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10 Technical Data 

H-811 Hexapod Microrobot 

MS235E 

Version: 2.4.0 

65 

                    

Miscellaneous 

H-811.S2 

Tolerance 

Recommended 

controllers / drivers 

C-887.5x 

 

Cable length 

0.5 m 

 

Operating temperature 

range 

0 to 50 °C 

 

                    

 

Technical data specified at 22±3 °C. 

The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel range, where all 
other axes and the pivot point are at the reference position. 

The cables fixed to the H-811.S2 are 0.5 m long respectively. 

The cables fixed to the H-811.S2 are not drag chain compatible. 

 

Connecting cables are not in the scope of delivery and must be ordered separately. 

 

10.1.2

 

Specifications for Vacuum-Compatible Versions 

 

Drive and sensor 

Motor 

Brushless, three-phase torque motor  

vacuum-compatible model with gold-coated plug contacts 

Gearhead 

Direct drive 

Encoder 

Optical encoder, vacuum-compatible 

Reference switch 

Optical, vacuum-compatible 

Limit switches 

Optical, vacuum-compatible 

Materials used 

Machine-made parts  >95% of the machine-made parts, i.e. base plate, struts, 

motion platform: 

AlMgSi (3.2315) and AlMg4.5Mn (3.3547) chemically nickel-

plated, stainless steel type 303 (1.4305) 

Remaining parts, e.g. coupling elements: 

Various vacuum-compatible materials 

Bearing 

Stainless steel 

Drive elements 

Stainless steel (drive screw) 

Summary of Contents for H-811

Page 1: ...obot brushless DC motor vacuum compatible to 10 6 hPa 5 kg load capacity 10 mm s velocity cable set 2 m vacuum side feedthroughs Air side connecting cables are not included in the scope of delivery an...

Page 2: ...emark of iC Haus GmbH 2021 Physik Instrumente PI GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH...

Page 3: ...2 Model Overview 7 3 3 Suitable Controllers 8 3 4 Product View 9 3 5 Scope of Delivery 9 3 6 Accessories 12 3 7 Technical Features 12 3 7 1 Struts 12 3 7 2 Reference Switch and Limit Switches 12 3 7...

Page 4: ...1 2 Specifications for Vacuum Compatible Versions 65 10 1 3 Maximum Ratings 69 10 1 4 Specifications for Data Transmission and Power Supply Cables 69 10 2 Ambient Conditions and Classifications 71 10...

Page 5: ...a fundamental understanding of basic servo systems as well as motion control concepts and applicable safety procedures The latest versions of the user manuals are available for download p 3 on our web...

Page 6: ...his manual 1 3 Figures For better understandability the colors proportions and degree of detail in illustrations can deviate from the actual circumstances Photographic illustrations may also differ an...

Page 7: ...missing or problems occur with downloading Contact our customer service department p 55 Downloading Manuals 1 Open the website www pi ws 2 Search the website for the product number e g P 882 or the p...

Page 8: ......

Page 9: ...intended in conjunction with a suitable controller available from PI p 8 which coordinates all motion of the hexapod 2 2 General Safety Instructions The H 811 is built according to state of the art t...

Page 10: ...811 only after you have read and understood this user manual Personnel qualification The H 811 may only be installed started operated maintained and cleaned by authorized and appropriately qualified...

Page 11: ...th the motion platform High accuracy and step resolution in all axes No accumulation of errors of individual axes No friction and torques from moving cables The hexapod is controlled with a controller...

Page 12: ...IP RS 232 benchtop device incl control of two additional axes analog inputs C 887 522 6 axis controller for hexapods TCP IP RS 232 benchtop device incl control of two additional axes motion stop C 88...

Page 13: ...transmission cable 4 Power supply cable 5 Base plate 6 Mounting plate held by magnets 3 5 Scope of Delivery Order number Components H 811 Hexapod according to your order p 7 H 811 I2 F2 S2 Cables with...

Page 14: ...Inner box Eight cushioned corners for inner box Foam insert for inner box with separate clamp Pallet Documentation consisting of H811T0001 Technical note on unpacking the hexapod MS247EK Short instruc...

Page 15: ...mission cable for hexapods drag chain compatible HD D sub 78 m f 7 5 m C 815 82D10 Data transmission cable for hexapods drag chain compatible HD D sub 78 m f 10 m C 815 82D20 Data transmission cable f...

Page 16: ...features a high resolution analog input Installation is done by a PI service engineer in a remote session Contact will be established by PI after purchase 3 7 Technical Features 3 7 1 Struts The hexa...

Page 17: ...Every time the controller of a hexapod equipped with incremental encoders is switched on or rebooted the hexapod must complete a reference move in which each strut moves to its reference switch After...

Page 18: ...is described in the C887T0007 technical note Figure 2 Coordinate system and rotations to the rotational coordinates U V and W The coordinate system is depicted above the platform for better clarity Tr...

Page 19: ...ed from the individual rotations in the order U V W For further information on the center of rotation see the glossary p 89 INFORMATION The dimensional drawing p 72 contains the following Orientation...

Page 20: ...is Platform in reference position Platform position U 10 U parallel to spatially fixed X axis 1 The V axis is commanded to move to position 10 The rotation takes place around rotational axis V which w...

Page 21: ...n Platform position U 10 V 10 U and V parallel to the platform level 1 The W axis is commanded to move to position 10 The rotation takes place around the rotational axis W which was tilted during the...

Page 22: ...data is loaded from the ID chip when the controller is switched on or rebooted Depending on the data loaded the controller keeps the current configuration or installs a new configuration For simple re...

Page 23: ...during assembly and measuring In addition the hexapod is wipe cleaned afterwards and then shrink wrapped twice in vacuum compatible film Touch the hexapod only with powder free gloves If necessary wi...

Page 24: ...shioned corners 3 Open the inner box 4 Take the foam insert together with the hexapod out of the inner box carefully 5 Tip the foam insert with the hexapod 90 onto its longitudinal side and put it ont...

Page 25: ...d and take it out of the lower half of the foam insert 9 Remove the foil from the hexapod 10 Compare the contents with the items listed in the contract and the packing list If any of the parts are wro...

Page 26: ......

Page 27: ...ions Impermissible mechanical load and collisions between the hexapod the load to be moved and the surroundings can damage the hexapod Only hold the hexapod by the base plate Before installing the loa...

Page 28: ...od load and surroundings The use of the software is recommended when the hexapod is located in a limited installation space and or operated with a spatially limiting load For details on activation and...

Page 29: ...FORMATION If there is any vibration in your application secure the screw connection for the protective earth conductor in a suitable manner e g with liquid adhesive to prevent it from unscrewing by it...

Page 30: ...apod Ensure the following in your application for the permanently installed data transmission cable The cable is not subject to tensile stress The cable is not moved Fix the permanently installed data...

Page 31: ...installed to the hexapod is not moved in your application and is not subject to tensile stress 3 Fix the connector holder onto the underlying surface with the screws supplied The free side of the conn...

Page 32: ...he hexapod a Insert the locating pins into the locating holes in the hexapod or the surface b Place the hexapod on the surface so that the locating pins are inserted into the corresponding locating ho...

Page 33: ...and the load on the mounting fixtures holes intended for this purpose INFORMATION H 811 F2 model only The load to be aligned can be fixed to the mounting plate or directly to the motion platform Fixi...

Page 34: ...rkspace for the hexapod p 24 You have designed the load and the surroundings of the hexapod so that the permissible load of the hexapod is adhered to and no collisions can occur Tools and accessories...

Page 35: ...de The layout for the holes in the motion platform of the hexapod and the mounting plate can be found in the dimensional drawing p 72 3 To fix the load tighten the screws in the selected mounting hole...

Page 36: ...able manner Fix the permanently installed data transmission cable with the supplied connector holder p 9 to underlying surface Requirements The controller is switched off i e the on off switch is in t...

Page 37: ...ion H 811 Hexapod Microrobot MS235E Version 2 4 0 33 If necessary Installing vacuum feedthroughs Figure 8 Vacuum feedthrough for data transmission 4668 dimensions in mm B 4 holes 6 x 45 for M3 counter...

Page 38: ...ll the vacuum feedthrough for the power supply C887B0002 so that the 2 pin LEMO connection is in the vacuum chamber Connecting the hexapod to the controller Connect the hexapod and the controller to e...

Page 39: ...f cable set without line driver boxes Panel plug connector male Socket connector female Controller Refer to Suitable Controllers p 8 Hexapod Cables with a length of 0 5 m are installed permanently A P...

Page 40: ...ector female Controlle r Refer to Suitable Controllers p 8 Hexapod H 811 I2V Kabel mit L nge 2 m sind dauerhaft installiert A Power adapter from the scope of delivery of the controller 24 V DC output...

Page 41: ...parts NOTICE Incorrect configuration of the controller The configuration data used by the controller e g geometrical data and servo control parameters must be adapted to the hexapod If incorrect conf...

Page 42: ...tally oriented base plate but in any other orientation The hexapod is mounted with a horizontally oriented base plate and is not in the reference position As a result of unintentional position changes...

Page 43: ...hexapod is supplied via a separate power adapter If you want to actively use the E Stop socket connect the hexapod s power adapter accordingly For further information see Using the E Stop Socket in t...

Page 44: ...apt the controller s settings permanently to the 12 V power adapter of the hexapod and to reboot the controller SVO X 0 CCL 1 advanced SPA 1 0x19004000 0 WPA 101 1 0x19004000 SPA 1 0x5a 50000 2 0x5a 5...

Page 45: ...oller and the PC via the TCP IP interface or the RS 232 interface 5 Send the following commands to adapt the controller s settings permanently to the hexapod s 24 V supply SVO X 0 CCL 1 advanced SPA 1...

Page 46: ......

Page 47: ...exapod the following maintenance measures are required 7 1 Performing a Maintenance Run Frequent motion over a limited travel range can cause the lubricant to be distributed unevenly on the drive scre...

Page 48: ...bent or crushed too much Accessories Original packaging p 9 Packing the hexapod 1 Command hexapod motion to the transport position X Y Z U V W 0 2 Uninstall the hexapod system a Remove the load from...

Page 49: ...on 2 4 0 45 5 Grip the base plate of the hexapod and lay it sideways into one half of the foam insert Make sure that the hexapod is correctly aligned to the recesses in the insert 6 Align the second h...

Page 50: ...alves together 8 Make sure that the inner box is sitting on four cushioned corners in the outer box 9 Put the hexapod into the inner box a Align the foam insert so that the clamp and therefore the hex...

Page 51: ...crorobot MS235E Version 2 4 0 47 c Lower the foam insert with the hexapod into the inner box carefully 10 Close the inner box 11 Put four cushioned corners onto the inner box 12 Close the outer box 13...

Page 52: ...exapod from the controller Cleaning the hexapod Only when the hexapod is not used in vacuum If necessary clean the surfaces of the hexapod with a cloth that is dampened with a mild cleanser or disinfe...

Page 53: ...p 27 Only mount loads with a flat footprint surface The recommended flatness of the surface is 20 m Poor lubrication because of small movements over a long period of time Do a maintenance run over th...

Page 54: ...es not move The mechanics is not supplied with voltage Check the power supply cable If applicable check the power adapter of the mechanics Check the Power Good signal of the hexapod Options In PIMikro...

Page 55: ...The servo mode was switched off due to a malfunction 1 Send the SVO command to check the activation state of the servo mode 2 Send the ERR command and check the error code that is returned For details...

Page 56: ...ntroller Check the Power Good signal and the activation state of the 24 V output for the hexapod 24 V Out 7 A Options In PIMikroMove open the Diagnostic Information window by choosing C 887 Show diagn...

Page 57: ...to ERR contains the error code 233 or 211 the controller does not have the configuration file for the hexapod Contact our customer service department in order to receive a suitable configuration file...

Page 58: ...position of the motion platform If error code 7 is returned and the current position for at least one axis is outside of the travel range limits the following steps must be taken Check your system and...

Page 59: ...formation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if ap...

Page 60: ......

Page 61: ...ce Active axes X Y Z X Y Z Travel range in X 17 mm Travel range in Y 16 mm Travel range in Z 6 5 mm Rotation range in X 10 Rotation range in Y 10 Rotation range in Z 21 Maximum velocity in X unloaded...

Page 62: ...15 m Typ Unidirectional repeatability in Y 0 15 m Typ Unidirectional repeatability in Z 0 06 m Typ Unidirectional repeatability in X 2 rad Typ Unidirectional repeatability in Y 2 rad Typ Unidirection...

Page 63: ...al Stainless steel aluminum Miscellaneous H 811 I2 Tolerance Recommended controllers drivers C 887 5x Cable length 0 5 m Operating temperature range 0 to 50 C Technical data specified at 22 3 C The tr...

Page 64: ...ocity in Z unloaded 10 mm s Maximum angular velocity in X unloaded 250 mrad s Maximum angular velocity in Y unloaded 250 mrad s Maximum angular velocity in Z unloaded 250 mrad s Typical velocity in X...

Page 65: ...tal motion in Z 0 08 m Typ Minimum incremental motion in X 2 rad Typ Minimum incremental motion in Y 2 rad Typ Minimum incremental motion in Z 3 rad Typ Backlash in X 0 2 m Typ Backlash in Y 0 2 m Typ...

Page 66: ...dinates X Y Z X Y Z are interdependent The data for each axis in this table shows its maximum travel range where all other axes and the pivot point are at the reference position Scanning times typical...

Page 67: ...X unloaded 5 mm s Typical velocity in Y unloaded 5 mm s Typical velocity in Z unloaded 5 mm s Typical angular velocity in X unloaded 120 mrad s Typical angular velocity in Y unloaded 120 mrad s Typica...

Page 68: ...lash in Z 0 15 m Typ Backlash in X 5 rad Typ Backlash in Y 5 rad Typ Backlash in Z 10 rad Typ Integrated sensor Incremental rotary encoder Drive properties H 811 S2 Tolerance Drive type Brushless DC m...

Page 69: ...drag chain compatible Connecting cables are not in the scope of delivery and must be ordered separately 10 1 2 Specifications for Vacuum Compatible Versions Drive and sensor Motor Brushless three pha...

Page 70: ...e 603 Loctite 3321 Araldite 2014 1 Huntsmann Miscellaneous Bakeout temperature 80 C 176 F Specifications Motion H 811 I2V Tolerance Active axes X Y Z X Y Z Travel range in X 17 mm Travel range in Y 16...

Page 71: ...bility in X 0 15 m Typ Unidirectional repeatability in Y 0 15 m Typ Unidirectional repeatability in Z 0 06 m Typ Unidirectional repeatability in X 2 rad Typ Unidirectional repeatability in Y 2 rad Typ...

Page 72: ...aximum load capacity any base plate 2 5 kg Maximum load capacity horizontal base plate 5 kg Overall mass 2 2 kg Material Stainless steel aluminum Miscellaneous H 811 I2V Tolerance Vacuum class 10 6 hP...

Page 73: ...y cables Model Overview Data transmission cable Power supply cable single side angled connector Power supply cable straight connectors All hexapod types H 820 H 824 H 825 H 840 H 850 H 810 H 811 H 206...

Page 74: ...2 3 5 7 5 10 20 m Maximum velocity 3 m s Maximum acceleration 5 m s2 Maximum number of bending cycles 1 million Operating temperature range 10 to 70 C Power supply cable straight connectors Unit Mini...

Page 75: ...eter 10 7 mm Connectors HD D sub 78 m f 10 2 Ambient Conditions and Classifications Degree of pollution 2 Air pressure 1100 hPa to 780 hPa Vacuum compatible models 1100 hPa to 10 6 hPa Transport tempe...

Page 76: ...d of a decimal point in the drawings The figure shows the hexapod in the reference position The 0 0 0 coordinates indicate the origin of the coordinate system The center of rotation is at the origin o...

Page 77: ...10 Technical Data H 811 Hexapod Microrobot MS235E Version 2 4 0 73 Figure 12 H 811 hexapod I2 I2V S2 models...

Page 78: ...10 Technical Data 74 Version 2 4 0 MS235E H 811 Hexapod Microrobot Figure 13 H 811 hexapod F2 model...

Page 79: ...11 Hexapod Microrobot MS235E Version 2 4 0 75 10 3 2 000067899 Connector Holder Dimensions in mm Note that the decimal points are separated by a comma in the drawings Figure 14 000067899 connector hol...

Page 80: ...nical Data 76 Version 2 4 0 MS235E H 811 Hexapod Microrobot 10 4 Load Curves Figure 15 Maximum loads on the H 811 I2 when mounted horizontally Figure 16 Maximum loads on the H 811 I2 when mounted vert...

Page 81: ...H 811 Hexapod Microrobot MS235E Version 2 4 0 77 Figure 17 Maximum loads on the H 811 I2 when mounted at the most unfavorable angle Figure 18 Maximum permissible force acting on the H 811 I2 when mou...

Page 82: ...10 Technical Data 78 Version 2 4 0 MS235E H 811 Hexapod Microrobot Figure 19 Maximum loads on the H 811 I2V when mounted horizontally Figure 20 Maximum loads on the H 811 I2V when mounted vertically...

Page 83: ...H 811 Hexapod Microrobot MS235E Version 2 4 0 79 Figure 21 Maximum loads on the H 811 I2V when mounted at the most unfavorable angle Figure 22 Maximum permissible force acting on the H 811 I2V when mo...

Page 84: ...10 Technical Data 80 Version 2 4 0 MS235E H 811 Hexapod Microrobot Figure 23 Maximum loads on the H 811 F2 when mounted horizontally Figure 24 Maximum loads on the H 811 F2 when mounted vertically...

Page 85: ...H 811 Hexapod Microrobot MS235E Version 2 4 0 81 Figure 25 Maximum loads on the H 811 F2 when mounted at the most unfavorable angle Figure 26 Maximum permissible force acting on the H 811 F2 when mou...

Page 86: ...e diagrams mark the dynamic operational area of the H 811 S2 The following requirements apply 1 A compact load is mounted centrically 2 The base plate of the hexapod is in the horizontal mounting posi...

Page 87: ...10 Technical Data H 811 Hexapod Microrobot MS235E Version 2 4 0 83 Figure 28 Dynamic operational area of the H 811 S2 W 2 5 kg Figure 29 Dynamic operational area of the H 811 S2 X and Y 2 5 kg...

Page 88: ...perational area of the H 811 S2 Z 2 5 kg 10 6 Pin Assignment 10 6 1 Power Supply Connection Nicht f r Vakuumversionen Power supply via 4 pin M12 Stecker Pin Function 1 GND 2 GND 3 24 V DC 4 24 V DC On...

Page 89: ...78 m Function All signals TTL Pin Assignment Pin Pin Signal Pin Pin Signal 1 CH1 Sign IN 40 CH1 MAGN IN 21 CH1 Ref OUT 60 CH1 LimP OUT 2 nc 41 CH1 LimN OUT 22 CH1 A OUT 61 CH1 B OUT 3 CH1 A OUT 42 CH...

Page 90: ...imN OUT 31 CH4 A OUT 70 CH4 B OUT 12 CH4 A OUT 51 CH4 B OUT 32 GND 71 GND 13 CH5 Sign IN 52 CH5 MAGN IN 33 CH5 Ref OUT 72 CH5 LimP OUT 14 nc 53 CH5 LimN OUT 34 CH5 A OUT 73 CH5 B OUT 15 CH5 A OUT 54 C...

Page 91: ...rnational national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all...

Page 92: ......

Page 93: ...oordinate system and the center of rotation are used the center of rotation after a reference move is located at the origin of the coordinate system 0 0 0 see the dimensional drawing of the hexapod p...

Page 94: ...ed Cartesian coordinate system 0 0 0 is referred to as the origin The Z axis is perpendicular to the base plate of the hexapod The following example figures of the H 810 hexapod show that the coordina...

Page 95: ...12 Glossary H 811 Hexapod Microrobot MS235E Version 2 4 0 91 Figure 32 H 810 hexapod the platform of which has been moved in X 1 Cable exit...

Page 96: ......

Page 97: ...he translational axes before delivery The performance test sheet is included in the scope of delivery The following figure shows the test setup used Figure 33 Test setup for measuring the X or Y axis...

Page 98: ......

Page 99: ...Conformity For the H 811 an EU Declaration of Conformity has been issued in accordance with the following European directives EMC Directive RoHS Directive The applied standards certifying the conform...

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