Specifications
48
Materials of component parts exposed to sample gas
Synthetic quartz, SUS316L (EP grinding), fluorine rubber
Allowable sample gas types
Gases which will not corrode gas-contacting parts ma-
terials
Sample gas temperature range
15 to 35ºC
Sample gas pressure range
500 kPa or lower (gauge pressure)
Purge gas pressure range
100 kPa or lower (gauge pressure)
Leak rating
Max. 1 × 10
-4
Pa×L/s (measured according to vacuum
vessel method)
Guaranteed value at time of shipping
Warm-up time
10 minutes
Flow system connectors
SAMPLE
Inlet/outlet (2)
Male VCR, joint diameter 1/4 inch (6.35 mm)
PURGE
Inlet/outlet (2)
Male VCR, joint diameter 1/4 inch (6.35 mm)
Other connectors
DC IN
DC input for the power supply unit KZ-50
ALARM (1, 2)
Alarm output (2), relay contacts
Operating under control by the multi-point interface
The maximum load rating is 30 V DC, 1 A (AC loads
are not allowed).
SERIAL
Serial interface connector (D-SUB, 9-pin)
DATA LINK
Multi-point monitoring system interface
Summary of Contents for KS-93
Page 2: ......
Page 6: ...iv...
Page 10: ...viii...
Page 18: ...xvi...
Page 21: ...3 Outline Block diagram...
Page 43: ...25 Serial Interface...
Page 69: ...51 Specifications Unit mm Dimensional drawings of main unit...
Page 70: ...Specifications 52 Unit mm Dimensional drawings of power supply unit...
Page 71: ......