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Doc. No. ZQ-OM01301-A
- 14 -
3.4 Piping
3.4.1 Port size
The port sizes and operating pressure ranges are listed below.
For the manifold type, ports are used in common for the end plate.
When supplying from one side, plug the port not in use.
Single unit type
Manifold type
Port
Application
Port size
Operating pressure
range
Ejector
System
Pump System
Air pressure supply
(P) port
Compressed air supply
for operating ejector
M5
、
ø4
、
ø6
-
0.3 to 0.5[MPa]
Air pressure supply
(PV) port
Vacuum source
(Vacuum pump)
-
M5
、
ø4
、
ø6
0 to -101.3[kPa]
Pilot pressure
supply (PS) port
Compressed air supply
for pilot pressure
-
M5
、
ø4
、
ø6
0.3 to 0.5[MPa]
Pilot pressure
exhaust (PE) port
Exhaust during valve
operation
M3
Released to the
atmosphere
vacuum (V) port
Adsorption equipment
including pad
M5
、
ø3.2
、
ø4
、
ø6
-
Port
Application
Port size
Operating pressure
range
Ejector
System
Pump System
Air pressure supply
(P) port
Compressed air
supply for operating
ejector
ø8
-
0.3 to 0.5[MPa]
Air pressure supply
(PV) port
Vacuum source
(Vacuum pump)
-
ø8
0 to -101.3[kPa]
Pilot pressure
supply (PS) port
Compressed air
supply for pilot
pressure
-
ø8
0.3 to 0.5[MPa]
Vacuum release
pressure
Supply (PD) port
Compressed air
supply for individual
setting of release
pressure
ø4
0 to 0.5[MPa]
Note 1)
Pilot pressure
exhaust (PE) port
Exhaust during valve
operation
ø4
Released to the
atmosphere
vacuum (V) port
Adsorption equipment
including pad
M5, ø3.2, ø4, ø6
-
Note 1) The pressure must be the PS port pressure or less.