONVALLEY PA 19006 MM200 ...

Page 2: ...ne 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 1 of 160 TELEVAC PARTS QTY ITEM DESCRIPTION 1 1 MM200 2 1 Instruction Manual 3 1 AC Power Cable 4 1 Power supply module 5 1 SET Rubber Feet 1 3 4 5 ...

Page 3: ... FEATURES 11 Measurement Expansion 11 Sensor interface Modules 11 Computer Interface Modules 11 Non volatile Memory 11 Display 11 Keyboard 11 CPU Configuration 11 103 SETPOINT RELAYS 11 104 VACUUM GAUGE TUBES 11 Diaphragm 12 Thermocouple 12 Convection 12 Cold Cathode 12 Hot Cathode 12 Capacitance Diaphragm Gauge 13 200 INITIAL CHECKOUT 14 201 UNPACKING AND INSPECTION PROCEDURES 14 202 INVENTORY 14...

Page 4: ...CTION FITTINGS 25 NPT Pipe Thread Connections 25 0 ring Compression Fittings 25 Conflat Flange Fittings 25 KF Flange Connections 26 Cajon Fittings 26 306 GAUGE SENSOR INSTALLATION 26 307 REMOVAL AND INSTALLATION OF MODULES 27 308 DESCRIPTION OF MODULES 28 Power Supply Module 28 Setpoint Relay Module 29 Communications Module 29 Thermocouple Module 30 Convection Module 31 Diaphragm Module 31 Cold Ca...

Page 5: ...41 402 ERROR INDICATIONS 41 403 KEYPAD DESCRIPTION 42 PUSHBUTTON Functions 43 TEST OP Pushbutton 43 SETUP Pushbutton 43 N2 GAS Pushbutton 43 UP DOWN Arrows 43 UNITS Pushbutton 43 LEAK RT Pushbutton 43 404 RELAY SETPOINTS 43 Range of Use 44 Changing Sensor Assignment 44 405 ANALOG 0 10V OUTPUTS 45 0 10V Outputs 46 0 10V Output Options 49 406 INITIAL OPERATION SETUP SEQUENCE 50 Pressure Readings 50 ...

Page 6: ... Operation 54 Self Diagnostic Test 54 UP DOWN Arrows 56 SETUP Pushbutton 56 Cold Cathode Setup 56 3D 3E Hot Cathode Setup 59 Degass Timer 62 Relay Setpoints 62 SP 1 Station Assignment 62 SP 1 Setpoint Selection 62 UNITS Pushbutton 63 N2 GAS Pushbutton 64 LEAK RT Pushbutton 64 HANDLING UNITS 64 For versions 2 31 or higher Refer to Section 6 2 page 602 503 3F HOT CATHODE MODULE Mini BA 65 F AUTO or ...

Page 7: ...odules 69 Commands For The 3F Hot Cathode MINI BA Module 70 603 COMMUNICATIONS FOR SOFTWARE VER 1 35 2 31 70 604 RS232 RS485 COMMANDS 70 RS232 RS485 70 Communications 75 Configuration 77 Data Output 79 Display 81 Gas 82 Hot Cathode 83 Leak Rate 84 Outputs 85 Set Point Setting Values 88 Convection Gauge 4A atmosphere Adjustment 92 Zeroing Thermocouple Convection and Diaphragm Gauges 92 RS232 RS485 ...

Page 8: ...0_im REV M Page 7 of 160 TELEVAC SECTION TITLE PAGE 606 COMMAND SUMMARY FOR SOFTWARE VER 1 19 1 20 Communications 111 127 Data Output 113 Hot Cathode 115 Leak Rate 116 Output Formats 117 Set Points 117 Set Point Setting Values 118 607 COMMUNICATIONS FOR SOFTWARE VER 1 0 1 19 119 RS232 Protocol 119 RS232 Hardware 127 Special Commands 127 ...

Page 9: ... 800 SPECIFICATIONS 134 801 CONTROLLER SPECIFICATIONS 134 802 CONTROLLER DIMENSIONS 134 803 SENSORS 135 804 ORDERING INFORMATION 135 900 TROUBLESHOOTING 137 901 PRELIMINARY TROUBLESHOOTING 137 902 SETUP OF MODULE BOARDS 138 Setpoint relay module 138 Digital interface module 140 Thermocouple module 141 Convection module 143 Cold Cathode module 145 Diaphragm modules 149 Capacitance Diaphragm module ...

Page 10: ...200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 9 of 160 TELEVAC SECTION TITLE PAGE 1000 MISCELLANEOUS 158 CALIBRATION MODE 158 DIAPHRAGM GAUGES 158 INSTALLATION OF EPROMS 159 ...

Page 11: ...nts utilize the latest in digital and analog technology and provide a versatile easy to use means for measuring pressure vacuum With the appropriate system and sensors pressures ranging from 10 11 Torr through 7 5 x 10 3 10 Bar are accurately monitored Additionally vacuum chamber leak up rate can be measured A large selection of sensors and mounting configurations as well as hardware control inter...

Page 12: ... the instrument power is off DISPLAY The display system for all gauges has two large multiplexed light emitting diode LED displays Each display can show a maximum of four 4 digits of data including an exponent The display also has smaller displays which indicate selected station number selected measurement units alternate gas type and setpoint relay status KEYPAD The keypad is a tactile feel non m...

Page 13: ...dy of the gauge serves as the cathode and is at ground potential The anode operates at voltages up to 3000 volts A permanent magnet traps electrons in the gauge to sustain the discharge at very low pressure This type of gauge may be less precise in its reading than hot cathode gauges and like the hot cathode gauge is also sensitive to gas type However it is relatively rugged and has no filament to...

Page 14: ... and one or more electrodes It is not sensitive to gas type These sensors are temperature compensated but do respond to rapid changes of temperature Temperature changes cause zero shifts In some cases the gauges are heated for stability and to prevent condensation of process gasses Users should note that occasional adjustments of the zero point are normal for sustaining accuracy with this type of ...

Page 15: ...mpany 2400 Philmont Avenue Huntingdon Valley PA 19006 202 INVENTORY Compare the contents of the shipping containers with the invoice to be sure you received all necessary equipment 203 INITIAL CHECK PROCEDURES For the Initial Check Procedure you need only the control unit and the power cord Do not connect any sensors cables or other devices to the unit for this check CORRECT OPERATING VOLTAGE Befo...

Page 16: ...ower supply 4 relays 5 stations and RS232 SLOT 0 Power supply SLOT 1 S1 Setpoint relay module SLOT 2 S1 Setpoint relay module SLOT 3 T1 Dual thermocouple module 2 stations SLOT 4 C1 Dual convection module 2 stations SLOT 5 B1 Blank panel SLOT 6 C1 Cold cathode module 1 station SLOT 7 R1 RS232 RS485 module INITIAL DISPLAYS The front panel shown in Fig 2 2 is used to observe the displays and to exec...

Page 17: ...ENT MANUAL VACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 16 of 160 TELEVAC Fig 2 2 Front Panel Fig 2 3 Software Version ...

Page 18: ...nd the adjacent small number reads the corresponding station number typically 1 The left hand display shows the lowest number ionization cold cathode or hot cathode station installed station 7 in the example shown in Fig 2 4 Since the high voltage power is off the display reads OFF See Fig 2 4 If no ionization gauge is installed the left hand display shows the second lowest station installed Fig 2...

Page 19: ...RS232 RS485 interface The other slots can be fitted with various combinations of the following currently available boards PCB TYPE 6200STA SLOT DESCRIPTION 1E 220 2 1 A dual diaphragm module 1F 224 2 1 A dual diaphragm module 2A 186 2 1 A dual thermocouple module 3D 226 1 4 A single hot cathode module with Joule de gassing 3E 232 1 4 A single hot cathode module with EB de gassing 4A 215 2 1 A dual...

Page 20: ...re installed no sensors should be assigned to station number ten 10 If there is one relay module installed then five other slots are available and still up to ten stations can be installed With two relay modules four slots are available and up to eight stations can be accommodated Setpoints must be consecutively numbered starting with number 1 1 through 4 or number 5 5 through 8 WARNING All relays...

Page 21: ...AX MAX MAX MAX STATIONS RELAYS STATIONS RELAYS EPLANATION OF TERMS USED 2X Dual station Thermocouple Convection Diaphragm 7F Cold Cathode or single slot 7E cold cathode CC Single station two slot Cold Cathode module shared space with RS232 4S Four setpoint module Can substitute for a 2X module RS RS232 or RS485 HC Resident Hot Cathode module 10 8 9 8 MAX MAX STATIONS RELAYS MAX MAX STATIONS RELAYS...

Page 22: ... 16 REMOTE MODULES INTERNAL TERMINATION RESISTOR AT LAST UNIT Up to 48 remote sensors consisting of Up to 16 hot cathode remote modules with no displays each with up to 2 additional sensors in a daisy chain hook up of up to 4000 optional local thermocouple convection diaphragm or cold cathode gauges Maximum is 2 additional sensors but only 1 cold cathode REMOTE HOT CATHODE MODULE S VIA MM200 One o...

Page 23: ...eb site www televac com MM 200_im REV M Page 22 of 160 TELEVAC Table 3 1c Allowable Configuration for the MM200 Continued CONTINUED RS232 Link Computer Optional thermocouple diaphragm convection or cold cathode gauges Maximum remote station 3 Including the hot cathode REMOTE HOT CATHODE MODULE S VIA COMPUTER ...

Page 24: ...LLATION FREE STANDING The instrument can be used as a freestanding unit panel mounted or mounted in a standard 19 rack RACK MOUNTED A rack adapter kit is required to rack mount one or two controllers in a standard 19 rack Refer to Fig 3 2 for component configuration For one controller install the small interconnecting adapter to the unit and then the long filler panel to the inter connecting adapt...

Page 25: ...not handle the inside surfaces of any vacuum sensor WARNING Implosion and Explosion Hot Cathode Ionization Gauges If handled roughly glass ionization gauges may implode under vacuum causing flying glass which may injure personnel Be sure that cabling to the gauge tube has proper strain relief so that cable tension cannot break the glass If pressurized above atmospheric pressure glass tubes may exp...

Page 26: ...side the fitting The connection is then hand tightened to create a seal Do not over tighten the connection If necessary a small amount of vacuum grease may be used to obtain a good vacuum seal 3 CONFLAT FLANGE FITTINGS ConFlat and similar compatible types made by other manufacturers are widely used for attaching devices to ports on high vacuum systems These flanges utilize knife edge surfaces and ...

Page 27: ...A Vertical down required Thermocouple A Vertical down desired Cold Cathode B NA Hot Cathode glass C Horizontal Hot Cathode nude C NA A To prevent debris from entering the gauge sensor and to provide the highest accuracy it is recommended that the gauge sensor be installed with its main body vertical Do not mount the sensor in areas where gases are allowed to stream directly into the gauge tube sin...

Page 28: ...rews and pull on the rear panel of the module If necessary use a small screwdriver to start the module moving by prying between the module and the enclosure The module will then slide out easily See Fig 3 3 Fig 3 3 Removal Installation of Modules To install a module slide it in place along the track and firmly press it into the mating socket connector Reinstall screws If you wish to add optional m...

Page 29: ... position you plan to use 4 Align the module with the slots in the instrument and push into place Press to secure edge connector into the connector on the motherboard 5 Reinstall the two screws 308 DESCRIPTION OF MODULES Various types of modules are available for installation in the MM200 gauge Descriptions of available modules follow as they appear from the rear panel For detailed descriptions of...

Page 30: ...connector for the RS232 or RS485 interface cable A SETUP lock switch is used to permit or to lock out the capability to reset or reassign relays using the SETUP function Two 2 phone jacks are also shown The larger one 3 5 mm is labeled LEAK AUDIO and is used to provide an audible signal whose pitch frequency is a function of the instantaneous pressure The smaller one 2 5 mm is labeled GAS SW and i...

Page 31: ...finition to the data in this lower range Other outputs are also available An optional 0 to 10 mVDC is also available See Section 902 There are three terminals available The center terminal is a common ground and negative terminal for both the upper and lower thermocouple stations The upper and lower terminals are the positive signals for the upper and lower stations respectively Between the cable ...

Page 32: ...otentiometer marked ATM is used to adjust the gauge at atmospheric pressure This should be set the known value of absolute atmospheric pressure on the gauge not referred to sea level as is used by the weather bureau or airports DIAPHRAGM MODULES The rear panel of the diaphragm modules are also shown in Fig 3 7 The only difference that can be seen from the rear panel of a thermocouple module is the...

Page 33: ...r the 7FCS 6200 285 module only The ION ON potentiometer is not used for the MM200 and its setting is ignored Fig 3 8 Rear Panel of the Cold Cathode Gauge Module 3D HOT CATHODE RESIDENT MODULE I 2 R DEGAS The rear panel of the 3D hot cathode resident module with resistive I 2 R degas is shown in Fig 3 9 This module occupies 4 module slots The module must be within 10 100 with a special cable of th...

Page 34: ...off or turn power ON OFF after switching There is no filament selector switch for use with dual filament sensors on this unit as this is done through front panel commands It is necessary to switch the filaments when the filament power is off It may also be necessary to reverse the cable connector An analog output is available at the connector in the lower left of the panel There are three terminal...

Page 35: ... the module via a BNC connector located in the left hand middle of the module Push the mating connector in and twist clockwise to secure Above the BNC connector is a case ground connection used to connect the unit independently to a good earth ground Below the BNC connector is a switch marked TUBE TYPE Switch position with power off or turn power ON OFF after switching See Table 3 4 An analog outp...

Page 36: ... to be installed it must be configured to station 5 If a second module is to be installed it must be configured to station 6 Place 5 jumpers vertically for station 5 If two 3F hot cathode mini BA modules are to be used place 5 jumpers vertically in station 6 for the second module When installing the modules into the unit make sure that the card edge fingers align with the connectors inside the uni...

Page 37: ...ule is shown below The gauge tube cables are connected to the ion collector and the 9 pin ion gauge connector An analog output normally 0 to 10 VDC is available at the connector in the upper right as shown below There are three terminals available The lower terminal is a common ground and negative terminal for both the upper two terminals The upper two terminals are for 10 volts and 10 millivolts ...

Page 38: ...ACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 37 of 160 TELEVAC Software ver 2 31 or higher MINI BA GAUGE TO 3F MODULE WIRING DIAGRAM ...

Page 39: ...mocouple cable The capacitance diaphragm modules are designed to work with the type 5__ capacitance diaphragm gauge tubes Ranges are as follows SOFT 1 33 AND LOWER SOFT 1 34 AND HIGHER Full Scale Full Scale 5A 1 Torr 5A 1000 Torr 5B 1000 Torr 5B 100 Torr 5C 10 Torr 5C 10 Torr 5D 1 Torr 5E 0 1 Torr 5F special An analog 0 10V output normally 0 to 10VDC is available at the connector in the center of ...

Page 40: ...INSTRUMENT MANUAL VACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 39 of 160 TELEVAC ...

Page 41: ...NUMBER This number corresponds to the sensor whose pressure vacuum is being displayed This sensor is located at a particular location in the vacuum system Figure 4 1 Front Panel of Gauge Controller The gauge controller can have one 1 to ten 10 stations The station numbers are normally factory assigned but can be re assigned at installation Stations are selected via the UP DOWN arrows The 10 th sta...

Page 42: ...is factory programmed and is typically argon Display letters periodically flash ArG for argon and He for helium gas Other gas types may be available on special order LEAK RATE INDICATOR This is a trend representation of displayed data and indicates the rate of change of pressure Full scale is approximately 9999 microns hour A positive number indicates pressure increases a negative number indicates...

Page 43: ...x 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 42 of 160 TELEVAC 1 2 3 4 5 6 403 KEYPAD DESCRIPTION Fig 4 2 shows the front panel of the gauge controller with the various control pushbuttons identified Fig 4 2 Control Pushbuttons ...

Page 44: ...ition reassigns set point assignments See Section 502 for details 5 UNITS PUSHBUTTON Changes units of measurement for pressure from the default units to TORR MICRON PSI MBAR PASCAL This does NOT change the analog 0 10V output values 6 LEAK RT PUSH BUTTON After a 15 second delay displays average leak rate or rate of change of pressure in the right hand display when depressed Display is in MICRONS p...

Page 45: ...pump e g diffusion pump is connected to the vacuum system This is usually done automatically at a pressure in the range of 80 to 100 microns Relay 1 is set to energize at a pressure of 80 microns on the signal from thermocouple sensor 1 which monitors the pressure in the main chamber When the pressure drops below 80 microns a sequence of steps is initiated by the change in status of the relay name...

Page 46: ...e sensor being used When the UNITS pushbutton is pushed to display alternate units of measure the recorder output remains in the original units of measurement so that no discontinuity occurs in the output data due to pushing this button The various outputs are available are shown in Table 4 1 along with the normal units of measurement linear linear per decade logarithmic non linear traditional The...

Page 47: ...0 0 800 0 080 3 172 90 0 898 5 900 0 900 0 090 3 257 100 0 980 6 100 1 000 0 100 3 333 150 1 350 6 150 1 500 0 150 3 627 200 1 670 6 200 2 000 0 200 3 835 300 2 285 6 300 3 000 0 300 4 129 400 2 630 6 400 4 000 0 400 4 337 500 2 992 6 500 5 000 0 500 4 498 800 3 824 6 800 8 000 0 800 4 838 1T 4 226 7 100 10 000 1 000 5 000 2 T 5 440 7 200 13 500 2 000 5 502 3T 6 080 7 300 3 000 5 795 4T 6 440 7 40...

Page 48: ...0 7 38561 6 51414 8X10 5 7 6 0 800 7 25772 6 34363 7X10 5 7 4 0 700 7 11275 6 15033 6X10 5 7 2 0 600 6 94538 5 92717 5X10 5 7 0 0 500 6 74743 5 66323 4X10 5 6 8 0 400 6 50515 5 34020 3X10 5 6 6 0 300 6 19280 4 92374 2X10 5 6 4 0 200 5 75257 4 33677 1X10 5 6 2 0 100 5 00000 3 33333 9X10 6 5 8 0 090 4 88561 3 18081 8X10 6 5 6 0 080 4 75772 3 01030 7X10 6 5 4 0 070 4 61275 2 81699 6X10 6 5 2 0 060 4 ...

Page 49: ...10 TORR 0 10V 10V 10 TORR R4AL LoG6 LOG 10 3 TO 1000 TORR 1 67V DEC 10V 1000 TORR JMPR 4A NON LIN 10 3 TO 1000 TORR 0 10V 10V 760 TORR 2A TRAD L 0 1000 MICRONS 0 10V 10V 0 MICRONS RL 2C TRAD L 0 20 000 MICRONS 0 10V 10V 0 MICRONS RL 5A B C D E F CAP DIAPHRAGM GAUGES R5AN Linr LINEAR 0 FULL SCALE 0 10V 10V FS STD R5AL LoG3 LOG 3 DECADES 3 33V DEC 10V FS 5A FS 1000 TORR 5D FS 1 TORR 5B FS 100 TORR 5...

Page 50: ... and the value of vacuum pressure can be easily read The value of the voltage within any decade is equal to the value at the top of the next lower decade plus a variable adder voltage For a 1 V decade output the adder for 5 x 10 x would be 5 volts LOGARITHMIC This output is best used when the 0 10V output covers a range of several decades such as 10 3 to 10 3 Torr and a data acquisition system is ...

Page 51: ... setpoints assignment if module is present If module is not present this step is skipped See section 502 3 for Hot Cathode and cold cathode setup procedures if these modules are present For relay setup proceed as follows 1 Push SETUP button as many times as is required to see the following display a SP1 b STATION 1 blinking or any other station Change assigned station if required Use UP DOWN pushb...

Page 52: ...button to select desired unit of measure other than TORR or MICRONS such as PASCAL MBAR and SCC M Continue to push until desired units are displayed LEAK RATE 1 Push LEAK RT button to display leak rate LED After 15 seconds the leak rate value is displayed under the MICRONS HR heading Value is average leak rate from time pushed Push again to return to normal operation Leak rate is measured using th...

Page 53: ... to achieve the most accurate reading from the gauge the sensitivity can be adjusted in setup This factory preset value is 10 0 1 Torr It can be set from 5 0 to 20 0 To set this value refer to the setup section of the manual DEGAS Over time and depending on the process gases used the gauge can become contaminated Degassing the gauge will clean the tube of these impurities Degas increases the emiss...

Page 54: ...on type stations if not then the next lowest station number is displayed Typically the primary ionization station which is cold cathode station 7 in the example shown in Fig 2 2 and Fig 2 4 Since the high voltage power is off the display reads OFF During the initialization process the following steps take place 1 The station displays and the various LEDs go blank 2 The A D converter is calibrated ...

Page 55: ...t settings should power be turned off and then back on See Fig 4 2 SELF DIAGNOSTIC TEST The TEST OP pushbutton is used to perform self diagnostics if pressed during normal operation When TEST OP is pressed in normal operation the two station displays go blank The left hand large display now shows SELF and the right hand large display shows tESt The displays remain that way until the self diagnosti...

Page 56: ...efers to absolute value Pressing TEST OP again causes the next fault to be displayed if there is more than one fault After the last fault or no err is displayed pressing the TST OP button once returns the instrument to normal operation For software versions 2 03 and higher pressing the TST OP button twice in quick succession after the last fault or no err display will result in display of the 0 10...

Page 57: ...tion of the UP DOWN arrows during setup is described below SETUP PUSHBUTTON for versions 2 31 or higher refer to Section 6 2 page 602 The SETUP pushbutton is used to control functions They are controlled in the following sequence 1 Cold Cathode gauge setup if module is present 2 Hot Cathode gauge setup if module is present 3 Relay setpoints assignment if module is present If module is not present ...

Page 58: ...n 1 ACTION Push DISPLAY See Table of Display Descriptions 1 SOFT 1 30 is displayed then 2 Ccion Auto Ccion SELF 3 Ccion both 4 3 HP 5 OFF HP 5 rdy 5 4 1 2 9 51 0 NOTES 1 Required for 7F module 2 6200 245 2 Will skip to display of step 4 if in Auto mode default setting for software 1 33 and higher 3 HP High Potential voltage 4 If turned off by overpressure the CC must be reset by the front panel or...

Page 59: ...verpressure and off and on by the thermo conductivity gauge pressure reading Preferable If turned off by overpressure the CC must be reset by the front panel or by RS232 HP 5 rdy CC is ready to be turned on by TC reading below 10 microns 1 2 951 0 Station 5 1 2x10 9 Torr Station 1 0 microns 1c COLD CATHODE SETUP For Software Version 1 30 1 and higher WITH NO CONTROLLING THERMOCONDUCTIVITY GAUGE Po...

Page 60: ... 1 ACTION Push DISPLAY See Table of Display Descriptions 1 SOFt 1 35 is displayed then OFF 51 0 is displayed 2 HCion Auto HC ion SELF 3 FIL 5 OFF FIL 5 rdy 1 FIL OFF 2 FI FIL 5 rdy 3 4 1 2 9 51 0 NOTES 1 If filament comes on GO TO Step 4 If not continue 2 Switch filament selector switch on rear panel and continue Use either up or down arrow 3 Filament should be on GO TO Step 4 4 Error codes which ...

Page 61: ...eading only and comes back on when pressure falls below 10 microns HCion SELF This means HC is turned off by HC overpressure only HCion both This means HC is turned off by both the HC overpressure and off and on by the thermo conductivity gauge pressure reading Preferable FIL 5 OFF Filament is OFF FIL 5 rdy Filament is ready to be turned on by TC reading below 10 microns FIL nbr2 Filament 2 is act...

Page 62: ...self diagnostics If everything is all right the display is as follows assumes HC is designated as station number 5 ACTION Push DISPLAY See Table of Display Descriptions 1 SOFt 1 35 is displayed then OFF 51 0 is displayed 2 FIL 5 OFF 1 FIL 5 on 2 4 FIL nbr2 FIL nbr1 5 OFF 55 OFF 6 FIL 5 OFF FIL 5 on 3 7 5 1 2 9 NOTES 1 CAUTION Pressure must be below 10 microns before continuing 2 If filament comes ...

Page 63: ... measure during DEGAS 3 RELAY SETPOINTS SP 1 STATION ASSIGNMENT When the SETUP button is pressed the displays change their functions When ion gauges hot cathode and cold cathode are present the following displays follow those described for the ion gauges installed The large left hand display changes to SP 1 indicating that setpoint 1 is about to be assigned set or simply viewed The right hand stat...

Page 64: ...tored by going to Set Up and changing any set point even if it is immediately changed back Upon coming out of Set Up the selected units will be stored When ever the unit is subsequently powered up the selected units will be the default units All Televac sensors have either Torr or Microns as their native units The one exception is the Model 1F which has Bars as it s native unit When native units a...

Page 65: ... change in pressure from the time when the button was first pushed Initial readings are displayed after a 15 second delay Typically a 15 minute waiting time is used to get a final reading Pressing this button a second time returns the instrument to the set up that was in effect before the button was pressed the first time This feature applies to thermocouple and convection gauges only HANDLING UNI...

Page 66: ... and on by the thermoconductivity gauge pressure reading If turned off by overpressure the CC or BA must be reset by the front panel or by RS232 Press the setup button again to advance to the following FIL ON or OFF or RDY Use to up dn arrow to turn the filament on or off Press the setup button again to advance to the following OFF or ON DGAS Use to up dn arrow to turn the degas on or off Press th...

Page 67: ...what you will use after initial set up 8 Click on the connect using tab and choose the COM port that you found in step 3 Click OK a Set bits per second to 9600 b Leave data bit parity and stop bits where they are set c Set flow control to Xon Xoff d Close configure box 9 Verify that you are connected to system Bottom left hand side of window should say connected 10 Click properties on Hyper Termin...

Page 68: ...test op to exit UNIT xx RS485 and STD only use up dn arrow to select Press setup button to advance to next selection or test op to exit PREF xx RS485 only use up dn arrow to select Press setup or test op to exit In STD mode a prefix and address must be selected for each instrument on the bus If the same prefix is selected for multiple instruments then each of these must have a different address A ...

Page 69: ...31 OR HIGHER PREFIX SELECT CHAR 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 UNIT ADDRESSES SELECT ADR SELECT ADR SELECT ADR 01 1 22 M 43 i 02 2 23 N 44 j 03 3 24 O 45 k 04 4 25 P 46 l 05 5 26 Q 47 m 06 6 27 R 48 n 07 7 28 S 49 o 08 8 29 T 50 p 09 9 30 U 51 q 10 A 31 V 52 r 11 B 32 W 53 s 12 C 33 Y 54 t 13 D 34 Z 55 u 14 E 35 a 56 v 15 F 36 b 57 w 16 G 37 c 58 y 17 H 38 d 59 z 18 I 39 e 1...

Page 70: ...the filament on for station 5 3F gauge GFH Turn degas off for station 6 3F gauge GFL Turn degas off for station 5 3F gauge GNH Turn degas on for station 6 3F gauge GNL Turn degas on for station 5 3F gauge RO This command outputs the voltage being received from each of the sensor modules plus stations 8 and 9 Stations 8 and 9 are actually the filament drive being supplied to stations 5 and 6 when 3...

Page 71: ...ar unit there are over 100 commands that can be issued by way of the RS232 or RS485 interface communications interface to control the operation of the modular unit Availability of the RS422 functions depends on having the proper communications board to handle RS422 The standard board handles RS232 and RS485 The description of these commands is given below followed by a summary The commands are sep...

Page 72: ...fault on power up Alternate baud rates can be factory supplied A description of the various commands follows They are separated into the different categories 604 RS232 RS485 COMMANDS BF cr 1 Exit burst mode This command causes the processor to exit the burst mode See the next two commands for a description of the burst mode BN cr 2 Enter the burst mode This command causes the processor to go into ...

Page 73: ...to ten an A will be sent for the exponent For an exponent of eleven a B will be sent If a resident 3D or 3E is present several special codes are used If the 3D or 3E has been turned OFF via RS232 an R will be sent instead of the four digits If it has been shut off due to going over range an S will be sent If it is off due for any other reason an F will be sent BRE cr 4 Set to burst and RS485 with ...

Page 74: ...s the BRE cr command above without switching to those conditions until power is shut off and then is powered up again SRO cr 7 Set the default to RS485 Burst with odd parity for power up only The same as SRE above except odd parity SRC cr 8 Clear the defaults generated by SRE and SRO This allows the default power up condition to return to RS232 COLD CATHODE CAE cr This command changes the mode of ...

Page 75: ... Had the SE cr command been issued or if any changes been made to set point settings while having been shut down via the serial port then this cannot be reset by turning the power off and back on CFO cr This command is the same as the CFE cr command except that it applies to the C C gauge with an odd station number CNE cr This command turns on the gauge with an even station number Note It will not...

Page 76: ...This command causes a 50 millisecond time out to be inserted when receiving a command string If there is a delay of 50 milliseconds or more between any two bytes of a command string the received portion of the command will be ignored The input buffer will be reset and ready to receive a new command or RS485 address CT cr 4 Cancel the command input time out See AT cr above EE cr 5 Enable the echoin...

Page 77: ...d will be ignored if a parity error occurs in the command PF cr 9 Turn OFF the parity check This command cancels parity check and insertion for type of parity This is the normal default mode for the modular unit PO cr 10 Insert and test for odd parity This is the same as PE above except for odd parity An odd number of 1 bits RD cr 11 Remove RS485 delay This command removes the initial RS485 delay ...

Page 78: ...nges will be in effect the next time that power is applied The response to this command is A cr CONFIGURATION The configuration of the Modular unit i e how many relays and types of sensors that are plugged in and what their assignments are can be determined through the use of several commands AR cr 1 Send the relay configuration The modular unit will respond with the relay configuration in one of ...

Page 79: ...orr capacitance Diaphragm Gauge D 5C 10 Torr Capacitance Diaphragm Gauge E 5E 10 micron Capacitance Diaphragm Gauge F 5F 10 000 Torr Capacitance Diaphragm Gauge or other special option A 0 means that there is no sensor assigned to this station If a hot cathode model 3D or 3E is installed then only five digits or letters will be sent and the hot cathode gauge will always occupy station number five ...

Page 80: ... marked and the command A010 cr is sent Approximately every 8 8 seconds the modular unit would output something like 1 1 23 3U 4 4 50 1U 7 1 10 5T cr BO cr 2 Output data in the burst mode This command causes an uninterrupted dump of the data of all installed sensors The data is stored in RAM so there is no need to wait for any sensors to be measured for a response from this command The normal form...

Page 81: ... sensors That is the response is in exponential form The form is n x xx or yu where n is the station number x xx is the value given to two decimal places followed by either a plus or a minus followed by the exponent power of ten followed by either a U for microns or a T for Torr For example a Model 2A thermocouple at station 2 might respond 2 2 45 2U corresponding to a pressure reading of 245 micr...

Page 82: ...from the front panel or has not been turned on since being powered up S indicates that in either the self mode or in the both mode the maximum range had been exceeded and the gauge shut itself down S indicates that in either the self mode or in the both mode the maximum range had been exceeded and the gauge shut itself down Ux cr 6 Unmark stations This command removes stations from automatically h...

Page 83: ... both displays to display in millibars UP cr Causes both displays to display in Pascals UT cr Causes stations to be displayed in Televac traditional units For example a cold cathode station would be displayed in Torr a thermocouple or convection sensor would be displayed in either Torr or microns depending upon the magnitude of the pressure The response in all three cases is A cr D1E cr 7 Display ...

Page 84: ... pressure of the controlling ON EH cr 2 Go to the SELF mode This takes the hot cathode gauge out of the AUTO mode or out of the OFF mode and allows it to shut itself down by virtue of it reading a pressure above it s normal range This command does not turn the filament on Initially or when the filament shuts down it must be restarted either through the front panel push button or through the RS232 ...

Page 85: ...to 255 Three digits must be sent including lead zeros if any The front panel will flash the de gas time the same as if it were set from the front panel except that while the de gas time is over 99 minutes the display will flash dG E2 cr 10 Observe the 24 volt enable input for filament operation After this command has been issued the filament of either a 3D or 3E will not communications board C2 cr...

Page 86: ...window RL cr 4 Periodically obtain Leak Rate readings This command causes the modular unit to periodically output the leak rate reading The data is in the form of four digits which include any lead zeros followed by a carriage return such as 0015 cr The four digits give the leak rate in microns per hour the same as displayed on the front panel The data is outputted once every second The initial re...

Page 87: ... from control via the communications interface Where n is the relay number being removed from control via the communications interface Control of this relay then reverts to whatever sensor it had been assigned to SAxSy cr 7 Assign a particular relay to a particular sensor This assigns control of relay x to station y The response to this command is A cr If stored this will then be the default stati...

Page 88: ...yyyyu cr 12 Set the ON set point of a particular relay Where x is the relay number and nnnn is the setting See the chart below for ranges of settings for the various sensors SSxFy y n cr 13 Set the OFF set point of a particular relay Where x is the relay number for which it is desired to set the dropout de energize point and y y n is the exponetial setting The response to this command is A cr See ...

Page 89: ...e 080000 Sensor 4 zero out of range 100000 Sensor 5 zero out of range 200000 Sensor 6 zero out of range 400000 Sensor 7 zero out of range 800000 Sensor 8 zero out of range RY cr 5 Send relay status The response to this command is two characters followed by a cr The first character corresponds to relay board 2 PCR2 The second corresponds to relay board 1 PCR1 If either board is not installed a lowe...

Page 90: ...h if TRAD then the display will be in the units that are standard for the particular sensor which will normally be either Torr or Microns C CAL VALUE nnnnn nnnnn is a value that should be between 45000 and 62000 It is a number that is used by the software to calibrate the A D converter to provide a precise relationship between the voltage and the output count This is a variable that can change sli...

Page 91: ...gauges that are assigned odd station numbers The next T C or convection type gauge detected z is assigned to control the H C andC C gauges that are assigned even station numbers J LEAK RATE ON or OFF This shows if Leak Rate testing is in progress K PROC MARGIN nn This indicates how much microprocessor stack space has not been used since power was turned on This is an indication of possible problem...

Page 92: ...utted S RS485 ADDRS n or l This indicates the assigned RS485 address which may be a number or a letter This address is case sensitive T SW Ver n nn This is the installed software version U 24 VOLT ENABLE ON or OFF This indicates whether control of model 3D or 3E gauge filament control has been enabled by the software If so then the filaments cannot be turned on unless the 24 volt signal is availab...

Page 93: ...ON AND DIAPHRAGM GAUGES Zn cr 1 Set the zero for a station This command determines and stores an offset value for zeroing of station n It may be used with thermocouple convection capacitance manometer or diaphragm gauges It should only be used when the pressure at the gauge is known to be less than one tenth of the lowest possible reading of that gauge It can be used with the first eight stations ...

Page 94: ... sensors This command is effective only while in the zeroing mode This allows the sensors to correct for any negative readings by determining an offset that cancels any such negative measurement The offset if generated replaces the offset determined by the Zn command and will remain as the offset until changed either by the Zn command or the ZC clear command This command responds with A cr only if...

Page 95: ...ere adjustment of station 2 Then if stations 3 and 4 have 2A sensors the fifth location would be for the zero of station 3 and the sixth location would be for the zero of station 4 since the 2A sensor does not allow for an atmosphere adjustment In the above example if there were no other sensors installed that can be zeroed then there would only be the six values displayed They would be followed b...

Page 96: ...ed was too large N Number not in range or not a number O Input buffer overloaded R Command not recognized S Wrong sensor type COMMAND RESPONSE BURST MODE BF cr Exit Burst Mode can be stored BN cr Go to Burst Mode can be stored BO cr Output Data in Burst Mode BRE cr Burst mode RS485 every parity BRO cr Burst mode RS485 odd parity SRE cr Like BRE except default only SRO cr Like BRO except default on...

Page 97: ...ntries CONFIGURATION AR cr Outputs relay configuration SC cr Send all stations configuration Sx cr Returns processor type installed in Station x SV cr Send software version DATA OUTPUT Axxx cr Output each marked station value every xxx cycles where xxx is any value between 1 and 255 BO cr Output data in burst mode See above CA cr Cancel the automatic output Mx cr Mark station x where x is any numb...

Page 98: ...D or 3E Degas OFF GN cr 3D or 3E Degas ON GNxxx cr 3D or 3E Degas ON for xxx minutes 255 max SWx cr Make sensor switch setting equal x logical SD cr Send HC drive I em SS cr Stop HC drive I em FM cr Use of Soft 1 37 w older units Manual filament selection FR cr Use of Soft 1 37 w units with front panel filament select RS cr Read switch position Response 0 through 7 R3Dx cr Set full scale linear re...

Page 99: ...ogarithmic R7BM cr Recorder output of 7Bs to be multi linear R7BN cr Recorder output of 7Bs to be linear R7BT cr Recorder output of 7Bs to be B7B2 traditional R7Ex cr Recorder output of 7Es to be linear to 10 x Torr where 7 x 2 and 10V is at 10 x Torr R7FM cr Recorder output of 7Fs to be multi linear 1V Decade and 9V is at 10 2 Torr R7FL cr Recorder output of 7Fs to be logarithmic 9V is at 10 2 To...

Page 100: ... COMMAND SET Special commands are used for addressing individual units on the RS485 bus and for sending broadcast commands RS485 is always used with echoes blanked and is usually in the burst mode The front panel is also disabled except that a local operator may be allowed to change the stations that are shown in the two displays Addressing a unit enables the unit to respond to the command that im...

Page 101: ... to address that unit When a unit receives it s code the serial input port is enabled to receive the command that follows The commands are then identical to those given for RS232 operation After reception of the command the input buffer is reset to receive another address or broadcast command An alternate method is available for software versions 1 36 to 2 13 This method is to precede an address w...

Page 102: ...29 t Q GF Degas OFF 14 P 30 w R GN Degas ON 15 S 31 x T PCA Control all relays 16 U W PUA Control no relays X BN BE FA FI a DH Do Diagnostics hold results NOTE Codes are case sensitive RS232 COMMANDS USED TO IMPLEMENT RS485 G2 cr Go to RS422 mode The command is normally issued through the RS232 port RS422 requires use of the RS485 full duplex module NOT YET AVAILABLE G4 cr Go to the RS485 mode Thi...

Page 103: ...code letter since the input buffer of the MM200 will ignore and not store the characters themselves When used this prefix is followed by the same unit address that is given in the RS485 protocol The address is followed by any of the normal valid RS232 commands This is now done without parity or word length changes BI1 cr is used to insert a different broadcast command prefix The same table given a...

Page 104: ...Table 6 1 PIN FUNCTION 2 Tx from MM200 3 Rx to MM200 4 DTR to MM200 5 GROUND 6 DSR TO MM200 7 DO NOT USE 8 DO NOT USE 1 RS485 Same as B 9 RS485 Same as A 5 1 o o o o o o o o o 9 6 For PCB 3900G105 See copper side Not connected for F revision and lower RS485 The MM200 uses a 3 pin connector for the RS485 HARDWARE hardware interface The pinouts are in accordance with Figure and table One possible wa...

Page 105: ... detailed description The commands are separated into groups where in each group the commands relate to a common subject Note that in the following discussion where quotation marks are used they are neither a part of command nor of the response Also the symbol cr refers to the sending of a carriage return either in the command or in the response All commands will produce a response so that the hos...

Page 106: ... properly recognized Whenever any command is not properly recognized the Modular unit will respond with a question mark followed by a carriage return All other command responses end with a carriage return Commands which are not stored using the SE cr command will be lost when powder is interrupted and unit is repowered COMMAND RESPONSE B MODE BF cr Exit B Mode can be stored BN cr Go to B Mode can ...

Page 107: ...el functions unless inhibited by the rear panel switch FI cr Inhibits certain front panel functions UM cr Causes Stations to be displayed in millibars UP cr Causes stations to be displayed in Pascals UT cr Causes stations to display in traditional units GAS GFx cr Clears Station x from gas operation GNx cr Sets Station x for gas Argon operation HOT CATHODE AH cr Auto Mode For Hot Cathode Gauges EH...

Page 108: ... be extended log R7BL cr 0 10V of 7Bs to be logarithmic R7BM cr 0 10V of 7Bs to be multi linear R7BN cr 0 10V of 7bs to be linear R7EL cr 0 10V of 7Es to be logarithmic R7EM cr 0 10V of 7Es to be multi linear SET POINTS PCA cr Control all relays via RS232 PCn cr Control relay n via RS232 PFn cr Turn off controlled relay n via RS232 PNn cr Turn on controlled relay n via RS232 PUA cr Remove all rela...

Page 109: ...c com web site www televac com MM 200_im REV M Page 108 of 160 TELEVAC HARDWARE and the RS485 hardware interface The pinouts are in accordance with Fig 6 1 and Table 6 1 PIN FUNCTION 2 Tx from MM200 3 Rx to MM200 4 DTR to MM200 5 GROUND 6 DSR TO MM200 7 DO NOT USE 8 DO NOT USE 5 1 o o o o o o o o o 9 6 ...

Page 110: ...ccommodated If no relay modules are installed then a full complement of ten sensors can be accommodated This command can be stored so that at power up the modular unit will be in the B mode Storing the BF command will cancel the storing of this command BO cr 3 Output data in the B mode This command causes an uninterrupted dump of the data of all installed sensors The data is stored in RAM so there...

Page 111: ...ce permitting COLD CATHODE AC cr 1 Go to the automatic mode This causes the cold cathode to be controlled by a thermocouple or convection type gauge If the cold cathode gauge has an odd station number it will be controlled by the thermocouple or convection type gauge with the lowest station number This is the default setting when power is applied If the cold cathode gauge has an even station numbe...

Page 112: ...haracters have even parity if not the modular unit sends an exclamation mark before the next character that is to be sent The only exception to this is in the BN mode after a BO command the carriage return mark is sent at the begin ning of the data stream Note that even when there is a parity error detected the modular unit responds to all commands in the normal manner except for the inclusion of ...

Page 113: ...e use of several commands AR cr 1 Send the relay configuration The modular unit will respond with the relay configuration in one of these formats RY 0 0 RY 1 0 RY 0 2 or RY 1 2 depending on which relay modules are inserted Each relay module contains four relays These are referred to as PCR1 PCR2 etc The first module if installed provides PCR1 through PCR4 A second module if installed provides PCR5...

Page 114: ...s the modular unit would output something like 1 1 23 3U 4 4 50 1U 7 1 10 5T cr CA cr 2 Cancel automatic output of data This command causes the automatic output of data to cease It does not unmark stations they stay marked and if the Annn cr command is again given the output of data from those stations that were marked will resume The response to this command is A cr Mx cr 3 Mark the stations from...

Page 115: ...ssignments from the front panel This has the same effect as the inhibit switch on the back panel of the modular unit The response is A cr FE cr 4 Enable a local operator to make the changes inhibited by the previous command and the next command Except that the local operator will not be able to make these changes if the rear panel inhibit switch is activated The response is A cr FI cr 5 Inhibit ad...

Page 116: ...he lowest station number By control is meant should the pressure of the controlling sensor exceed twenty microns the hot cathode filament will shut off It will come back on when the pressure of the controlling sensor goes below 20 microns EH cr 2 Go to the SHUT DOWN mode This takes the hot cathode gauge out of the AUTO mode or out of the OFF mode and allows it to shut itself down by virtue of it r...

Page 117: ... the front panel push button would do if pressed while the leak rate test is in progress The response to this command is A cr LR cr 3 Initiate Leak Rate testing The results are the same as pressing the front panel leak rate push button Whenever this command is issued the leak rate test starts at time zero This command can be used for resetting the test time to zero if the test is already in progre...

Page 118: ...trol of one relay to the comm interface Where n is the relay number The same as above except the control of just one relay is passed PFn cr 3 De energize a particular relay via the comm interface Where n is the relay number The relay must first be assigned to be controlled via the comm interface by either the PCA command or the PCn command PNn cr 4 Energize a particular relay via the comm interfac...

Page 119: ...relay x The response to this command is a four digit number followed by a cr The format is the same as for the SSxFyyyyu command below SSxFyyyyu cr 11 Set the OFF set point of a particular relay Where x is the relay number for which it is desired to set the dropout de energize point and nnnn is the setting The response to this command is A cr See the chart below next page for ranges of settings fo...

Page 120: ...erforming the following functions 1 Determine the configuration of the Modular unit i e what relays and types of sensors are plugged in and what their assignments are This can be done through the use of several commands A Command AR cr will respond with the relay configuration in one of the formats RY 0 0 RY 1 0 RY 0 2 or RY 1 2 corresponding to whether no relays relay module one relay module two ...

Page 121: ...tations see below shall have their readings output at the end of nnn loops of measuring all the stations that are installed The time between outputs is approximately 0 11 nnn the number of stations that are installed in the modular unit no matter how many stations are having their data outputted The data output is in the SAME format as for the Rx cr command above except that for a given set of out...

Page 122: ... is an A followed by a cr 9 Disable the ability of a local operator to operate the SETUP pushbutton the TEST pushbutton the GAS pushbutton or units selection from the front panel This command is used when total automatic control is desired with no interference in RS232 operation caused by operation of front panel pushbuttons This command is FA cr The response is an A followed by a cr 10 Disable th...

Page 123: ...ush button had been pressed that is the right hand display shows the leak rate values The response to this command is an A to acknowledge receipt followed by a cr Leak rate tests always use station 1 as the sensor 15 Periodically obtain Leak Rate readings This command RL cr causes the modular unit to periodically output the leak rate reading The data is in the form of four digits which include any...

Page 124: ...for this function UM cr causes both displays to display in millibars UP cr causes both displays to display in Pascals UT cr causes stations to be displayed in Televac traditional units For example a cold cathode station would be displayed in Torr a thermocouple unit would be displayed in either Torr or microns depending upon the magnitude of the pressure 21 Fetch the ON setting of set point x This...

Page 125: ...hanges according to the following table AA 300 baud BB 600 CC 1200 DD 2400 EE 4800 FF 9600 The modular unit responds with an A and a cr prior to changing it s baud rate Any further communications must be performed at the new baud rate See also 26 27 Store all default values This command is SE cr When the baud rate is changed by the command given above this command should be given at the new baud r...

Page 126: ...ion x for gas operation GFx cr Clears Station x from gas operation LR cr Starts Leak Rate test Time 0 Mx cr Mark station x where x is any number between 1 and 9 or A for Station 10 RL cr Read Leak Rate value periodically LR nnnn where nnnn is the leak rate in microns hr Rx cr One shot reading of station x SB11 cr Set baud rate See Table SE cr Store entries Sx cr Returns processor type installed in...

Page 127: ...ange UNITS of RS232 output data or UNITS of 0 10V output data Low and high range as noted below SENSOR UNITS RANGE RS232 SETTING READING 2A MICRONS 1 1000 0001L to 0999L TORR 1 0 20 0 0010H to 0200H 4A MICRONS 1 1000 0001L to 0999L TORR 1 1000 0001H to 0999H 1E TORR 1 1000 0001L to 0999L 7B TORR 1 0E 6 to 2 0E 3 0001H to 2000H 7E TORR 1 0E 8 to 9 9E 6 0001L to 0999L TORR 1 0E 5 to 9 9E 3 0010H to ...

Page 128: ...200 4 DTR to MM200 5 GROUND 6 DSR TO MM200 7 DO NOT USE 8 DO NOT USE 5 1 o o o o o o o o o 9 6 SPECIAL COMMANDS The following commands are for factory and servicing use and are not for publication They require use of the password CDxx yy cr Change RAM byte xxH to yyH CN cr Change from cal to normal unit can be stored CP cr Clear password CU cr Change from normal to cal unit can be stored DF cr Tur...

Page 129: ...e installed on the vacuum chamber is bypassed It does give an electrical check of the vacuum measuring instrument and cable EQUIPMENT REQUIRED In order to use the Field Procedure the following equipment is required A Vacuum Chamber Equipment Each vacuum furnace should be fitted with an instrument with special features 1 A zero adjust or heater adjust calibration potentiometer for each thermocouple...

Page 130: ...tions of the modular MM200 instrument adjust the zero adjust heater adjust potentiometer to bring the reading to 0 0 Set at the point where display switches from 0 0 to 0 0 Replace the installed thermocouple gauge tube with a new gauge tube to be sure that the gauge tube is not degraded by contamination 3 On the cold cathode station of the modular MM200 instrument observe that the readings fall be...

Page 131: ...th special features The MM200 meets these requirements 1 A zero adjust heater adjust calibration potentiometer for the thermocouple gauge s located on the rear panel 2 A 10 3 Torr calibration potentiometer for the cold cathode gauge s located on the rear panel 3 Cold cathode gauge tubes of the latest improved design Retrofit existing tubes to the dual magnet configuration or replace if necessary B...

Page 132: ...alve Slowly bleed dry nitrogen into the chamber until a pressure of 1 micron is observed on the master thermocouple gauge Observe the gauges for a minimum of 2 minutes Leak up should be minimal before proceeding If not determine the source of the leak and correct it 5 Check the thermocouple readings at 1 10 150 microns Under the conditions of field test at the vacuum chamber the following toleranc...

Page 133: ...ACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 132 of 160 TELEVAC Fig 7 1 Vacuum Chamber T for Installing Gauge Tubes Fig 7 2 Adapter ...

Page 134: ...TRUMENTS FOR ALTERNATE GASSES All thermal conductivity gauges such as thermocouple gauges are gas dependent That is their response depends on the gas being measured These gauges are calibrated for nitrogen or air Their response to other gasses is shown in Fig 7 3 Fig 7 3 Actual Pressure vs Meter Reading ACTUAL PRESSURE VS METER READING FOR TYPE 2A 2C THERMOCOUPLE GAUGES ACTUAL PRESSURE McCLEOD GAU...

Page 135: ...creasing linearly to 50 relative humidity at 40 C Overvoltage category category ll of lEC 60364 4 443 Rated pollution degree 2 Voltage 115 230 VAC 10 Frequency 50 60 Hz Input Current Max 2A 115V 1A 230V Input Power Max 230W Calibration medium Dry Air or Nitrogen Oper temp tube 0 to 65 C Setpoint Relays Assignable to any station 5A 120 VAC or dry circuit Output Analog 0 10 VDC Weight instrument 5 l...

Page 136: ...hermocouple gauges are installed from left to right Finally cold cathode gauges from right to left Blank panels are used if there is less than a full complement of modules In the analog versions the types of modules are limited by the markings on the meter s installed whereas in the digital gauge no limitations exist AVAILABLE MODULES Can be placed in any of slots 1 through 6 TC THERMOCOUPLE CC CO...

Page 137: ...2 SLOT 1 S 4 relay module 5 amp 120VAC SLOT 2 2A Dual thermocouple module 2 stations SLOT 3 2A Dual thermocouple module 2 stations SLOT 4 2A Dual thermocouple module 2 stations SLOT 5 B1 Blank panel SLOT 6 7B Single cold cathode module 1 station SLOT 7 R RS232 RS485 module no stations NOTES 1 SLOT 0 contains the power supply module 2 SLOT 7 has a blank panel for ANALOG gauges and can have an RS232...

Page 138: ... Communications 700 Calibration 800 Specifications Next are some possible problems and the suggested solutions P All displays are blank S Check power switch power source and power cable P Ion gauge reads OFF and controlling TC reads 20 0 Torr and is flashing S Normal Pressure is above the ion on setting of 10 microns and the controlling chamber TC is above 20 0 Torr P Ion gauge reads OFF and Ion o...

Page 139: ...s in Section 308 SETPOINT RELAY MODULE A setpoint process control relay module is shown in Fig 9 1a The assignment of identification numbers for this module usually done at the factory is accomplished by placing jumpers on the appropriate pins in the SETPOINT ID section of the module Note that two 2 sets of jumpers are required The SIGNAL SOURCE section is used for the MM200 and jumpers should be ...

Page 140: ...NT MANUAL VACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 139 of 160 TELEVAC Fig 9 1b Details of the Setpoint Relay Module ...

Page 141: ...installed Note that there is a cutout in the digital interface module to clear the transformer of the cold cathode module These two modules must be installed at the same time RSS485 allows a string of MM200s to be linked It is important to terminate the last unit on the string This is done by placing a jumper across J6 TERM in the lower left hand side of the board This termination is designed for ...

Page 142: ...s module is typical of all modules The assignment of station identification numbers on a thermocouple module is accomplished by placing jumpers across the appropriate pins in the SIGNAL ID and the REC OUT ID sections The upper thermocouple station has been named station 3 and the lower thermocouple station has been named station 4 Also two 2 jumpers are placed in the MP positions of the ANALOG MP ...

Page 143: ...m REV M Page 142 of 160 TELEVAC Finally there are jumpers placed in the 10V position of J3 This provides a 0 to 10VDC analog 0 10V output The alternate is a 0 to 10 mV output This not recommended unless your recorder cannot handle 10V Labels are placed on the rear panel to show the station names assigned Fig 9 3b Thermocouple Module Details ...

Page 144: ...ule is typical of all modules The assignment of station identification numbers on a convection module is accomplished by placing jumpers across the appropriate pins in the SIGNAL ID and the REC OUT ID sections The upper convection station has been named station 1 and the lower convection station has been named station 2 Also two 2 jumpers are placed in the MP positions of the ANALOG MP section of ...

Page 145: ...Page 144 of 160 TELEVAC Finally there are jumpers placed in the 10V position of J3 This provides a 0 to 10VDC analog 0 10V output The alternate is a 0 to 10 mV output This is not recommended unless your recorder cannot handle 10V Labels are placed on the rear panel to show the station names assigned Fig 9 3d Dual 4A Convection Gauge Module Details ...

Page 146: ...n This must agree with the SIGNAL ID A third jumper in the ION ON SOURCE section of the module selects the station used as a reference to turn on the cold cathode power for the MM200 select the MP location A fourth jumper is placed in the JUMPER 4 ION ON section Select MPI if only 1 cold cathode is being used or if all cold cathodes are to be turned on using the same reference Select MPI 2 if the ...

Page 147: ...n This must agree with the SIGNAL ID A third jumper in the ION ON SOURCE section of the module selects the station used as a reference to turn on the cold cathode power for the MM200 select the MP location A fourth jumper is placed in the JUMPER 4 ION ON section Select MPI if only 1 cold cathode is being used or if all cold cathodes are to be turned on using the same reference Select MPI 2 if the ...

Page 148: ... TELEVAC Fig 9 4b 7F Cold Cathode Gauge Module Additional jumpers are required as shown below Finally there is a switch S1 which must be placed in the MP position Board Type Jumpers Factory set 2 6200 227 7B2 J1 in 7B MP J3 in MP 2 6200 223 7E J1 in 7E J3 in MP 2 6200 245 or 285 7F UHVJ5 in MP J8 J9 as noted J11 Select for type cable Combined 2 6200 223 227 board ...

Page 149: ...ween the raw signal not linearized from the selected sensor and the potentiometer setting The controlling sensor would normally be any thermocouple or convection type sensor A hot cathode sensor should never be chosen for the controlling sensor 2 MPI can be selected with the jumper in which case the lowest station number thermocouple or convection type gauge controls the on off operation of the co...

Page 150: ...s The assignment of station identification numbers on a diaphragm module is accomplished by placing jumpers across the appropriate pins in the SIGNAL ID and the REC OUT ID sections The upper diaphragm station has been named station 3 and the lower thermocouple station has been named station 4 as an example Do not duplicate station assignments with other modules Also two 2 jumpers are placed in the...

Page 151: ...im REV M Page 150 of 160 TELEVAC Finally there are jumpers placed in the 10V position of J3 This provides a 0 to 10VDC analog 0 10V output The alternate is a 0 to 10 mV output This not recommended unless your recorder cannot handle 10V Labels are placed on the rear panel to show the station names assigned Fig 9 5b Diaphragm Module Details ...

Page 152: ...is shown in Fig 9 6a and 9 6b This module is typical of all modules The assignment of station identification numbers on a CDG module is accomplished by placing jumpers across the appropriate pins in the SIGNAL ID and the REC OUT ID sections The upper CDG station has been named station 3 and the lower thermocouple station has been named station 4 as an example Do not duplicate station assignments w...

Page 153: ... M Page 152 of 160 TELEVAC Finally there are jumpers placed in the 10V position of J3 This provides a 0 to 10VDC analog 0 10V output The alternate is a 0 to 10 mV output This not recommended unless your recorder cannot handle 10V Labels are placed on the rear panel to show the station names assigned Fig 9 6b Capacitance Diaphragm Module Details ...

Page 154: ...500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 153 of 160 TELEVAC 3D HOT CATHODE MODULE Fig 9 7a 3D Hot Cathode Module Details WHEN MATING J1A CONNECTOR V GROVE TOWARD THE TRANSFORMER FLAT SURFACE TOWARD THE BACK PANEL ...

Page 155: ...500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 154 of 160 TELEVAC 3E HOT CATHODE MODULE Fig 9 7b 3E Hot Cathode Module Details WHEN MATING J1A CONNECTOR V GROVE TOWARD THE TRANSFORMER FLAT SURFACE TOWARD THE BACK PANEL ...

Page 156: ...INSTRUMENT MANUAL VACUUM GAUGE MODEL MM200 160Phone 215 947 2500 fax 215 947 7464 e mail sales televac com web site www televac com MM 200_im REV M Page 155 of 160 TELEVAC 903 DRAWINGS ...

Page 157: ...should be round and not flattened out 5 Blast the entire anode assembly at 30 psi using glass beads being careful not to damage the glass feedthrough If any rainbow effect is noticed a possible crack in the feedthrough my exist and the anode assembly may need to be replaced P N2 6200 37 6 Blast the body with glass beads concentrating on the pole piece and the o ring areas Clean the remaining inter...

Page 158: ...televac com MM 200_im REV M Page 157 of 160 TELEVAC cable Suppressor Order 1 6400 064 905 SUPPRESOR INSTALLATION FOR NOISY ENVIROMENTS For noisy environments add suppressor to cable as shown One suppressor is required for each cable 3D 3E module only use 1 6400 063 6 to 12 in Vacuum instrument To gauge at vacuum chamber ...

Page 159: ...urned on the display will read CAL 1 XX if it is in the CALIBRATION MODE e g CAL 1 29 Otherwise it will read SOFT 1 XX DIAPHRAGM GAUGES The accuracy of the 1E and the 1F diaphragm gauges relies on setting the calibration at both the zero point and at full scale for the sensor used When calibrated at zero using the ZERO potentiometer the reference pressure must be two decades or more below the lowe...

Page 160: ...EE WORK AREA AND USE GROUNDING STRAPS 2 REMOVE 3 SCREWS 4 AND 3 SCREWS 5 FROM FRONT PANEL 3 PRY FRONT PANEL ASSEMBLY LOOSE AND PULL OUT 4 LOCATE EXISTING EPROM ON LOGIC BOARD 5 REMOVE MOTHERBOARD ONLY IF REQUIRED TO GET ACCESS TO EPROM 6 REMOVE EPROM NOTE ORIENTATION OF KEYWAY TOWARD OUTSIDE OF PCB 7 INSERT NEW EPROM BEING CAREFUL THAT ALL PINS ARE ALLIGNED WITH THE SOCKET AND THE KEYWAY FACES OUT...

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