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Doc. No. ZQ-OM01301-A
- 36 -
11.2
Flow characteristics of the vacuum pump system (representative
values)
ZQ000A
11.3
Break Flow Rate Characteristics (representative value)
-100
-80
-60
-40
-20
0
0
5
10
15
20
V
ac
uu
m
pr
es
su
re
[k
P
a]
Suction flow [L/min (AMR) ]
The flow rate at the final adsorbing part can vary
depending on the piping conditions to the
vacuum port. (This graph shows values when
the V port with ø 6 is used.)
ZQ05
□
A
(Ejector system) Common PD specifications
ZQ05
□
A (Ejector system) Individual PD
specifications
ZQ000
□
A (Pump System) Common PD specifications
ZQ000
□
A (Pump System)
Individual PD specifications
Rele
a
se
fl
o
w
[L
/m
in
(
A
NR
) ]
Rele
a
se
fl
o
w
[L
/m
in
(
A
NR
) ]
Rele
a
se
fl
o
w
[L
/m
in
(
A
NR
) ]
Rele
a
se
fl
o
w
[L
/m
in
(
A
NR
) ]
Number of needle rotations [rotation]
Number of needle rotations [rotation]
Number of needle rotations [rotation]
Number of needle rotations [rotation]