PRECITEC CHRocodile CLS0.2 Operation Manual Download Page 49

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5.2.8

SODX Command

Short description:

Select Output Data (extended)
SODX

directly

selects

the

data

words

that

will

included

the

output

specifying

their

indices.

For example SODX 83, 16640, 16641 will output the sample counter, the distance and the intensity.

Command syntax:

$SODX [A0] [A1]…[AN]

[Ax] is optional parameters

Signal ID's scheme

Bit:

Global
Exposure
Information

Global Exposure Signal ID's

Peak Signal

Statistics=0

Measuring

mode

Peak

Number

Peak Signal

Offset

Table 5.4: SODX command: Signal Identity’s scheme.

Summary of Contents for CHRocodile CLS0.2

Page 1: ...1 CHRocodile CLS Optical line sensor for non contact distance and thickness measurement Operation Manual ...

Page 2: ...nges in the technical details from the descriptions data and figures in this documentation are reserved Printed in the Federal Republic of Germany Responsible for Contents Original Edition Precitec Optronik GmbH Schleussnerstrasse 54 63263 Neu Isenburg Germany Telephone 0049 0 6102 36 76 100 Telefax 0049 0 6102 36 76 126 e mail info precitec optronik de Website http www precitec de en precitec gro...

Page 3: ...ility Jumbo packet Medical or safety relevant usage 1 0 0 5 2014 11 06 Ethernet connection Status LED Optical head specifications 1 0 0 6 2015 09 17 Optical head specifications Sync In additional information CLS Explorer 6KHz measuring mode CLS Explorer Library coming soon DLL C 1 0 1 0 2016 03 10 New Optical Head CLS2 3 1 0 1 1 2016 07 18 Encoder interface modification CLS Explorer Ultimate versi...

Page 4: ...n from Optic Radiation Eye Safety 10 1 5 3 Grounding the device 11 1 6 Medical or safety relevant usage 11 1 7 Storage and Transport 11 1 8 Emergency Procedures 11 Product Description 12 2 1 General Description 12 2 2 Measuring principle 13 2 2 1 Optical principle 13 2 2 2 Principle applied to multiple points sensor 14 2 3 Sensor Functionalities 15 2 4 Typical applications Overview 17 2 5 List of ...

Page 5: ... 27 2 8 Optical Head Specifications definitions 28 2 9 CHRocodile CLS performance specifications 29 Operational Start up 31 3 1 Connections and Interfaces 31 3 2 CHRocodile CLS Explorer and Drivers installations 33 3 3 Communication with CHRocodile CLS 33 3 4 CLS Explorer Library 34 Measurements Start Up 36 4 1 Calibration Table 36 4 2 Dark Acquisition 36 4 3 Auto Reference procedure 37 4 4 Mechan...

Page 6: ...O Command 58 5 2 12 THR Command 59 5 2 13 TRE Command 60 5 2 14 TRG Command 61 5 2 15 VER Command 62 5 2 16 Calibration Table Download Function 62 Mechanical Plans 63 6 1 Optical Head Mechanical plans 63 6 2 CHRocodile CLS unit mechanical plans 65 6 3 CHRocodile CLS unit mechanical interface plans 66 Maintenance 67 7 1 How to change fans 67 7 2 Optional accessories 69 7 2 1 Fans 69 7 2 2 Cables 70...

Page 7: ...7 8 3 Distance Measurement 71 8 4 Thickness measurement 72 Technical support 74 ...

Page 8: ... of improving quality or expanding the possible applications as well as any made for production related reasons Dismantling the device voids all warranty claims The exception to this is the replacement of parts that are subject to wear and tear and require maintenance or calibration to the extent that these are expressly identified in this documentation Changes made to the device on own authority ...

Page 9: ...surement apparatus for measuring distance thickness and surfaces for quality and dimensional control Only use the optical sensor in a dry environment The device may only be operated within the specifications given in the technical data Any use deviating from the intended and proper use is considered improper The user assumes liability for the consequences in these cases Electromagnetic Compatibili...

Page 10: ...e with the regulations and safety instructions and must have been informed of possible hazards 1 5 Safety Measurements in Normal Operation When it is assumed that the device can no longer be operated safety the device or the plant must be taken out of operation The device must be secured against unintended use Unauthorized interventions will void your rights to assert warranty claims Any attempt t...

Page 11: ...the measured sample as well as the influence of temperature and vibrations to the CHRocodile sensor Furthermore the user has to check the CHRocodile Line Sensor for correct measurements and for exceeding the specified measuring uncertainty 1 7 Storage and Transport In order to avoid damages in storage and transport the following ground rules are to be observed Maintain the storage temperature rang...

Page 12: ...ion line induced by optical fiber cable presence Due to their length their low capability to resist to torsional and elongation stress their photometric transmission intensity loss according to imposed radius of curvature optical fiber cables are subject to damage when the measuring device is exposed to high acceleration and or rotational displacement PRECITEC is the first company to propose a con...

Page 13: ...e in front of the detecting system to eliminate out of focus signal As only in focus light can be detected the image s optical lateral and axial resolution is improved Consequently the pinhole act as a spatial filter which block light which is out of focus or light which come from an external light source Confocal Chromatic Imaging Considering both confocality and axial chromatism properties a Whi...

Page 14: ...meter In this configuration the spectrometer is preferably bidimensionnal One direction corresponds to the channel number and the other direction carry the wavelength information Consequently the spectrometer carry the information of each point focused on the target s surface and the distance of the target surface from the chromatic objective can be calculated for all the focused points According ...

Page 15: ...with a known chromatic aberration The reflected light is more intense for the wavelength in focus on the surface For each of the 192 channels reflected light is spectrally analyzed and the spectral response is a peak centered on focused wavelengths The 192 spectral peak positions determine the distance to the surface of each of the 192 points along the line The 192 distances are simultaneously cal...

Page 16: ...he two surfaces For each of the 192 channels reflected light is spectrally analyzed and the spectral response is constituted of two peaks centered on focused wavelengths Considering the refractive index of the object one can determine the thickness of the object for the 192 points along the line The 192 thicknesses are simultaneously calculated and transmitted to host computer at up to 2KHz freque...

Page 17: ... CHRocodile CLS offers the ability to perform fast and accurate metrological control of production by being built on automatic or semi automatic inspection machines or by being directly integrated on production line for 100 inspection of manufactured parts In this this new technology fully meets the current needs of the industry as it is suitable for many applications The measurement of wafer in t...

Page 18: ...it see Fig 2 6 One operational Optical Head see Fig 2 7 One set of electric cables power supply see Fig 2 8 Power Supply Adapter 100 240VAC to 24VDC 10 see Fig 2 8 A CD with DLL and firmware Software user guide Operation Manual Qualification Test report Fig 2 5 CLS deliverables ...

Page 19: ...9 Fig 2 6 CHRocodile CLS unit 3D view a Straight version b Right angled version Fig 2 7 Optical Head 3D view a CLS0 2 b CLS1 c CLS2 3 d CLS4 Fig 2 8 Set of electrical cables a Power supply b Adapter a b ...

Page 20: ...male connector 6 Trigger Input Output RS422 Sub D15 female connector 7 Status LED Fig 2 9 CHRocodile CLS rear panel Connections 2 6 1 ON OFF Switch button The CHRocodile CLS has a Power switch ON OFF button 2 6 2 Power supply jack The CHRocodile CLS has two pluggable screw terminal for power supply with 24VDC 10 Connect the set of power cable supply associated to the Power Supply Adapter 100 240VA...

Page 21: ...onnect the sensor 2 6 5 Encoder input The incremental encoder input makes it possible to precisely assign each measurement points along the line and axis positions without additional hardware The CHRocodile CLS can manage with 5 axis Encoders For an exact distance or thickness measurement it is necessary for every measurement value to be assigned to the exactly correct spatial coordinates This dat...

Page 22: ...ge amount of data serial communication port cannot support data transfer 8 B1 I Differential encoder input 120 Ohm terminated 9 GND P ground 10 A2 I Differential encoder input 120 Ohm terminated 11 A2 I Differential encoder input 120 Ohm terminated 12 B2 I Differential encoder input 120 Ohm terminated 13 B2 I Differential encoder input 120 Ohm terminated 14 GND P ground 15 NC Not connected 16 A3 I...

Page 23: ... trigger each TRE Command the input is equipped with 10 kΩ pullup resistance at 5 V Sync Out Sync Output Isolated Sync Output Positive slope 0 V to 5 V with the start of each measurement The pulse duration is 50µs in general and every second one pulse is shorted to 10µs This is for synchronizing more sensors when their Sync In is connected with the Sync Out Table 2 4 Interface Remark As the Sync i...

Page 24: ...is transmitted and goes into a standby mode The last transmitted analog value persists until the next exposure also see TRG command 2 6 7 Status LED LED Status CHRocodile CLS Status No Signal RED LED Flashing GREEN LED BLUE LED Flashing BLUE GREEN LED GREEN LED Power OFF Power ON Firmware badly configured Power ON Firmware is configuring Power ON Firmware is configured Continuous Measurement Power...

Page 25: ...Via a DLL compatibility NET and C OS Windows XP Windows 7 Windows 8 Data Processing Calculation Embedded processing unit Standard to be met Power Supply 24VDC 10 40W with separate main supply unit 100 to 240VAC 50Hz to 60Hz Operating Temperature 5 C to 50 C Storage Temperature 20 C to 70 C CE marking EMC Compliant with applicable regulation RoHS Compliant with applicable regulation Protection Clas...

Page 26: ...Range Maximum number of transmitted data CLS0 2 CLS1 CLS2 3 CLS4 Up to 2KHz 200 µm 950 µm 2300 µm 3900 µm 6 3KHz 120 µm 580 µm 1400 µm 2380 µm 3 4KHz 85 µm 425 µm 1000 µm 1740 µm 2 5KHz 65 µm 320 µm 760 µm 1320 µm 2 6KHz 50 µm 240 µm 580 µm 1000 µm 1 Table 2 7 Measurement range based on the frequency measurement 2 Need for a DARK procedure when changing frequency When changing measuring frequency ...

Page 27: ... 35mm 3 1mm 5 5mm Axial Resolution 4 60nm 200nm 500nm 800nm MECHANICAL DIMENSIONS Length 70 35mm 8 93 3mm 8 99 5mm 8 120mm 8 Diameter 37mm 8 54mm 8 54mm 8 58mm 8 Weight 190g 430g 390g 510g Model Right angled or Straight 9 Right angled or Straight 9 Right angled or Straight 9 Right angled or Straight 9 Table 2 8 Optical Head Specifications 1 See section 2 8 Optical Head Specifications definitions 2...

Page 28: ...ny thermal expansion which could affect the accuracy of the sensor measuring process Considering this opto mechanical architecture the CHRocodile CLS unit has no visible optical cable and the user don t need to take care with this particularly sensitive component 2 8 Optical Head Specifications definitions W D Working Distance M R Measuring Range L Line length P Pitch between measuring spot S D Sp...

Page 29: ...al Resolution as function of object position in Measuring Range for one channel Accuracy Accuracy corresponds to the altitude deviation for each channel along the measuring range between the CHRocodile CLS and a calibrated interferometric reference sensor Consequently accuracy is an experimental specification Accuracy as a function of object position inside measuring range is calculated for each c...

Page 30: ...mum and maximum measurable thickness specification is given for n 1 5 refractive index It is measured on a standard sample in the center of measuring range for each channel T n D1 D2 Fig 2 13 Minimum and Maximum measurable thicknesses D1 D2 Tmin Tmax D1 D2 ...

Page 31: ...ed with the CHRocodile CLS unit Ethernet connector Connect the isolated RJ45 standard connector from the CHRocodile CLS unit to an Ethernet network PC Use shielded cable for the data port connection minimum category 5 cable The default CHRocodile CLS IP address is 192 168 170 2 Configure the PC Ethernet port to the following address 192 168 170 X X 2 To configure the Ethernet port of your PC you m...

Page 32: ...encoder interface Default are the encoder inputs not terminated Tye Sw0t02 to GND to terminate with 100 Ohm channel 0 to 2 Tye Sw3t04 to GND to terminate with 100 Ohm channel 3 to 4 If the encoder signals are fed through the sensor and additional other devices are connected e g for axis control the 100 Ohm termination can also be deactivated Since the device has to be opened to do this you should ...

Page 33: ...ile CLS is automatically detected through Ethernet network broadcast mode 3 3 1 Via CHRocodile CLS Explorer Premium version of CHRocodile CLS Explorer software is delivered with the sensor and is useful to configure sensor to visualize continuous measurements to perform statistic and to save data Additionally to these functionalities Ultimate version of CHRocodile CLS Explorer allows to perform 3D...

Page 34: ...face communication can be used to configure the sensor but cannot be used to receive measurement data due to the high amount of data simultaneously transmitted by CHRocodile CLS Only Ethernet allows unlimited data transmission at measuring rate up to 2KHz or 6KHz in high frequency mode As an example the Windows Hyper Terminal utility can be used to send the commands and configure the sensor via th...

Page 35: ...cts into your applications A ClsExplorerLibrary DLL ultimate license will be available in September 2016 with the possibility to integrate sample scanning functionalities Please refer to CLS Explorer Library Manual ...

Page 36: ...nel are calibrated independently at factory The calibration table depends on both spectrometer and optical head Consequently a calibration table is specific to one set of CHRocodile CLS sensor CHRocodile CLS unit Optical Head it can t be used on another set even if you are using the same optical head type i e same measuring range Fig 4 1 Example of calibration table for a single channel 4 2 Dark A...

Page 37: ...e done by PRECITEC as a maintenance operation 4 4 Mechanical interfacing After completing the operational startup i e connecting with the power supply proceed with initializing then communication is ready and mechanical interfacing should be done Mechanical interfacing consists in Connecting the Optical Head which suit to your application to the CHRocodile CLS unit The Optical Head is simply screw...

Page 38: ...annel s intensity is mostly the same this is not the case on inhomogeneous target and in that case it is recommended to adjust intensity in order to obtain the maximum intensity close to saturation In order to adjust LED intensity use the LAI command or the equivalent NET DLL function Cf sections 5 2 and 5 4 Measuring Rate Instead of adjusting intensity it is also possible to adjust the measuring ...

Page 39: ...record the data corresponding to the 192 channels of the Line sensor the Ethernet cable must be connected with the right IP address to enable the communication between CHRocodile CLS and the computer When the sensor is configured to measure simultaneously the 192 channel s data then it is possible to perform an area scan In order to scan the target one can move the optical head or the target along...

Page 40: ...40 to assign precisely each measurement points along the line and axis positions To do so one need to connect the incremental encoder input The CHRocodile CLS can manage with 5 axis Encoders ...

Page 41: ...ctions 0 Set Read Pos 1 set count source value 0 9 A0 B0 A1 B1 10 SyncIn 11 14 n a 15 Quardr 2 set preload value value 3 set preload event value Query currently supported for position only ETR func Index arguments see detailed description Encoder Trigger see detailed description IPCN 0 1 eight numbers 0 255 Configure TCP address and subnet mask 1st arg DHCP on off args 2 5 fixed IP addr args 6 9 m...

Page 42: ...tely to output data telegrams on the next power up STO Stop serial data output This mode will be stored in the EEPROM when executing the SSU command so on the next power up the CHR will not begin to send measurement data until the output is restarted by the STA command TABL Table ID args binary data Upload table to device or read back in case of See below for details THR 0 4094 threshold value thr...

Page 43: ...ARNING The settings will not be saved in the EEPROM by the SSU command The encoder trigger is implemented as a state machine In the idle state it waits for the encoder counter of the selected axis to pass the start position in either direction where it generates the first trigger event Then the trigger interval value is added to the current position and when this position is reached the next trigg...

Page 44: ...work DhcpMode true IPCN 0 192 168 170 2 255 255 255 0 0 IPCN DHCP IPA IPB IPC IPC MA MB MC MD MTU Configured as static IP address IP Address 192 168 170 2 Subnet Mask 255 255 255 0 MTU 0 no jumbo packets MTU argument gives the maximum transferable unit which can be anything between 1500 and 9000 bytes per TCP packet jumbo packets Client Network DhcpMode false Client Network IPAdress 192 168 170 2 ...

Page 45: ...nsity in order i e to remove saturation Command syntax LAI I Param I is Led intensity 0 100 Command Description NET LAI 95 Response LAI 95 CR ready CR LF Write Led intensity 95 Client LedIntensity 90 LAI Response LAI 95ready CR LF Read Led Intensity float Led Client LedIntensity ...

Page 46: ...re detected all thicknesses signals will be invalidated because peek identification is not possible Command syntax NOP I Param I is Number of Peak from 1 to 16 Command Description NET NOP 3 Response NOP 3 CR ready CR LF Write Number of Peak 3 Client NumberOfPeaks 3 NOP Response NOP 3ready CR LF Read Number of Peak int Number Client NumberOfPeaks ...

Page 47: ... serial interface would mean a distance in Full Scale micrometers To convert the integer distance value d received from the serial interface to a value in micrometers D use the formula D µm d integer 32768 Full Scale Command syntax SCA Command Description NET SCA Response SCA 3320ready CR LF Read Full Scale int FullScale client Scale ...

Page 48: ...e can be realized exactly In order to give the user the possibility to know the exact frequency to which the sample rate has been rounded the frequency can be queried with and will be returned as ASCII floating point number with 6 decimals Command syntax SHZ I Param I is sample rate 100Hz 2000Hz Command Description NET SHZ 1000 Response SHZ 1000 CR ready CR LF Write Sample Rate 1000 Hz Client Free...

Page 49: ...83 16640 16641 will output the sample counter the distance and the intensity Command syntax SODX A0 A1 AN Ax is optional parameters Signal ID s scheme Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Global Exposure Information 0 0 0 0 0 0 0 0 Global Exposure Signal ID s Peak Signal 0 1 Statistics 0 0 Measuring mode 1 0 0 0 Peak Number Peak Signal Offset Table 5 4 SODX command Signal Identity s scheme ...

Page 50: ...67 CR ready CR LF StartPositionZ Z encoder position on beginning of exposure sodx GlobalSignalStartPositionZ true Acquisition Format UInt32 SODX 68 Response SODX 68 CR ready CR LF StartPositionU U encoder position on beginning of exposure sodx GlobalSignalStartPositionU true Acquisition Format UInt32 SODX 69 Response SODX 69 CR ready CR LF StartPositionV V encoder position on beginning of exposure...

Page 51: ...ags true Acquisition Format UInt16 SODX 77 Response SODX 77 CR ready CR LF RealExpTimeNs Effective exposure period in nanoseconds sodx GlobalSignalRealExposureTime true Acquisition Format UInt32 SODX 78 Response SODX 78 CR ready CR LF RealLightingTimeNs Effective lighting period in nanoseconds sodx GlobalSignalRealLightningTime true Acquisition Format UInt32 SODX 79 Response SODX 79 CR ready CR LF...

Page 52: ...value SCA µm 32768 In order to get the geometrical thickness the value has to be multiplied by the index of refraction of the material For non geometrical quantities like intensity Truncated 16bit integer value Statistics are not supported by CLS Statistics are supported by CLS explorer Consequently the respective bit 11 to 13 are set to 0 Corresponding to NET function sodx AltitudePeakSignalOffse...

Page 53: ...53 Example Command Description NET SODX 28840 Response SODX 28840 CR ready CR LF Altitude 2nd peak sodx Altitude true sodx AltitudePeak2 true sodx AltitudePeakSignalOffset1 eSodxPeakSignalOffset Average ...

Page 54: ...turation max CCD illumination of related spectrum 3 PeakPos CCD pixel pos 4 PeakValue Median median of peak value CHRocodile 2 only 5 PeakWidth confocal mode only given in CCD pixels 6 reserved 7 reserved Peak Number Bits 3 and 4 Bits 3 and 4 are used to define the Peak Number which will be processed to calculate the demanded data The following quantities are available ...

Page 55: ... of refraction Consequently in order to obtain the real thickness data one must divide the result by the refractive index Altitude If bit 9 is set to 0 then the resulting value is the Altitude corresponding to the peak number defined in bits 3 and 4 Statistics Bit 11 to 13 Statistics are not supported by CLS Statistics are supported by CLS explorer Consequently the respective bit 11 to 13 are set ...

Page 56: ...on The command SSU saves Setup Saves current setup to non volatile memory EEPROM The Setup will be restored upon next power up Command syntax SSU Command Description NET SSU Response SSU CR ready CR LF Saves current setup Client SaveSetup ...

Page 57: ...arts serial data output This mode can be stored in the EEPROM If stored the CHRocodile CLS will begin immediately to output data telegrams on the next power up Command syntax STA Command Description NET STA Response STA CR ready CR LF Starts serial data output ...

Page 58: ...output This mode can be stored in the EEPROM so on the next power up the CHRocodile CLS will not begin to send measurement data until the output is restarted by the STA command Command syntax STO Command Description NET STO Response STO CR ready CR LF Stops serial data output ...

Page 59: ...es The reason is that at slower sampling rates the stray light of fiber and coupler is integrated longer on the detector Even though this signal is automatically subtracted as dark reference the statistical variations of this signal are stronger the higher the dark signal becomes If a typical value for good noise suppression and maximum sensitivity at 2kHz sampling rate could be 20 at 100Hz 50 wou...

Page 60: ... Trigger each mode Every exposure will be started by a rising edge of the sync in input The exposure time of the detector is determined by the selected sample rate SHZ Command syntax TRE Command Description NET TRE Response TRE CR ready CR LF Trigger each client TriggerEach ...

Page 61: ... intervals with the movement of a scanning axis It stops the sensor after completion of the current data telegram and puts it in a waiting state This state is left by a trigger event rising edge on the Sync in Encoder Trigger Command syntax TRG Command Description NET TRG Response TRG CR ready CR LF Wait For Trigger client TriggerStartStop ...

Page 62: ...crocontroller software C Command syntax VER Command Description NET VER Response VER 73 C V5 95 240909 DSPsoft V5 95 160909ready CR LF Read Versions string versions client Version 5 2 16 Calibration Table Download Function It is also possible to upload calibration tables using the CHRocodile CLS Explorer with the ultimate version Cf section 3 2 1 Calibration table is downloaded at factory and this...

Page 63: ...63 Mechanical Plans 6 1 Optical Head Mechanical plans b CLS1 a CLS02 c CLS4 36 4 18 5 ...

Page 64: ...64 Fig 6 1 Optical Head Mechanical plans a CLS0 2 b CLS1 c CLS4 d CLS2 3 d CLS2 3 ...

Page 65: ...65 6 2 CHRocodile CLS unit mechanical plans Fig 6 2 CHRocodile sensor unit mechanical plans a Straight version b Right angled version b Right angled version a Straight version ...

Page 66: ...nterface plans Fig 6 3 Line sensor mechanical interface Soleplate The two version of the CHRocodile CLS unit straight version and right angled version have a common soleplate Consequently mechanical interfaces are the same for both versions ...

Page 67: ...functioning temperature inside the CHRocodile unit will increase A thermal switch has been integrated inside the line sensor unit This thermal switch is a protection against high temperature which could damage the device and it consists in power off the line sensor unit when too high temperature occurs Therefore when the line sensor CHRocodile turns off unexpectedly check the fan operation Fig 7 1...

Page 68: ...or an easier access 4 Remove the 4 CHC screws of the fan you need to replace 5 Remove the fan to replace Fig 7 14 Steps 6 and 7 6 Repeat the steps in reverse with a new fan The wire going out of the fan must be directed to the other fan Watch out the arrow direction on the fan 7 Place the wires and connector in the space between the 2 fans see the bottom view below 3 4 5 6 7 ...

Page 69: ...placement is done 7 2 Optional accessories 7 2 1 Fans It is recommended to buy the fan reference F310 12LB You can ask to your CHRocodile CLS vendor to supply additional fans or you can buy it directly to COPAL Company In case of malfunctioning of a fan a protection thermal switch power off the line sensor unit in case of high temperature Thus it is preferable to have fans in stock in order to pro...

Page 70: ...2 2 Cables The following list of cables are available at your PRECITEC vendor site Sub D 15 cables for trigger in out Sub D26 cables for encoders input Ethernet cables Use shielded cable Power supply cables ...

Page 71: ... is recommended 8 3 Distance Measurement Case 1 The target is positioned in front of the sensor and no distance measurement is collected for all channels Set the measuring frequency to minimum SHZ100 or equivalent NET DLL function Set the LED intensity to maximum LAI100 or equivalent NET DLL function Check if a white light line emitted from the optical head is focused on the target Check if the ta...

Page 72: ...target and store the raw signal for each channels this file could be demanded by PRECITEC technical support team 8 4 Thickness measurement Case 1 The target is positioned in front of the sensor and no thickness measurement is collected for all channels Check that the target thickness is inside minimal and maximal measuring thickness range Check the target transparency Set the measuring frequency t...

Page 73: ... range i e Peak to Valley thickness variation should be inside minimal and maximal measuring thickness range maximum local slope on both target surface should be less than maximum measuring slope one or two target surface s are not homogeneous and show high reflectivity variations along the line Set a mirror in place of your target and store the raw signal for each channels this file could be dema...

Page 74: ...TOMER PRECITEC Number PRODUCT IDENTIFICATION Sensor Unit Serial Number Optical Head Serial Number Firmware Serial Number PROBLEM IDENTIFICATION Type Software Optic Mechanic Electronic Description Photos Attached files Photos Raw data Diagnostic file ...

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