© 2007–2012 Rigaku Automation, Inc.
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401718 Rev A
Table of Contents
Preface ........................................................................................................................v
CHAPTER 1. INTRODUCTION ........................................................................................1
1.1.
Phoenix HT System Major Components ......................................................... 2
Phoenix Base System .............................................................................. 2
Enclosure Status Light Indicators ............................................................ 3
Nano-Dispense Controller ...................................................................... 6
Electric Power Hazards ........................................................................... 9
Moving the Phoenix HT System from Cold to Warm Areas ....................... 9
Using the Stop, Start, and Emergency Stop (EMO) Pushbuttons .................... 13
Resetting the System after an Emergency Motor Off (EMO) Shutdown .......... 13
Phoenix HT Software Procedures ................................................................. 15
Chilled Block and Ambient Block Tabs .................................................. 24
Onboard Plates Tab .............................................................................. 25