Doc. No. ZQ-OM01301-A
- 35 -
11. Exhaust Characteristics, Flow Characteristics, Vacuum Pump Flow
Characteristics, and Vacuum Release Flow Rate Characteristics
11.1 Vacuum ejector exhaust characteristics / Flow characteristics (representative values)
ZQ05
□
A
ZQ07
□
A
ZQ10
□
A
0
5
10
15
20
25
30
-100
-80
-60
-40
-20
0
0.2
0.3
0.4
0.5
-100
-80
-60
-40
-20
0
0
1
2
3
4
5
6
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
Supply pressure[MPa]
Suction flow rate [L/min (AMR) ]
S
uctio
n f
lo
w r
ate
[L
/m
in
(
A
M
R)
]
A
ir co
nsu
m
pti
on
[L
/m
in
(
A
M
R)
]
Exhaust Characteristics
Flow Rate Characteristics
Supply pressure
:
0.35MPa
Vacuum pressure
Suction flow rate
Air consumption
0
5
10
15
20
25
30
35
40
-100
-80
-60
-40
-20
0
0.2
0.3
0.4
0.5
-100
-80
-60
-40
-20
0
0
2
4
6
8
10
12
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
Supply pressure[MPa]
Suction flow rate [L/min (AMR) ]
S
u
cti
o
n
flow
r
a
te
[
L
/m
in
(
A
M
R)
]
A
ir
co
nsu
m
pt
io
n
[L/
m
in (
A
M
R
) ]
Exhaust Characteristics
Flow Rate Characteristics
Supply pressure
:
0.43MPa
Vacuum pressure
Suction flow rate
Air consumption
0
10
20
30
40
50
60
70
-100
-80
-60
-40
-20
0
0.2
0.3
0.4
0.5
-100
-80
-60
-40
-20
0
0
5
10
15
20
25
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
V
a
cu
u
m
p
re
ssu
re
[
kP
a
]
Supply pressure [MPa]
Suction flow rate [L/min (AMR) ]
S
u
cti
o
n
flow
r
a
te
[
L
/m
in
(
A
M
R)
]
A
ir co
nsu
m
pti
on
[L/min (AMR) ]
Exhaust Characteristics
Flow Rate Characteristics
Supply pressure
:
0.43MPa
Vacuum pressure
Suction flow rate
Air consumption
How to read flow characteristics
The flow characteristics curve shows the relationship between the vacuum pressure and the suction flow
of the ejector. It shows that the vacuum pressure changes when the suction flow changes. In the graph on
the left, Pmax means the maximum vacuum pressure and Qmax means the maximum suction flow. The
value shown in this graph is what is shown in the catalog as the specifications. The changes in vacuum
pressure are explained as follows:
(1) When the suction port of the ejector is closed and sealed, the suction flow will be 0 and the vacuum
pressure will reach its maximum (Pmax).
(2) When the suction port is opened, air will flow. If there is leakage, the suction flow will increase, but the
vacuum pressure will decrease. (State at P1 and Q1)
(3) If the suction port then fully opened, the suction flow will reach its maximum (Qmax), but the vacuum
pressure will become almost 0 (atmospheric pressure). Vacuum pressure will not increase much if an
attempt is made to adsorb a breathable workpiece or a workpiece with a large amount of leakage.
Attention should be paid in such cases.
V
a
cu
u
m
p
re
ssu
re
Suction flow rate