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5 Configuration and Operating Principle of the ICPE-9000
5-21
5.16 Purpose and Operating Principles of Safety Devices
The ICPE-9000 incorporates the following safety devices: a temperature fuse in the plasma stand, a
plasma stand door switch, a coolant flow switch, a temperature fuse in the RF power supply, an argon
gas pressure switch, a photoelectric switch, and a CCD condensation sensor. See "7.2 Checking
Operation of Safety Devices" for details on the procedures used to check the operation of safety devices.
WARNING
Risk of Electric Shock or Burn Injury
Do NOT use the equipment with the safety devices disabled. Doing so may result in
electric shock or burn injury.
(1) Argon Gas Pressure Sensor
Monitors the argon gas pressure. If the pressure drops to 300 kPa or less, a safety circuit operates
and interrupts RF output.
(2) Plasma Stand Door Switch
Ensures that RF output is not applied to the coil when performing maintenance checks inside the
plasma stand. If the plasma stand door is opened, a safety circuit operates and interrupts RF output.
(3) Coolant Flow Switch
Monitors the coolant. If no coolant is flowing, a safety circuit operates and interrupts RF output to
prevent burning of the RF coil and overheating of the cooling jacket.
(4) Temperature Fuse in RF Power Supply
Monitors the power amplifier's DC power supply unit in the RF power supply. If the radiator
temperature of any part increases to 60
°
C or higher, a safety circuit operates and interrupts RF
output.
(5) Temperature Fuse in Plasma Stand
Monitors the temperature inside the plasma stand. If the temperature inside the plasma stand
increases to 60
°
C or higher, a safety circuit operates and interrupts RF output.
(6) Photoelectric
Switch
Detects whether or not the plasma is ignited. If the plasma is extinguished, a safety circuit operates
and interrupts RF output.
(7) Spectrometer Temperature Switch
Monitors the temperature of the spectrometer's temperature-controlled bath. If the temperature of the
temperature-controlled bath reaches 60
°
C, a buzzer sounds and the power supply to the heater turns
OFF.
(8) CCD Condensation Sensor
Summary of Contents for ICPE-9000
Page 2: ......
Page 6: ...iv...
Page 14: ...xii 1 3 2 Warning Labels...
Page 16: ...xiv...
Page 20: ...xviii...
Page 26: ...1 Introduction 1 2...
Page 64: ...5 Configuration and Operating Principle of the ICPE 9000 5 26...
Page 74: ...7 Operation 7 6...
Page 106: ...8 Maintenance 8 32...
Page 114: ...9 Maintenance Parts and Consumable Items 9 8...