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Doc. No. ZQ-OM01301-A
- 33 -
10
. Pneumatic Circuit
Vacuum ejector
Single unit type
ZQ
□
1UA-
□
5L
□
-
□□□
-
□□
Vacuum pump system
Single unit type
ZQ000UA-
□
5L
□
-
□□□
-
□□
Vacuum ejector
Manifold type (without the PD-port)
ZZQ1
□
A-BSB
*ZQ
□
3MA-K15L-
□□□
-
□
*ZQ
□
3MA-K25L-
□□□
K-
□
*ZQ
□
3MA-J15L-F-
□
ZQ
□
□
1UA- K1 5L-
□□
-
□□
EA
EB
FA
FB
K2
F
ZQ000UA- K1 5L-
□□
-
EA
EB
FA
FB
K2
□□
EC
EE
FC
FE
F
K2
K2
*ZQ
□
□
3MA- K1 5L-
□□
-
EA
EB
FA
FB
*ZQ
□
□
3MA- K2 5L-
□□
K -
EC
EE
FC
FE
*ZQ
□□
3MA- J1 5L- F -
□
□□
EC
EE
FC
FE
ZQ000UA- J1 5L-
□□
-
□□
EA
EB
FA
FB
ZQ
□
□
1UA- J1 5L-
□□
-
□□
EA
EB
FA
FB
ZQ
□
□
1UA- K1 5L-
□□
-
□□
VA
VB