Pfeiffer Vacuum TSH 071, Operating Instructions Manual

Page: 14 / 19

14
8. Technical Data
Pumping Station
Unit
TSH 071
TSH 071
TSU 071
TSH 261
TSU 261
TSH 521
TSH 521
TSU 521
TSU 521
Connection, nominal diameter
DN 40 ISO-KF
DN 63 ISO-K
DN 63 CF-F
DN 100 ISO-K
DN 100 CF-F
DN 100 ISO-K
DN 160 ISO-K
DN 100 CF-F
DN 160 C
F-F
Pumping speed for Nitrogen N
2
l/s
33
60
60
210
210
300
510
300
510
Final pressure with
rotary vane vacuum pumps
mbar
< 1 · 10
-7
< 1 · 10
-7
< 5 · 10
-10
< 1 · 10
-7
< 5 · 10
-10
< 5 · 10
-10
1)
< 5 · 10
-10
1)
< 5 · 10
-10
< 5 · 10
-10
diaphragm pumps
mbar
< 1 · 10
-7
< 1 · 10
-7
< 1 · 10
-8
< 1 · 10
-7
< 1 · 10
-8
< 1 · 10
-8
1)
< 1 · 10
-8
1)
< 1 · 10
-8
< 1 · 10
-8
Pumping speed, backing pump at a mains frequency of 50 Hz with
Diaphragm Pump
MVP 015-2
m
3 /h
0,9
0,9
0,9
—
—
—
—
—
—
MVP 035-2
m
3 /h
2,1
2,1
2,1
2,1
2,1
—
—
—
—
MVP 055-3
m
3 /h
3,3
3,3
3,3
3,3
3,3
3,3
3,3
3,3
3,3
Rotary Vane Pump
DUO 2.5
m
3 /h
2,5
2,5
2,5
2,5
2,5
2,5
2,5
2,5
2,5
UNO 5
m
3 /
h
555555
5
5
5
DUO 5
m
3 /
h
555555
5
5
5
DUO 10
m
3 /h
10
10
10
10
10
10
10
10
10
Mains connection- power consumption with
Diaphragm Pump
MVP 015-2
VA
140
140
140
—
—
—
—
—
—
MVP 035-2
VA
280
280
280
380
380
—
—
—
—
MVP 055-3
VA
300
300
300
400
400
500
500
500
500
Rotary Vane Pump
DUO 2.5
VA
230
230
230
330
330
430
430
430
430
UNO 5
V
A
230
230
230
330
330
430
430
430
430
DUO 5
V
A
470
470
470
570
570
670
670
670
670
DUO 10
VA
650
650
650
750
750
850
850
850
850
Weight with
Diaphragm Pump
MVP 015-2
kg
28
28
28
—
—
—
—
—
—
MVP 035-2
kg
32
32
32
42
42
—
—
—
—
MVP 055-3
kg
37
37
37
47
47
56
56
56
56
Rotary Vane Pump
DUO 2.5
kg
32
32
32
42
42
51
51
51
51
UNO 5
kg
32
32
32
42
42
51
51
51
51
DUO 5
kg
44
44
44
54
54
63
63
63
63
1) Final pressure only reachable with metal sealing of the high vacuum flange