11
– Once the self test has been successfully completed
(duration: TSH/TSU 071 approximately 10 s; TSH/TSU 261
approximately 10 s; TSH/TSU 521 approximately 15 s),
the pumping station begins to operate.
– If the vacuum pump does not start after being switched on
please refer to "What To Do In Case Of Breakdowns" In the
repective operating instructions for the turbopump.
– The turbomolecular drag pump starts up automatically.
The start up phase up to attainment of the rotation speed
switchpoint is dependent on the size of the vacuum
chamber. For start up times in respect of the turbopump
please refer to "Technical Data" in the relevant operating
instructions.
Where the incidence of water vapour is
anticipated, before starting the pumping
station it is recommended to open the gas
ballast valve on the backing pump by hand. If it
is ascertained that the intake pressure of the
pump increases or is unusually high, the valve
can be opened while the pumping station is
running. Once the final pressure has stabilized
the valve can be closed again.
4.5. Switching OFF And Venting
➡
The complete pumping station is switched off with the
key 6 "Pumpstand EIN/AUS" / "pumping station ON/OFF".
– Turbopump and vacuum chamber are vented via Venting
Valve TVF 005 which opens for 0.3 seconds when the
venting frequency does not attain 50% of the final rotation
speed. It then closes again for 10 seconds and is then
opened for the venting time of 3,600 seconds (1 hour).
– The venting mode can be changed via the DCU.
➡
Where water cooling is involved: Shut off water supply.
☞
PLEASE NOTE
1
2
8
7
6
3
4
5
Pumping station front panel
1
LCD display
2
Status display
3
Malfunction
acknowledgment key
4
Key "left"
5
Key "right"
6
Pumping station ON/OFF key
7
Red illuminating diode for
malfunction status
8
Green illuminating diode for
operations status
4.4. Starting
Turbopump rotors turn at great speed. When the
high vacuum flange is open there is a danger of
personal injury and of damage to the pump resul-
ting from the falling in of objects.
Therefore, never operate the pump with an open
high vacuum flange.
➡
With water cooling: Open the cooling water supply and
check flow.
➡
Switch on the pumping station with the "Pumpstand
EIN/AUS" ("pumping station ON/OFF") key (6) on the front
panel.
WARNING
5. What To Do In Case Of Breakdowns?
Please refer to the operating instructions for the individual
components for information on the elimination of
malfunctions.
