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18
Measurement
Sample gas flow rate adjustment
Since this unit does not have a flow rate adjustment facility, additional
equipment is required to adjust the sample gas flow. Before starting a
measurement, adjust the sample gas flow rate to the specified range (see page 47).
The pressure in the sample gas line causes the sample gas to pass through the
KS-93 at the rate adjusted with the mass flow controller. For details regarding
the adjustment procedure, please refer to the documentation of the mass flow
controller.
WARNING
Ensure that the pressure of the sample
gas does not exceed 500 kPa (gauge
pressure) at the SAMPLE inlet/outlet
connectors.
Ensure that the pressure of the parge gas
does not exceed 100 kPa (gauge
pressure) at the PERGE inlet/outlet
connectors.
Summary of Contents for KS-93
Page 2: ......
Page 6: ...iv...
Page 10: ...viii...
Page 18: ...xvi...
Page 21: ...3 Outline Block diagram...
Page 43: ...25 Serial Interface...
Page 69: ...51 Specifications Unit mm Dimensional drawings of main unit...
Page 70: ...Specifications 52 Unit mm Dimensional drawings of power supply unit...
Page 71: ......