27
2.7.3
Optical Heads characteristics
Optical Head
Specifications
CLS0.2
CLS1
CLS2.3
CLS4
GLO
BAL SPECIFICATIONS
Line Length
(1)
0.96mm +/-
0.01mm
1.91mm +/-
0.02mm
1.53mm +/-
0.02mm
4.78mm +/-
0.04mm
Working Distance
(1) (2)
5.3mm +/-
0.4mm
18.5mm +/-
0.5mm
15.6mm +/-
0.5mm
36.4mm +/-
0.6mm
Pitch along the line
(1)
5 +/- 0.05µm
10 +/- 0.1µm
8 +/- 0.08µm
25 +/- 0.25µm
Spot diameter
(1)
2µm
4µm
3.2µm
10µm
Max Object Slope
(1) (3)
+/- 44deg
+/- 33deg
+/- 33deg
+/- 20deg
DISTANCE
M
OD
E
Measuring Range
(1)
200µm
950µm
2300µm
3.9mm
Axial Resolution (R
min
)
(4) (5) (6)
20nm
80nm
200nm
320nm
Accuracy
(4) (5)
80nm
300nm
780nm
1.2µm
THICKNESS
M
ODE
Min. Measurable
Thickness
(4) (7)
20µm
75µm
200µm
300µm
Max. Measurable
Thickness
(4) (7)
280µm
1.35mm
3.1mm
5.5mm
Axial Resolution
(4)
60nm
200nm
500nm
800nm
M
ECHAN
ICAL
DIM
ENSION
S
Length
70.35mm
(8)
93.3mm
(8)
99.5mm
(8)
120mm
(8)
Diameter
37mm
(8)
54mm
(8)
54mm
(8)
58mm
(8)
Weight
190g
430g
390g
510g
Model
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Right angled or
Straight
(9)
Table 2.8: Optical Head Specifications
(1) See section 2.8: Optical Head Specifications definitions
(2) Bottom of the optical probe to middle of the measuring range
(3) Decreasing accuracy on the limits
(4) See section 2.9: CHRocodile CLS performance Specifications
(5) Measurement on perpendicular mirror at 20°C with optimal Signal to Noise ratio.
(6) Axial Resolution varies with intensity signal in %. Axial Resolution = 10 x R
min
x I
-0.5
(7) Refractive index n=1.5
(8) See Fig 6-1: Optical Head Mechanical plan
(9) See Fig 6-2: CHRocodile CLS unit mechanical plan