17
2.4
Typical applications (Overview)
A broad range of possible applications is available to this highly precise sensor.
The CHRocodile CLS is the fastest sensor based on confocal chromatic imaging principle. They are
perfectly suitable for demanding measuring tasks, like non-contact measurement of microtopography,
layer thickness measurements. It could be used both on various reflecting and scattering surfaces.
The PRECITEC confocal chromatic line sensor is very well adapted to industrial environment, as no
optical cable are connected to the CHRocodile CLS unit. The absence of optical cables, promotes
robustness and compactness of the measuring device, and also facilitates the integration and use on
a motorized moving system, such as a coordinate measuring machine (CMM). Then this new type of
sensor overcomes the industrial constraints induced by fiber optic cables that are known to deteriorate
when the measuring device is subject to high accelerations and / or rotational movements.
The CHRocodile CLS offers the ability to perform fast and accurate metrological control of production,
by being built on automatic or semi -automatic inspection machines, or by being directly integrated on
production line for 100% inspection of manufactured parts. In this, this new technology fully meets the
current needs of the industry as it is suitable for many applications:
-
The measurement of wafer in the field of semiconductor and generally microelectronics,
-
The measurement and online control of mechanical or optical parts,
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Or even the measurement and control of glass or plastic film thickness.
Other fields of applications exist, the common point is to seek a measurement system going faster and
faster, more and more compact and as flexible as possible, it is the case in laboratory environment
and even more in industrial environment. It appears clearly here that the CHRocodile CLS unit of
measurement meet these different needs.
Optical Head
Application
CLS
200µm
CLS
1mm
CLS
2.3mm
CLS
4mm
Electronics
Micro-Electronics
Mechanics
Micro-Mechanics
Optics
Micro-Optics
Shape
Flatness
Roughness
Plastic and glass thickness
Thin film thickness
Coating thickness
Table 2.1:
Sensor applications
