Shimadzu ICPE-9000, Instruction Manual

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5 Configuration and Operating Principle of the ICPE-9000
5-8
5.10 Cooling System
The cooling system consists of the two systems shown below.
When the plasma is ignited, the valve opens automatically and coolant flows. The flow of coolant is
monitored with the flow switch. If it detects that coolant is not flowing, the plasma is not ignited . If the
plasma is already ignited, it is automatically extinguished.
Mains water /
Cooling water circulation
system
RF coil
Outlet
Cooling jacket
Coolant circulation
system
(option)
CCD
Mains water
Coolant circulation
system
5.11 Argon Gas System
The argon gas passes through an in-line filter before entering the ICPE-9000.
The gas pressure at the ICPE-9000 inlet (argon gas inlet shown in "Fig. 5-4") is set in the range 450±10
kPa. If the pressure is less than 300 kPa, the pressure sensor detects this and automatically extinguishes
the plasma.
NOTE
While the carrier gas is flowing, do NOT perform any operation that will cause the
source pressure of the argon gas to drop below 100 kPa (such as replacing the
argon gas cylinder).