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9 Maintenance Parts and Consumable Items
9-2
P/N Part
name
Unit Notes
035-57503-11 UNION, TIGHTENING, B-400-61
Gas piping part
Ar gas inlet
260-13500-04 HOSE CONNECTOR,
AMC-04 B409
Water piping part
Coolant inlet /outlet
035-65348-04 TEE, UNION, UT4N6X4
Water piping part
Flow switch part
016-35757-02 TUBE, N2-4-6X4, RED
Water piping part
Coil/cooling jacket outlet (*1)
016-35757-04 TUBE, N2-4-6X4, YELLOW
Water piping part
Coli/cooling jacket inlet (*1)
018-15021-03 NBR FOAM TUBE, ST9X10
Water piping part
Thermally insulator tube for
coolant (2m unit)
035-65505-10 HALF UNION, C4N6X4-PT1/8
Water piping part
CCD/cooling jacket main
body side
CCD coolant inlet/outlet
Cooling jacket/coil coolant
outlet
035-65506-10 HALF UNION, C4N6X4-PT1/4
Water piping part
Cooling jacket coupler side
Cooling jacket /coil
Coolant inlet
016-35757
TUBE, N2-4-6X4, BLACK
Water piping part
Coil/cooling jacket piping
072-60304
CABLE TIE, TY-28M
For securing piping In controller unit
072-60303
CABLE TIE, TY-25M
For securing
thermally insulated
tube
In controller unit
211-86100-91 GAS CONTROL ASSY
Gas controller
Gas controller with PCB
211-84516-91 PCB, GASCON ASSY
Gas controller
Gas controller PCB
016-46027-12 POLYURETHANE
TUBE, TIUB05G-X4
Gas controller
For carrier gas (*1)
016-46027-17 POLYURETHANE
TUBE, TIUB05C-X4
Gas controller
For plasma gas (cooling
gas) (*1)
016-46027-22 POLYURETHANE
TUBE, TIUB05YR-X4
Gas controller
For auxiliary gas (*1)
035-60208-08 PLUG, FPL-M5
Gas controller
For inlet assembly
035-60725-50 ELBOW, KQ2L05-U01
Gas controller
Piping connector
035-60726-48 HALF UNION, KQ2H06-U01
Gas controller
Piping connector
035-65028-05 HALF UNION, EC6-M5
Gas controller
For inlet assembly
036-10201
O-RING, 1A P3
Gas controller
For pressure sensor seals
211-86033-91 STOP VALVE ASSY,
CARRIER GAS
Gas controller
For preventing reverse-flow
for nebulizer
211-86034-91 STOP VALVE ASSY,
PURGE GAS 1
Gas controller
For flow of purge gas at
standard flow rate
211-86037-91 STOP VALVE ASSY,
PURGE GAS 2
Gas controller
For flow of purge gas at high
flow rate
211-86038-91 CAPILLARY ASSY, PURGE S
Gas controller
For flow of purge gas at
standard flow rate
211-86038-92 CAPILLARY ASSY, PURGE L
Gas controller
For flow of purge gas at high
flow rate
211-88153-91 VALVE, VSO ASSY 8
Gas controller
Proportional solenoid valve
for carrier gas
Summary of Contents for ICPE-9000
Page 2: ......
Page 6: ...iv...
Page 14: ...xii 1 3 2 Warning Labels...
Page 16: ...xiv...
Page 20: ...xviii...
Page 26: ...1 Introduction 1 2...
Page 64: ...5 Configuration and Operating Principle of the ICPE 9000 5 26...
Page 74: ...7 Operation 7 6...
Page 106: ...8 Maintenance 8 32...
Page 114: ...9 Maintenance Parts and Consumable Items 9 8...