Pfeiffer Vacuum TSH 071 Operating Instructions Manual Download Page 4

4

The plug and play type pumping stations are fully
automatically operating pumping units.

The integrated power part with the Display And Operating
Unit DCU 001 serves to control and monitor the pumping 
station and works in conjunction with the Electronic Drive
Unit TC 600.

Cooling

Standard type:

Air cooling integrated in the casing 
(up to 35 °C ambient temperature).

Alternative: 

Water cooling (please see Section 9. 
Accessories).

Details regarding the pumping station 

components can be found in the respective
operating instructions.
The possible pumping station variants and
their components are set out in Section 2.3. of
these operating instructions.

Transport

Lifting gear, which may only be attached to the ring screws,
can be used to transport the pumping stations.
The threaded holes for the ring screws are located in the high
vacuum flange.
The two carrying handles 3 (please see the illustration above)
are provided only for manual carrying.

PLEASE NOTE

2. Understanding The Pumping Stations 

Where the delivery of pumping stations include

a rotary vane vacuum pump it must be noted
that this rotary vane pump is supplied without a
filling of operating fluid.
Before first time starting, the rotary vane 
vacuum pump must be filled with operating fluid. 
The operating fluid is contained in a pack inclu-
ded with the delivery consignment.

Before first-time starting on pumping stations

equipped with a Diaphragm Pump MVP 055-3 or
a rotary vane vacuum pump, the transportation
protection must be removed (please see the
sticker an the pumping station).
For the procedure please refer to Section 4.1..

Proper Use

– The turbomolecular pumping stations may only be used for

the purpose of generating vacuum.

– The turbomolecular pumping stations may only be 

operated in the existing configuration.

Improper Use

The following is regarded, inter alia, as improper:
– The pumping of explosive or corrosive gases.
– Operating the pumping stations in areas where there is a

danger of explosion.

– The use of accessories which are not named in this

manual or which have not been agreed by the 
manufacturer.

Improper use will cause all claims for liability and guarantees
to be forfeited.

2.2. Pumping Station Control

PLEASE NOTE

CAUTION

Pumping Station

Pumping Station Control

Operating Instructions 
for DCU/TPS

TSH 071

TC 600 with 

TSU 071

DCU 001 and TPS 100

TSH 261

TC 600 with 

PM 0477 BN/

TSU 261

DCU 001 and TPS 200

PM 0521 BN

TSH 521

TC 600 with 

TSU 521

DCU 001 and TPS 300

2.1. Main Features

1

2

3

3

Turbomolecular Drag Pumping Station TSH 521

1

High vacuum flange

2

Display And Operating Unit DCU

3

Carrying handle

Summary of Contents for TSH 071

Page 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Page 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Page 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Page 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Page 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Page 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Page 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Page 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Page 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Page 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Page 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Page 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Page 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Page 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Page 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Page 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Page 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Page 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Page 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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