Phoenix HT User Manual
© 2007–2012 Rigaku Automation, Inc.
iv
401718 Rev A
Daily Detergent Wash Required ................................................................... 28
Replacing the Nano-Tip Valve Harness Assembly ........................................ 30
Removing the Nano-Tip Valve Harness ................................................. 30
Installing the Replacement Nano Valve Harness .................................... 33
Calibrating the Nano Dispenser .................................................................. 35
Options and Spare Parts ............................................................................................39
Facilities Layout and Cabling .....................................................................................40
Revision History ........................................................................................................48
Index ........................................................................................................................49